Abstract:
Contaminants present inside an ultrapure water production system are prevented from being fed into a feed pipe connected to a water use point and, after sterilization cleaning, the system is prevented from being contaminated by contaminants captured on a microparticle removal membrane during sterilization cleaning. Ultrapure water having high quality is thereby fed to a water use point within a short period of time. An ultrapure water production system is provided with a tank, a pump, a heat exchanger, an ultraviolet device, an ion-exchange device, a first microparticle removal membrane device, and a second microparticle removal membrane device. Parts of sterilization water and flush water are fed into the first microparticle removal membrane device and discharged from a feedwater-side potion to a concentrated-water-side portion without permeating through a microparticle removal membrane thereof, and the remaining part of the water is passed through the second microparticle removal membrane device.
Abstract:
Provided are a method and an apparatus for producing pure water in which water that has been subjected to an ultraviolet oxidation treatment performed with an ultraviolet oxidation device is brought into contact with a platinum-group metal catalyst, the method and apparatus eliminating the likelihood of the catalyst being degraded and enabling decomposition of hydrogen peroxide to be performed for a prolonged period of time in a consistent manner. Water-to-be-treated is subjected to an ultraviolet oxidation treatment performed with an ultraviolet oxidation device and subsequently subjected to a hydrogen peroxide removal treatment performed with a hydrogen peroxide removal device including a platinum-group metal catalyst. The TOC concentration in water fed to the ultraviolet oxidation device is 5 ppb or less. An anion exchange resin tower is installed in a stage following the ultraviolet oxidation device.
Abstract:
Provided is a method and apparatus for producing pure water in which water that has been subjected to an ultraviolet oxidation treatment performed with an ultraviolet oxidation device is brought into contact with a platinum-group metal catalyst, the method and apparatus eliminating the likelihood of the catalyst being degraded and enabling decomposition of hydrogen peroxide to be performed for a prolonged period of time in a consistent manner. Water-to-be-treated is subjected to an ultraviolet oxidation treatment performed with an ultraviolet oxidation device 2 and subsequently subjected to a hydrogen peroxide removal treatment performed with a hydrogen peroxide removal device 4 including a platinum-group metal catalyst, wherein the TOC concentration in water fed to the ultraviolet oxidation device 2 is 5 ppb or less. An anion exchange resin tower 3 is installed in a stage following the ultraviolet oxidation device 2.
Abstract:
Provided is a method which is for analyzing ionic components in pure water and in which sample ultrapure water is concentrated and analyzed by an analysis means, the method being characterized in that the sample ultrapure water is concentrated by means of an electrodialyzer. The electrodialyzer is a second electrodialyzer (20) in which sample ultrapure water is passed through a first generation chamber (27), high-purity nitric acid aqueous solution is passed through a second generation chamber (28), and concentrated water for analysis is extracted from the second generation chamber (28). The high-purity nitric acid aqueous solution passing through the second generation chamber (28) is generated by dialyzing a potassium nitrate aqueous solution by a first electrodialyzer (10).
Abstract:
In a subsystem or water-feed path located upsteam of a use point in an ultrapure water production/supply process, fine particles having a particle diameter of 50 nm or less, in particular 10 nm or less are highly removed. A device for removing fine particles in water has a membrane filtration device including a microfiltration membrane or an ultrafiltration membrane having a weak cationic functional group. The microfiltration membrane or the ultrafiltration membrane having a weak cationic functional group is preferred to have a polyketone film with the weak cationic functional group. Negatively-charged particles in water are adsorbed by the weak cationic functional group and can thus be removed.
Abstract:
Provided is an ultrapure water production apparatus capable of producing high-quality ultrapure water from which microparticles have been removed at a high level. An ultrapure water production apparatus comprising a subsystem that produces ultrapure water from primary pure water, the subsystem including a membrane unit disposed at the end of the subsystem, wherein the membrane unit is constituted by a plurality of membrane devices arranged in series, the first of the membrane devices being a UF membrane device, an MF membrane device, or an RO membrane device, the last of the membrane devices being a UF membrane device or an MF membrane that is not modified with an ion-exchange group.