公开(公告)号：US20240213388A1

公开(公告)日：2024-06-27

申请号：US18388231

申请日：2023-11-09

Applicant: KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION

Inventor： Hae-Seok LEE ,  Donghwan KIM ,  Yoonmook KANG ,  Dowon PYUN ,  Dongjin CHOI ,  Jae-Keun HWANG ,  Dongkyun KANG ,  Solhee LEE ,  Hoyoung SONG ,  Seok-Hyun JEONG ,  MyeongSeob SIM

IPC: H01L31/0725 ,  H01L31/0224 ,  H01L31/028 ,  H01L31/18

CPC classification number: H01L31/0725 ,  H01L31/022491 ,  H01L31/028 ,  H01L31/1884

Abstract: Disclosed is a method for manufacturing a multi-junction solar cell including forming a lower cell, depositing a metal thin film layer on the lower cell, heat-treating the metal thin film layer to form a recombination layer and an intermediate charge transport layer, and forming an upper cell on the intermediate charge transport layer. After depositing a metal thin film on top of the lower cell, the deposited metal thin film is heat-treated at a high temperature, so that metal atoms in the metal thin film diffuse to the top of the lower cell to form the recombination layer of silicide at an interface between the metal thin film and the lower cell, and at the same time, oxygen atoms diffuse into the metal thin film to form metal oxide (the charge transport layer) at a surface of the metal thin film.