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公开(公告)号：US20090314205A1
公开(公告)日：2009-12-24
申请号：US12144485
申请日：2008-06-23
IPC分类号： B05C11/00
CPC分类号： G02B23/2492
摘要： A system for monitoring a process inside a high temperature semiconductor process chamber by capturing images is disclosed. Images are captured through a borescope by a camera. The borescope is protected from high temperatures by a reflective sheath and an Infrared (IR) cur-off filter. Images can be viewed on a monitor and can be recorded by a video recording device. Images can also be processed by a machine vision system. The system can monitor the susceptor and a substrate on the susceptor and surrounding structures. Deviations from preferred geometries of the substrate and deviations from preferred positions of susceptor and the substrate can be detected. Actions based on the detections of deviations can be taken to improve the performance of the process. Illumination of a substrate by a laser for detecting deviations in substrate geometry and position is also disclosed.
摘要翻译： 公开了一种用于通过捕获图像监视高温半导体处理室内的处理的系统。 照相机通过管道镜捕获图像。 通过反射护套和红外线（IR）截止滤波器，保护套管免受高温的影响。 可以在监视器上观看图像，并且可以由视频记录装置记录。 图像也可以由机器视觉系统处理。 该系统可以监测基座和基座和周围的结构。 可以检测到偏离衬底的优选几何形状和偏离基座和衬底的优选位置。 可以采取基于偏差检测的操作来改善过程的性能。 还公开了用于检测基板几何形状和位置的偏差的用于激光的衬底的照明。
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公开(公告)号：US08726837B2
公开(公告)日：2014-05-20
申请号：US12144485
申请日：2008-06-23
CPC分类号： G02B23/2492
摘要： A system for monitoring a process inside a high temperature semiconductor process chamber by capturing images is disclosed. Images are captured through a borescope by a camera. The borescope is protected from high temperatures by a reflective sheath and an Infrared (IR) cut-off filter. Images can be viewed on a monitor and can be recorded by a video recording device. Images can also be processed by a machine vision system. The system can monitor the susceptor and a substrate on the susceptor and surrounding structures. Deviations from preferred geometries of the substrate and deviations from preferred positions of susceptor and the substrate can be detected. Actions based on the detections of deviations can be taken to improve the performance of the process. Illumination of a substrate by a laser for detecting deviations in substrate geometry and position is also disclosed.
摘要翻译： 公开了一种用于通过捕获图像监视高温半导体处理室内的处理的系统。 照相机通过管道镜捕获图像。 通过反光护套和红外（IR）截止滤光片，保护套管免受高温的影响。 可以在监视器上观看图像，并且可以由视频记录装置记录。 图像也可以由机器视觉系统处理。 该系统可以监测基座和基座和周围的结构。 可以检测到偏离衬底的优选几何形状和偏离基座和衬底的优选位置。 可以采取基于偏差检测的操作来改善过程的性能。 还公开了用于检测基板几何形状和位置的偏差的用于激光的衬底的照明。
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