公开(公告)号：US4630926A

公开(公告)日：1986-12-23

申请号：US633274

申请日：1984-07-23

申请人： Katsuyuki Tanaka ,  Seiichiroo Terashima ,  Yoshinori Takeuchi ,  Toshiko Odaka ,  Yokuo Saito

发明人： Katsuyuki Tanaka ,  Seiichiroo Terashima ,  Yoshinori Takeuchi ,  Toshiko Odaka ,  Yokuo Saito

IPC分类号： G01B11/06 ,  G01B11/14 ,  G11B5/60 ,  G11B21/21 ,  G11B33/10 ,  G01B9/02

CPC分类号： G11B5/6005 ,  G01B11/0675 ,  G01B11/14 ,  G11B21/21 ,  G11B33/10

摘要： One of two articles arranged to form a fine clearance therebetween is made of a transparent material through which a light flux is impinged to the other article to form a reflection light which includes an interference fringe pattern information representing the fine clearance between the two articles. The reflection light is focused on a photo-electric conversion plane and converted to an electrical signal. The photo-electrically converted interference fringe pattern information is then converted to digital information, which is stored in a frame memory. A computer reads out the digital information from the frame memory and determines peak positions of light and/or dark areas of the interference fringe to measure the fine clearance between the two articles.

摘要翻译： 排列成在其间形成微细间隙的两个物品中的一个由透明材料制成，通过该透明材料将光束撞击到另一个物品以形成反射光，该反射光包括表示两个物品之间的微小间隙的干涉条纹图案信息。 反射光聚焦在光电转换平面上并转换成电信号。 然后将光电转换干涉条纹图案信息转换成存储在帧存储器中的数字信息。 计算机从帧存储器读出数字信息，并确定干涉条纹的光和/或暗区域的峰值位置，以测量两个物品之间的微小间隙。