公开(公告)号：US20070072093A1

公开(公告)日：2007-03-29

申请号：US11523813

申请日：2006-09-15

申请人： Takashi Sawada ,  Masafumi Kamada ,  Kaori Yamashita ,  Hironori Kobayashi

发明人： Takashi Sawada ,  Masafumi Kamada ,  Kaori Yamashita ,  Hironori Kobayashi

IPC分类号： G03F9/00 ,  G03F7/20

CPC分类号： G03F7/2014 ,  G03F1/50 ,  G03F7/7035

摘要： A main object of the present invention is to provide a manufacturing method of a pattern formed body which makes it possible to form property varied patterns having a desired line width, even when plural pattern formed bodies are manufactured. To achieve the object, the invention provides a manufacturing method of pattern formed bodies, comprising: a pattern-forming step of radiating vacuum-ultraviolet light onto a patterning substrate, a surface property of which is varied by the vacuum-ultraviolet light, through a photomask having at least a transparent substrate and a light shielding part to form a pattern formed body having a property varied pattern, in which the surface property of the patterning substrate is varied; and a step of repeating the pattern-forming step to manufacture a plurality of the pattern formed bodies, wherein an interval between the transparent substrate and the patterning substrate upon the pattern-forming step is set into the range of 0.1 μm to 200 μm.

摘要翻译： 本发明的主要目的是提供一种图案形成体的制造方法，即使制造多个图案形成体也能够形成具有期望的线宽的特性变化的图案。 为了实现该目的，本发明提供了一种图案形成体的制造方法，其特征在于，包括：图案形成步骤，通过真空紫外线照射真空紫外光，使其表面特性由真空紫外线变化 至少具有透明基板和遮光部的光掩模，形成具有不同图案的图案形成体，其中，图案形成基板的表面特性变化; 以及重复图案形成步骤以制造多个图案形成体的步骤，其中在图案形成步骤时，透明基板和图案形成基板之间的间隔被设定在0.1μm至200μm的范围内。

公开(公告)号：US20060068303A1

公开(公告)日：2006-03-30

申请号：US11230056

申请日：2005-09-19

申请人： Hironori Kobayashi ,  Kaori Yamashita

发明人： Hironori Kobayashi ,  Kaori Yamashita

IPC分类号： G02B5/20 ,  G02F1/1335

CPC分类号： G02B5/223 ,  G02B5/201 ,  G02F1/133512 ,  G02F1/133514 ,  G02F1/133516

摘要： The main objection of the present invention is to provide a high quality color filter having a colored layer formed by ink jet method and without color irregularity, a void, or the like. To achieve the object, the present invention provides a color filter comprising a base material, a light shielding part having a plurality of linear light shielding parts formed by a predetermined equal interval on the base material and interlocking light shielding parts for interlocking two of the light shielding parts adjacent by a predetermined interval, and colored layers formed between each of the linear light shielding parts so as to cover the interlocking light shielding parts, wherein opening parts sectioned by the light shielding part are formed on the base material such that the opening parts have a shape with the top end part of at least one corner part cut out by a straight line or a curved line, and furthermore, the colored layers are formed by the ink jet method.

摘要翻译： 本发明的主要目的是提供一种具有通过喷墨法形成的着色层并且没有颜色不规则性，空隙等的高质量滤色器。 为了实现该目的，本发明提供了一种滤色器，其包括基材，遮光部分，其具有在基材上以预定相等的间隔形成的多个线形遮光部分和互锁的遮光部分，用于将两个光 屏蔽部分相邻预定间隔，以及形成在每个线形遮光部分之间以覆盖互锁遮光部分的着色层，其中由遮光部分分割的开口部分形成在基材上，使得开口部分 具有通过直线或曲线切割的至少一个角部的顶端部的形状，此外，通过喷墨法形成着色层。

公开(公告)号：US20080074769A1

公开(公告)日：2008-03-27

申请号：US11985756

申请日：2007-11-16

申请人： Hironori Kobayashi ,  Kaori Yamashita

发明人： Hironori Kobayashi ,  Kaori Yamashita

IPC分类号： G02B5/22

CPC分类号： G02F1/133512 ,  G02B5/001 ,  G02F1/133516

摘要： The main objection of the present invention is to provide a high quality color filter having a colored layer formed by ink jet method and without color irregularity, a void, or the like. To achieve the object, the present invention provides a color filter comprising a base material, a light shielding part having a plurality of linear light shielding parts formed by a predetermined equal interval on the base material and interlocking light shielding parts for interlocking two of the light shielding parts adjacent by a predetermined interval, and colored layers formed between each of the linear light shielding parts so as to cover the interlocking light shielding parts, wherein the interlocking light shielding parts are formed such that the width of the interlocking light shielding parts at the side part of the linear light shielding parts is narrower than the width of the interlocking light shielding parts at the central part between two of the linear light shielding parts adjacent, or the linear light shielding parts and the interlocking light shielding parts are formed so as not to be contacted, and furthermore, the colored layers are formed by the ink jet method.

摘要翻译： 本发明的主要目的是提供一种具有通过喷墨法形成的着色层并且没有颜色不规则性，空隙等的高质量滤色器。 为了实现该目的，本发明提供了一种滤色器，其包括基材，遮光部分，其具有在基材上以预定相等的间隔形成的多个线形遮光部分和互锁的遮光部分，用于将两个光 屏蔽部分相邻预定间隔，以及形成在每个线性遮光部分之间以覆盖互锁遮光部分的着色层，其中互锁遮光部分形成为使得互锁遮光部分的宽度在 线状遮光部的侧面部分比邻近的两个线状遮光部分之间的中央部分处的互锁遮光部分的宽度窄，或者线状遮光部分和互锁遮光部分形成为不 接触，此外，通过喷墨法形成着色层。

公开(公告)号：US07335451B2

公开(公告)日：2008-02-26

申请号：US10817458

申请日：2004-04-02

申请人： Hironori Kobayashi ,  Kaori Yamashita

发明人： Hironori Kobayashi ,  Kaori Yamashita

IPC分类号： G02B5/20

CPC分类号： B82Y30/00 ,  G02B5/201

摘要： A pattern forming body is provided or a color filter, wherein the color filter can be manufactured efficiently by a simple process without any cracks and no influence to an alignment of a liquid crystal. A pattern forming body is provided comprising: a base material; a photocatalyst containing layer, comprising at least a photocatalyst, formed on the base material; a protecting part formed on the photocatalyst containing layer; a property variable layer, whose surface property is varied by a function of a photocatalyst due to an energy irradiation, formed so as to cover the photocatalyst containing layer and the protecting part; and a property-varied pattern which is a property varied property variable layer.

摘要翻译： 提供了图案形成体或滤色器，其中可以通过简单的工艺有效地制造滤色器，而不会产生任何裂纹，并且不影响液晶的取向。 提供了一种图案形成体，包括：基材; 含有至少一种形成在该基材上的光催化剂的含光催化剂层; 形成在含有光催化剂的层上的保护部分; 形成为覆盖光催化剂层和保护部的表面特性由于能量照射而由光催化剂的功能变化的性质变化层; 和属性变化的模式是属性变化的属性变量层。

公开(公告)号：US20070128552A1

公开(公告)日：2007-06-07

申请号：US11526973

申请日：2006-09-26

申请人： Takashi Sawada ,  Kaori Yamashita ,  Hironori Kobayashi

发明人： Takashi Sawada ,  Kaori Yamashita ,  Hironori Kobayashi

IPC分类号： G03B27/42 ,  G03F7/00

CPC分类号： G03F7/0007 ,  G03F1/82 ,  G03F1/84

摘要： A main object of the invention is to provide a a manufacturing method of a plurality of pattern formed bodies which makes it possible that even if the pattern formed bodies are continuously manufactured, their property varied patterns are each made into a target pattern form with high precision; and a pattern formed body manufacturing apparatus used in the manufacturing method. To achieve the object, the invention provides a manufacturing method of a plurality of pattern formed bodies comprising a pattern forming step and a foreign matter removing step, wherein the pattern forming step is a step of radiating vacuum-ultraviolet light through a photomask to a pattern forming substrate, varying a surface property by the vacuum-ultraviolet light, and forming a property varied pattern with the property varied on a surface of the pattern forming substrate to form a pattern formed body; the pattern forming step is repeated plural times to manufacture a plurality of the pattern formed bodies; and the foreign matter removing step is a step of removing a foreign matter deposited to the photomask performed between the repeated pattern forming steps.

摘要翻译： 本发明的主要目的在于提供一种多个图形成形体的制造方法，即使连续地制造图案形成体也能够将其特性变化的图案分别高精度地制成目标图形， 以及在制造方法中使用的图案形成体制造装置。 为了实现该目的，本发明提供了一种包括图案形成步骤和异物去除步骤的多个图案形成体的制造方法，其中，图案形成步骤是通过光掩模将真空紫外线照射到图案的步骤 通过真空紫外光改变表面特性，并且在图案形成基板的表面上形成具有不同特性的特性变化的图案，以形成图案形成体; 重复多次图案形成步骤以制造多个图案形成体; 并且异物去除步骤是去除在重复图案形成步骤之间执行的沉积到光掩模上的异物的步骤。

公开(公告)号：US07369196B2

公开(公告)日：2008-05-06

申请号：US11232589

申请日：2005-09-22

申请人： Hironori Kobayashi ,  Kaori Yamashita

发明人： Hironori Kobayashi ,  Kaori Yamashita

IPC分类号： G02F1/1135 ,  G03F1/00

CPC分类号： G02F1/133512 ,  G02B5/001 ,  G02F1/133516

摘要： The main objection of the present invention is to provide a high quality color filter having a colored layer formed by ink jet method and without color irregularity, a void, or the like.To achieve the object, the present invention provides a color filter comprising a base material, a light shielding part having a plurality of linear light shielding parts formed by a predetermined equal interval on the base material and interlocking light shielding parts for interlocking two of the light shielding parts adjacent by a predetermined interval, and colored layers formed between each of the linear light shielding parts so as to cover the interlocking light shielding parts, wherein the interlocking light shielding parts are formed such that the width of the interlocking light shielding parts at the side part of the linear light shielding parts is narrower than the width of the interlocking light shielding parts at the central part between two of the linear light shielding parts adjacent, or the linear light shielding parts and the interlocking light shielding parts are formed so as not to be contacted, and furthermore, the colored layers are formed by the ink jet method.

摘要翻译： 本发明的主要目的是提供一种具有通过喷墨法形成的着色层并且没有颜色不规则性，空隙等的高质量滤色器。 为了实现该目的，本发明提供了一种滤色器，其包括基材，遮光部分，其具有在基材上以预定相等的间隔形成的多个线形遮光部分和互锁的遮光部分，用于将两个光 屏蔽部分相邻预定间隔，以及形成在每个线性遮光部分之间以覆盖互锁遮光部分的着色层，其中互锁遮光部分形成为使得互锁遮光部分的宽度在 线状遮光部的侧面部分比邻近的两个线状遮光部分之间的中央部分处的互锁遮光部分的宽度窄，或者线形遮光部分和互锁遮光部分形成为不 接触，此外，通过喷墨法形成着色层。

公开(公告)号：US20070122754A1

公开(公告)日：2007-05-31

申请号：US11527031

申请日：2006-09-26

申请人： Kaori Yamashita ,  Takashi Sawada ,  Hironori Kobayashi

发明人： Kaori Yamashita ,  Takashi Sawada ,  Hironori Kobayashi

IPC分类号： G03C5/00

CPC分类号： G03F1/82 ,  B08B7/0057 ,  G03F7/70925

摘要： A main object of the present invention is to provide a manufacturing method of a plurality of pattern formed bodies which makes it possible that even if the pattern formed bodies are continuously manufactured, their property varied patterns are each made into a target pattern form with high precision. To achieve the object, the invention provides a manufacturing method of a plurality of pattern formed bodies, comprising a pattern forming step and a foreign matter removing step, wherein the pattern forming step is a step of radiating vacuum-ultraviolet light through a photomask to a pattern forming substrate, varying a surface property by the vacuum-ultraviolet light, and forming a property varied pattern with the property varied on a surface of the pattern forming substrate to form a pattern formed body; the pattern forming step is repeated plural times to manufacture a plurality of the pattern formed bodies; and the foreign matter removing step is a step performed between the repeated pattern forming steps and of radiating vacuum-ultraviolet light from the same light source as used in the pattern forming step to the photomask, in a state where the photomask and the pattern forming substrate are not opposed to each other, to remove a foreign matter deposited onto the photomask.

摘要翻译： 本发明的主要目的是提供一种多个图案成形体的制造方法，即使连续地制造图案形成体也能够将其特性变化的图案分别高精度地制成目标图案形状 。 为了实现该目的，本发明提供了一种多个图案成形体的制造方法，包括图案形成步骤和异物去除步骤，其中图案形成步骤是通过光掩模将真空紫外线照射到 图案形成基板，通过真空紫外线改变表面特性，并且形成具有在图案形成基板的表面上变化的特性的变化图案以形成图案形成体; 重复多次图案形成步骤以制造多个图案形成体; 并且异物去除步骤是在重复图案形成步骤之间执行的步骤，并且在光掩模和图案形成基板的状态下，将与图案形成步骤中使用的相同的光源的真空紫外线照射到光掩模 彼此不相对，以去除沉积在光掩模上的异物。

公开(公告)号：US07781127B2

公开(公告)日：2010-08-24

申请号：US11523813

申请日：2006-09-15

申请人： Takashi Sawada ,  Masafumi Kamada ,  Kaori Yamashita ,  Hironori Kobayashi

发明人： Takashi Sawada ,  Masafumi Kamada ,  Kaori Yamashita ,  Hironori Kobayashi

IPC分类号： G03F1/00

CPC分类号： G03F7/2014 ,  G03F1/50 ,  G03F7/7035

摘要： A main object of the present invention is to provide a manufacturing method of a pattern formed body which makes it possible to form property varied patterns having a desired line width, even when plural pattern formed bodies are manufactured. To achieve the object, the invention provides a manufacturing method of pattern formed bodies, comprising: a pattern-forming step of radiating vacuum-ultraviolet light onto a patterning substrate, a surface property of which is varied by the vacuum-ultraviolet light, through a photomask having at least a transparent substrate and a light shielding part to form a pattern formed body having a property varied pattern, in which the surface property of the patterning substrate is varied; and a step of repeating the pattern-forming step to manufacture a plurality of the pattern formed bodies, wherein an interval between the transparent substrate and the patterning substrate upon the pattern-forming step is set into the range of 0.1 μm to 200 μm.

摘要翻译： 本发明的主要目的是提供一种图案形成体的制造方法，即使制造多个图案形成体也能够形成具有期望的线宽的特性变化的图案。 为了实现该目的，本发明提供了一种图案形成体的制造方法，其特征在于，包括：图案形成步骤，通过真空紫外线照射真空紫外光，使其表面特性由真空紫外线变化 至少具有透明基板和遮光部的光掩模，形成具有不同图案的图案形成体，其中，图案形成基板的表面特性变化; 以及重复图案形成步骤以制造多个图案形成体的步骤，其中在图案形成步骤中，透明基板和图案形成基板之间的间隔被设定在0.1μm至200μm的范围内。

公开(公告)号：US07320856B2

公开(公告)日：2008-01-22

申请号：US11527031

申请日：2006-09-26

申请人： Kaori Yamashita ,  Takashi Sawada ,  Hironori Kobayashi

发明人： Kaori Yamashita ,  Takashi Sawada ,  Hironori Kobayashi

IPC分类号： G03F7/00

CPC分类号： G03F1/82 ,  B08B7/0057 ,  G03F7/70925

摘要： A main object of the present invention is to provide a manufacturing method of a plurality of pattern formed bodies which makes it possible that even if the pattern formed bodies are continuously manufactured, their property varied patterns are each made into a target pattern form with high precision. To achieve the object, the invention provides a manufacturing method of a plurality of pattern formed bodies, comprising a pattern forming step and a foreign matter removing step, wherein the pattern forming step is a step of radiating vacuum-ultraviolet light through a photomask to a pattern forming substrate, varying a surface property by the vacuum-ultraviolet light, and forming a property varied pattern with the property varied on a surface of the pattern forming substrate to form a pattern formed body; the pattern forming step is repeated plural times to manufacture a plurality of the pattern formed bodies; and the foreign matter removing step is a step performed between the repeated pattern forming steps and of radiating vacuum-ultraviolet light from the same light source as used in the pattern forming step to the photomask, in a state where the photomask and the pattern forming substrate are not opposed to each other, to remove a foreign matter deposited onto the photomask.

摘要翻译： 本发明的主要目的是提供一种多个图案成形体的制造方法，即使连续地制造图案形成体也能够将其特性变化的图案分别高精度地制成目标图案形状 。 为了实现该目的，本发明提供了一种多个图案成形体的制造方法，包括图案形成步骤和异物去除步骤，其中图案形成步骤是通过光掩模将真空紫外线照射到 图案形成基板，通过真空紫外线改变表面特性，并且形成具有在图案形成基板的表面上变化的特性的变化图案以形成图案形成体; 重复多次图案形成步骤以制造多个图案形成体; 并且异物去除步骤是在重复图案形成步骤之间执行的步骤，并且在光掩模和图案形成基板的状态下，将与图案形成步骤中使用的相同的光源的真空紫外线照射到光掩模 彼此不相对，以去除沉积在光掩模上的异物。

公开(公告)号：US20060066779A1

公开(公告)日：2006-03-30

申请号：US11232589

申请日：2005-09-22

申请人： Hironori Kobayashi ,  Kaori Yamashita

发明人： Hironori Kobayashi ,  Kaori Yamashita

IPC分类号： G02F1/1335

CPC分类号： G02F1/133512 ,  G02B5/001 ,  G02F1/133516

摘要： The main objection of the present invention is to provide a high quality color filter having a colored layer formed by ink jet method and without color irregularity, a void, or the like. To achieve the object, the present invention provides a color filter comprising a base material, a light shielding part having a plurality of linear light shielding parts formed by a predetermined equal interval on the base material and interlocking light shielding parts for interlocking two of the light shielding parts adjacent by a predetermined interval, and colored layers formed between each of the linear light shielding parts so as to cover the interlocking light shielding parts, wherein the interlocking light shielding parts are formed such that the width of the interlocking light shielding parts at the side part of the linear light shielding parts is narrower than the width of the interlocking light shielding parts at the central part between two of the linear light shielding parts adjacent, or the linear light shielding parts and the interlocking light shielding parts are formed so as not to be contacted, and furthermore, the colored layers are formed by the ink jet method.

摘要翻译： 本发明的主要目的是提供一种具有通过喷墨法形成的着色层并且没有颜色不规则性，空隙等的高质量滤色器。 为了实现该目的，本发明提供了一种滤色器，其包括基材，遮光部分，其具有在基材上以预定相等的间隔形成的多个线形遮光部分和互锁的遮光部分，用于将两个光 屏蔽部分相邻预定间隔，以及形成在每个线性遮光部分之间以覆盖互锁遮光部分的着色层，其中互锁遮光部分形成为使得互锁遮光部分的宽度在 线状遮光部的侧面部分比邻近的两个线状遮光部分之间的中央部分处的互锁遮光部分的宽度窄，或者线状遮光部分和互锁遮光部分形成为不 接触，此外，通过喷墨法形成着色层。