公开(公告)号：US11639891B2

公开(公告)日：2023-05-02

申请号：US17498755

申请日：2021-10-12

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Joonhyun Kang ,  Il Ki Han ,  S. Joon Kwon ,  Young Min Jhon

IPC: G01N21/17 ,  G01N33/00

Abstract: The present disclosure relates to a photoacoustic gas sensor for detecting the presence or absence of gas using the interaction of a laser beam and gas molecules. The integrated photoacoustic gas sensor according to an embodiment includes a light output unit; a lens unit configured to concentrate a laser beam output from the light output unit; and a photoacoustic sensing unit having a quartz tuning fork aligned on the lens unit and configured to convert a vibration, generated when the laser beam passing through the lens unit interacts with gas molecules, into an electric signal.