ULTRAPURE WATER PRODUCTION SYSTEM, ULTRAPURE WATER PRODUCTION FEED SYSTEM, AND METHOD FOR CLEANING THEREOF
    1.
    发明申请
    ULTRAPURE WATER PRODUCTION SYSTEM, ULTRAPURE WATER PRODUCTION FEED SYSTEM, AND METHOD FOR CLEANING THEREOF 审中-公开
    超声波水生产系统,超声波水生产系统及其清洁方法

    公开(公告)号:US20160159672A1

    公开(公告)日:2016-06-09

    申请号:US14906441

    申请日:2014-07-22

    IPC分类号: C02F9/00 C02F1/44

    摘要: Contaminants present inside an ultrapure water production system are prevented from being fed into a feed pipe connected to a water use point and, after sterilization cleaning, the system is prevented from being contaminated by contaminants captured on a microparticle removal membrane during sterilization cleaning. Ultrapure water having high quality is thereby fed to a water use point within a short period of time. An ultrapure water production system is provided with a tank, a pump, a heat exchanger, an ultraviolet device, an ion-exchange device, a first microparticle removal membrane device, and a second microparticle removal membrane device. Parts of sterilization water and flush water are fed into the first microparticle removal membrane device and discharged from a feedwater-side potion to a concentrated-water-side portion without permeating through a microparticle removal membrane thereof, and the remaining part of the water is passed through the second microparticle removal membrane device.

    摘要翻译: 存在于超纯水生产系统内的污染物被防止进入连接到使用点的进料管中,并且在灭菌清洁之后,防止在灭菌清洁期间系统被捕获在微粒去除膜上的污染物污染。 因此,优质的超纯水在短时间内供给到使用点。 超纯水生产系统设置有罐,泵,热交换器,紫外线装置,离子交换装置,第一微粒除去膜装置和第二微粒除去膜装置。 灭菌水和冲洗水的一部分被供给到第一微粒去除膜装置中,并且从给水侧部分排出到浓缩水侧部分而不渗透通过其除去微粒膜,并且剩余部分的水通过 通过第二微粒去除膜装置。

    METHOD AND APPARATUS FOR PRODUCING PURE WATER

    公开(公告)号:US20170253499A1

    公开(公告)日:2017-09-07

    申请号:US15598938

    申请日:2017-05-18

    IPC分类号: C02F1/32 B01D15/36

    摘要: Provided are a method and an apparatus for producing pure water in which water that has been subjected to an ultraviolet oxidation treatment performed with an ultraviolet oxidation device is brought into contact with a platinum-group metal catalyst, the method and apparatus eliminating the likelihood of the catalyst being degraded and enabling decomposition of hydrogen peroxide to be performed for a prolonged period of time in a consistent manner. Water-to-be-treated is subjected to an ultraviolet oxidation treatment performed with an ultraviolet oxidation device and subsequently subjected to a hydrogen peroxide removal treatment performed with a hydrogen peroxide removal device including a platinum-group metal catalyst. The TOC concentration in water fed to the ultraviolet oxidation device is 5 ppb or less. An anion exchange resin tower is installed in a stage following the ultraviolet oxidation device.

    METHOD AND APPARATUS FOR PRODUCING PURE WATER
    3.
    发明申请
    METHOD AND APPARATUS FOR PRODUCING PURE WATER 审中-公开
    生产纯水的方法和装置

    公开(公告)号:US20160221841A1

    公开(公告)日:2016-08-04

    申请号:US15021157

    申请日:2014-10-30

    IPC分类号: C02F1/32 C02F1/42 B01D15/36

    摘要: Provided is a method and apparatus for producing pure water in which water that has been subjected to an ultraviolet oxidation treatment performed with an ultraviolet oxidation device is brought into contact with a platinum-group metal catalyst, the method and apparatus eliminating the likelihood of the catalyst being degraded and enabling decomposition of hydrogen peroxide to be performed for a prolonged period of time in a consistent manner. Water-to-be-treated is subjected to an ultraviolet oxidation treatment performed with an ultraviolet oxidation device 2 and subsequently subjected to a hydrogen peroxide removal treatment performed with a hydrogen peroxide removal device 4 including a platinum-group metal catalyst, wherein the TOC concentration in water fed to the ultraviolet oxidation device 2 is 5 ppb or less. An anion exchange resin tower 3 is installed in a stage following the ultraviolet oxidation device 2.

    摘要翻译: 提供一种生产纯水的方法和装置,其中用紫外线氧化装置进行紫外线氧化处理的水与铂族金属催化剂接触,该方法和装置消除了催化剂的可能性 降解并且能够以一致的方式使过氧化氢分解长时间进行。 对待处理的水进行紫外线氧化装置2的紫外线氧化处理,然后用包含铂族金属催化剂的过氧化氢去除装置4进行过氧化氢去除处理,其中TOC浓度 在供给到紫外线氧化装置2的水中为5ppb以下。 阴离子交换树脂塔3安装在紫外线氧化装置2之后的阶段。