Abstract:
The present invention relates to polyalkylene oxide porogens having hyper-branches and low dielectric-constant insulators using them. More particularly, the present invention relates to polyalkylene oxide porogens having hyper-branches expressed by the following formula (1), where the polyalkylene oxide porogen has a center molecular (D) having branches (W), and low dielectric-constant insulators having nanopores prepared by coating a mixture of the porogen and a high heat-resistant resin such as polysilsesquioxane and thermal treating the coated substrate at a temperature effective to degrade the porogen. Dnull(nullYnullW)l nullnull(1)
Abstract translation:本发明涉及具有超分支和使用它们的低介电常数绝缘体的聚环氧烷致孔剂。 更具体地说,本发明涉及具有由下式(1)表示的超分支的聚环氧烷致孔剂,其中聚环氧烷致孔剂具有分枝(W)的中心分子(D)和具有纳米孔的低介电常数绝缘体 通过涂覆致孔剂和高耐热树脂如聚倍半硅氧烷的混合物并在有效降解致孔剂的温度下热处理涂覆的基材来制备。 D - ( - Y-W)l(1)