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公开(公告)号:US06448604B1
公开(公告)日:2002-09-10
申请号:US09659932
申请日:2000-09-12
申请人: Karsten Funk , Markus Lutz , Detlef Clawin
发明人: Karsten Funk , Markus Lutz , Detlef Clawin
IPC分类号: H01L2972
CPC分类号: H01L28/40 , H01G5/18 , H01L27/0629
摘要: An integrated adjustable capacitor device and method for making such a device are provided. The adjustable capacitor includes an underlying electrode, a dielectric cavity, an upper electrode, and an etch cavity for removing sacrificial material from the dielectric cavity. The surface of the device is relatively flat due to epitaxal deposition of epi polysilicon and single crystal silicon. The adjustable capacitor system is capable of undergoing CMOS processes without requiring additional steps of covering the capacitor device to protect it and then removing the covering following the CMOS processes.
摘要翻译: 提供了一种用于制造这种装置的集成可调电容器装置和方法。 可调电容器包括底层电极,介电腔,上电极和用于从电介质腔去除牺牲材料的蚀刻腔。 由于epi多晶硅和单晶硅的外延沉积,器件的表面相对平坦。 可调电容器系统能够进行CMOS工艺,而不需要额外的步骤覆盖电容器器件来保护电容器,然后在CMOS工艺之后移除覆盖层。
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公开(公告)号:US06524923B2
公开(公告)日:2003-02-25
申请号:US10145020
申请日:2002-05-14
申请人: Karsten Funk , Markus Lutz , Detlef Clawin
发明人: Karsten Funk , Markus Lutz , Detlef Clawin
IPC分类号: H01L2120
CPC分类号: H01L28/40 , H01G5/18 , H01L27/0629
摘要: An integrated adjustable capacitor device and method for making such a device are provided. The adjustable capacitor includes an underlying electrode, a dielectric cavity, an upper electrode, and an etch cavity for removing sacrificial material from the dielectric cavity. The surface of the device is relatively flat due to epitaxal deposition of epi polysilicon and single crystal silicon. The adjustable capacitor system is capable of undergoing CMOS processes without requiring additional steps of covering the capacitor device to protect it and then removing the covering following the CMOS processes.
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公开(公告)号:US5652702A
公开(公告)日:1997-07-29
申请号:US493808
申请日:1995-06-22
申请人: Detlef Clawin , Michael Lenz
发明人: Detlef Clawin , Michael Lenz
CPC分类号: H02M1/4208 , Y02B70/126
摘要: A switched-mode power supply with sinusoidal current consumption includes a rectifier receiving a sinusoidal alternating voltage and having an output at which a rectified alternating voltage can be picked up. A switched controller receives the rectified alternating voltage as an input signal and supplies an output signal. A multiplier device receives and multiplies the input signal by the output signal of the switched controller and generates an output signal being supplied to the switched controller. A divider divides the output signal of the switched controller being supplied to the multiplier device by the input signal being supplied to the controller and weighted on a basis of a transfer function formed by at least two linear partial functions, and delivers a resultant signal to the multiplier device.
摘要翻译: 具有正弦电流消耗的开关式电源包括接收正弦交流电压的整流器,并且具有可以拾取整流的交流电压的输出。 开关控制器接收经整流的交流电压作为输入信号并提供输出信号。 乘法器装置通过切换控制器的输出信号接收并乘以输入信号,并产生提供给切换控制器的输出信号。 除法器将由提供给乘法器装置的开关控制器的输出信号通过输入信号分配给控制器,并根据由至少两个线性部分函数形成的传递函数进行加权,并将结果信号传递给 乘法器装置。
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