THERMAL MANAGEMENT OF THREE-DIMENSIONAL INTEGRATED CIRCUITS

    公开(公告)号:US20230048534A1

    公开(公告)日:2023-02-16

    申请号:US17401676

    申请日:2021-08-13

    摘要: A 3D integrated circuit device can include a substrate, a thermal interface layer and at least one die, at least one device layer bonded between the thermal interface layer and the at least one die, wherein the thermal interface layer enhances conductive heat transfer between the at least one device layer and the at least one die, and a heat sink located adjacent to a heat spreader, wherein the thermal interface layer, the at least one die and the at least one device layer are located between the heat spreader and the substrate.

    THERMAL MANAGEMENT OF THREE-DIMENSIONAL INTEGRATED CIRCUITS

    公开(公告)号:US20230047658A1

    公开(公告)日:2023-02-16

    申请号:US17401719

    申请日:2021-08-13

    IPC分类号: H01L25/065 H01L23/367

    摘要: A 3D integrated circuit device can include a substrate, a thermal interface layer and at least one die, at least one device layer bonded between the thermal interface layer and the at least one die, wherein the thermal interface layer enhances conductive heat transfer between the at least one device layer and the at least one die, and a heat sink located adjacent to a heat spreader, wherein the thermal interface layer, the at least one die and the at least one device layer are located between the heat spreader and the substrate.