摘要:
Plasma is generated on the first condition between a cathode electrode and an anode electrode. Then, plasma is generated on the second condition different from the first condition. The second condition is for spreading plasma between the cathode electrode and the anode electrode in the outer peripheral direction as compared with the first condition. Accordingly, in addition to a deposit on the electrode, a deposit on the member provided in the vicinity of the outer periphery of the electrode can be immediately removed.
摘要:
(1) A vinyl sulfonic acid, having a double bond content of 95 wt. % or more, and (i) a sodium (Na) content of 1 ppm or less, and (ii) a content of at least one metal selected from the group consisting of alkali earth metal and first row transition metal of 1 ppm or less. Alternatively, (2) a vinyl sulfonic acid, having a double bond content of 95 wt. % or more, and (i) a sodium (Na) content of 100 ppb or less, and (ii) a content of at least one metal selected from the group consisting of alkali earth metal and first row transition metal of 100 ppb or less. Further, a homopolymer or copolymer thereof, a production method thereof, or a thin-film distillation apparatus suited for the production thereof.
摘要:
(1) A vinyl sulfonic acid, having a double bond content of 95 wt. % or more, and (i) a sodium (Na) content of 1 ppm or less, and (ii) a content of at least one metal selected from the group consisting of alkali earth metal and first row transition metal of 1 ppm or less. Alternatively, (2) a vinyl sulfonic acid, having a double bond content of 95 wt. % or more, and (i) a sodium (Na) content of 100 ppb or less, and (ii) a content of at least one metal selected from the group consisting of alkali earth metal and first row transition metal of 100 ppb or less. Further, a homopolymer or copolymer thereof, a production method thereof, or a thin-film distillation apparatus suited for the production thereof.