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公开(公告)号：US4504048A
公开(公告)日：1985-03-12
申请号：US441131
申请日：1982-11-12
申请人： Kazuo Shiba , Masao Takahashi , Akira Kanai , Kouichi Koizumi
发明人： Kazuo Shiba , Masao Takahashi , Akira Kanai , Kouichi Koizumi
摘要： An apparatus is disclosed which enables a controlled member (e.g. a workpiece retaining member in a jig) to be adjusted in position by extremely small amounts of linear displacement or angular rotation, with a very high degree of accuracy and static and dynamic stability. The apparatus is based on a servo system controlled by electrical signals and employs hydrostatic pads to support and move the controlled member.
摘要翻译： 公开了一种使得受控构件（例如夹具中的工件保持构件）能够通过非常少量的线性位移或角旋转以非常高的精度和静态和动态稳定性来调节位置的装置。 该装置基于由电信号控制的伺服系统，并采用流体静力垫来支撑和移动受控构件。
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公开(公告)号：US07047815B2
公开(公告)日：2006-05-23
申请号：US10943755
申请日：2004-09-17
IPC分类号： G01L9/12
CPC分类号： G01L9/0075
摘要： A sensor includes a sensor main body, first and second electrodes, an electrode extraction hole, and an interconnection member. A cavity is formed in the sensor main body by joining the outer peripheral portions of the first and second substrates made of an insulating material. The first and second electrodes are formed on the inner surfaces of the first and second substrates which face each other through the cavity. The electrode extraction hole is formed through the first substrate in correspondence with the second electrode. The interconnection member guides the second electrode outside the first substrate through the cavity and the electrode extraction hole. The interconnection member is formed by thermal spraying of metal powder into the cavity from outside the sensor main body through the electrode extraction hole. An electrode extraction structure and electrode extraction method are also disclosed.
摘要翻译： 传感器包括传感器主体，第一和第二电极，电极引出孔和互连构件。 通过连接由绝缘材料制成的第一和第二基板的外周部分，在传感器主体中形成空腔。 第一和第二电极形成在通过空腔相对的第一和第二基板的内表面上。 电极引出孔与第二电极对应地形成在第一基板上。 互连部件通过空腔和电极引出孔将第二电极引导到第一基板的外部。 互连构件通过电极引出孔将金属粉末从传感器主体的外侧热喷射到空腔中而形成。 还公开了电极提取结构和电极提取方法。
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公开(公告)号：US20050104605A1
公开(公告)日：2005-05-19
申请号：US10943755
申请日：2004-09-17
CPC分类号： G01L9/0075
摘要： A sensor includes a sensor main body, first and second electrodes, an electrode extraction hole, and an interconnection member. A cavity is formed in the sensor main body by joining the outer peripheral portions of the first and second substrates made of an insulating material. The first and second electrodes are formed on the inner surfaces of the first and second substrates which face each other through the cavity. The electrode extraction hole is formed through the first substrate in correspondence with the second electrode. The interconnection member guides the second electrode outside the first substrate through the cavity and the electrode extraction hole. The interconnection member is formed by thermal spraying of metal powder into the cavity from outside the sensor main body through the electrode extraction hole. An electrode extraction structure and electrode extraction method are also disclosed.
摘要翻译： 传感器包括传感器主体，第一和第二电极，电极引出孔和互连构件。 通过连接由绝缘材料制成的第一和第二基板的外周部分，在传感器主体中形成空腔。 第一和第二电极形成在通过空腔相对的第一和第二基板的内表面上。 电极引出孔与第二电极对应地形成在第一基板上。 互连部件通过空腔和电极引出孔将第二电极引导到第一基板的外部。 互连构件通过电极引出孔将金属粉末从传感器主体的外侧热喷射到空腔中而形成。 还公开了电极提取结构和电极提取方法。
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