公开(公告)号：US6086453A

公开(公告)日：2000-07-11

申请号：US310759

申请日：1999-05-13

申请人： Kazuya Fukuoka ,  Kazuhiro Yagi ,  Fusao Hoshino

发明人： Kazuya Fukuoka ,  Kazuhiro Yagi ,  Fusao Hoshino

IPC分类号： H01L21/68 ,  B24B49/10 ,  G01N21/95 ,  H01L21/301 ,  B24B49/00 ,  B24B51/00

CPC分类号： G01N21/9501 ,  G01N21/956

摘要： Even if it is impossible to image a pattern surface of a wafer that is placed with its down on a wafer table with visible light, a wafer pattern imaging apparatus is able to image the pattern surface (the obverse) from the reverse of the wafer with light transmitted through the wafer. The obverse of the wafer, made of silicon, is attached to a wafer sheet to protect the obverse of the wafer, on which patterns are formed. An infrared camera, which images an image formed by infrared light, and an infrared light source, which emits the infrared light to the wafer, are disposed above the wafer table. A mirror for reflecting the infrared light is disposed in the wafer table. The infrared light emitted from the infrared light source is transmitted through the wafer. Then, the infrared light is reflected on the mirror, and the reflected infrared light illuminates the pattern surface of the wafer. The infrared camera images the images of the pattern surface.

摘要翻译： 即使不可能利用可见光将其放置在晶片台上的晶片的图案表面成像，晶片图案成像装置能够从晶片的背面对图案表面（正面）进行成像， 透过晶片的光。 由硅制成的晶片的正面安装在晶片片上，以保护形成有图案的晶片的正面。 将由红外光形成的图像的红外摄像机和向晶片发射红外光的红外光源设置在晶片台的上方。 用于反射红外光的反射镜设置在晶片台中。 从红外光源发出的红外线透过晶片。 然后，红外光在反射镜上反射，反射的红外光照射晶片的图形表面。 红外摄像机对图案表面的图像进行成像。

公开(公告)号：US4545588A

公开(公告)日：1985-10-08

申请号：US628241

申请日：1984-07-06

申请人： Yataro Nagai ,  Kazuya Fukuoka

发明人： Yataro Nagai ,  Kazuya Fukuoka

IPC分类号： F16J15/34 ,  F16J15/40 ,  F16J15/38

CPC分类号： F16J15/346 ,  F16J15/406

摘要： A mechanical seal for sealing a slurry liquid between a casing and a rotary shaft comprises a fixed seat ring; a rotatable slide ring in the casing and abutting against the seat ring to form a sealing face therebetween; a helical spring in the casing and surrounding the rotary shaft, and biassing the rotatable slide ring toward the seat ring; and a rotatable ring on the rotary shaft and rotatable with the rotary shaft and holding the spring at a predetermined position relative to the rotary shaft, the spring being interposed between the rotatable slide ring and the rotatable ring. A small space is provided between the casing and the rotatable ring and the rotatable ring has a helical projection on the outer surface thereof. The helical projection of the rotatable ring and the helical spring are directed such that upon rotation thereof a force is produced in a direction away from the sealing face and toward the interior of the casing. The spring is preferably a helical screw-thread-like member of rectangular cross-section.

摘要翻译： 用于在壳体和旋转轴之间密封浆液的机械密封件包括固定座圈; 壳体中的可转动的滑动环，并抵靠座环，以在其间形成密封面; 壳体中的螺旋弹簧并且围绕旋转轴，并且将可旋转的滑动环朝向座环偏置; 以及旋转轴上的旋转环，并且可旋转地旋转并将弹簧保持在相对于旋转轴的预定位置处，弹簧介于可旋转滑环和可旋转环之间。 在壳体和可旋转环之间设置有小的空间，并且可旋转环在其外表面上具有螺旋突起。 可旋转环和螺旋弹簧的螺旋突起被引导成在其旋转时沿远离密封面并朝向壳体内部的方向产生力。 弹簧优选为矩形横截面的螺旋状螺纹状构件。