公开(公告)号：US20160220958A1

公开(公告)日：2016-08-04

申请号：US15021178

申请日：2014-09-30

Applicant: KURITA WATER INDUSTRIES LTD.

Inventor： Takeo FUKUI ,  Hiroshi MORITA ,  Yoichi TANAKA ,  Hideaki IINO ,  Satoshi YAMADA

IPC: B01D61/58 ,  B01D61/02 ,  C02F1/44 ,  B01D61/14

CPC classification number: B01D61/58 ,  B01D61/025 ,  B01D61/04 ,  B01D61/142 ,  B01D61/145 ,  B01D61/147 ,  B01D2311/04 ,  B01D2311/06 ,  B01D2311/2619 ,  B01D2311/2623 ,  B01D2311/2634 ,  B01D2311/2657 ,  B01D2317/025 ,  B01D2317/04 ,  C02F1/441 ,  C02F1/444 ,  C02F2103/04 ,  C02F2209/105 ,  C02F2301/08

Abstract: Provided is an ultrapure water production apparatus capable of producing high-quality ultrapure water from which microparticles have been removed at a high level. An ultrapure water production apparatus comprising a subsystem that produces ultrapure water from primary pure water, the subsystem including a membrane unit disposed at the end of the subsystem, wherein the membrane unit is constituted by a plurality of membrane devices arranged in series, the first of the membrane devices being a UF membrane device, an MF membrane device, or an RO membrane device, the last of the membrane devices being a UF membrane device or an MF membrane that is not modified with an ion-exchange group.

Abstract translation: 本发明提供一种超高纯水制造装置，其能够高精度地制造高质量的超纯水。 一种超纯水生产设备，包括从初级纯水产生超纯水的子系统，子系统包括设置在子系统端部的膜单元，其中膜单元由串联布置的多个膜装置构成，第一 膜装置是UF膜装置，MF膜装置或RO膜装置，最后的膜装置是不用离子交换基团改性的UF膜装置或MF膜。