SLOT COATING APPARATUS WITH IMPROVED COATING BEAD REGION

    公开(公告)号:US20190160485A1

    公开(公告)日:2019-05-30

    申请号:US16023270

    申请日:2018-06-29

    Abstract: A slot coating apparatus having an improved coating bead region is disclosed. An embodiment of the invention provides a slot coating apparatus configured to coat a coating liquid containing a high concentration of particles over a substrate, where the slot coating apparatus includes: a first slot die that is arranged at a downstream side of the coating liquid; a second slot die that is arranged at an upstream side of the coating liquid and is positioned facing the first slot die; a coating bead cover that extends from one side of the first slot die along a movement direction of the substrate; and a pressure adjustment device that is disposed at the second slot die side and is configured to form a pressure gradient between the downstream and the upstream.

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