公开(公告)号：US6001008A

公开(公告)日：1999-12-14

申请号：US293459

申请日：1999-04-15

申请人： Keiichi Fujimori ,  Junji Matsuo

发明人： Keiichi Fujimori ,  Junji Matsuo

IPC分类号： B24B53/00 ,  B24B53/007 ,  B24B53/017 ,  B24B53/12 ,  B24D7/18 ,  B24D18/00 ,  H01L21/304 ,  B24B21/18 ,  B24B33/00 ,  B24B47/26 ,  B24B55/00

CPC分类号： B24B53/017 ,  B24D18/0018 ,  B24D7/18

摘要： With an abrasive dresser for a polishing disc of a chemical-mechanical polisher for abrading a flat rotatable polishing disc of a chemical-mechanical polisher which supplies a chemical polishing agent to the surface of the polishing disc to polish the surface of an article on top of the polishing disc, a sectional shape of an abrasive surface being a peripheral portion of a flat disc shaped base member which protrudes upwards over a predetermined width with an abrasive grit distributed substantially uniformly over and affixed to the surface thereof, is formed as a convex circular arc curved surface. In this way, the portion of contact with the polishing disc of the chemical-mechanical polisher becomes surface contact, thereby enabling a reduction in wear during use and an increase in life, together with an increase in the efficiency of abrading the polishing disc.

摘要翻译： 具有用于化学机械抛光机的抛光盘的研磨修整器，用于研磨化学机械抛光机的平面可旋转抛光盘，其将化学抛光剂供应到抛光盘的表面以在物体的表面上抛光 抛光盘，是研磨表面的剖面形状，该研磨表面是平坦圆盘状基体的周边部分，该平面圆盘形基底构件以预定宽度向上突出，其基本均匀地分布在其表面上并且固定在其表面上的磨料砂粒形成为凸圆形 弧形曲面。 以这种方式，与化学机械抛光机的抛光盘接触的部分变得表面接触，从而能够减少使用期间的磨损和寿命的增加，同时提高研磨盘的效率。