公开(公告)号：US20110259260A1

公开(公告)日：2011-10-27

申请号：US13083768

申请日：2011-04-11

申请人： Keiichi TAKANASHI ,  Kengo HAYASHI ,  Yasuhito NARUSHIMA

发明人： Keiichi TAKANASHI ,  Kengo HAYASHI ,  Yasuhito NARUSHIMA

IPC分类号： C30B15/20

CPC分类号： C30B29/06 ,  C30B15/20 ,  C30B15/26 ,  C30B35/00 ,  Y10T117/1068

摘要： A silicon single crystal pull-up apparatus is provided with a chamber into which an inert gas is introduced; a crucible that supports a silicon melt within the chamber; a heater that heats the silicon melt in the crucible; a lifting device for lifting and lowering the crucible; a thermal radiation shield disposed above the crucible; a cylindrical purging tube that is provided inside the thermal radiation shield so as to straighten the inert gas; a CCD camera that photographs the mirror image of the thermal radiation shield reflected on the liquid surface of the silicon melt through the purging tube; a liquid surface level calculator that calculates the liquid surface level of the silicon melt from the position of the mirror image photographed by the camera; and a conversion table creator that creates a conversion table representing a relationship between the liquid surface level of the silicon melt and the mirror image position obtained. The liquid surface level calculator calculates the liquid surface level based on the conversion table.

摘要翻译： 硅单晶上拉装置设置有引入惰性气体的室; 在所述室内支撑硅熔体的坩埚; 加热器，其加热坩埚中的硅熔体; 用于提升和降低坩埚的提升装置; 设置在坩埚上方的热辐射屏蔽; 圆柱形清洗管，设置在热辐射屏蔽内部以使惰性气体变直; CCD摄像机，其通过清洗管照射在硅熔体的液面上反射的热辐射屏蔽的镜像; 液面计算器，用于从由照相机拍摄的镜像位置计算出硅熔体的液面; 以及转换表创建器，其创建表示硅熔体的液面与所获得的镜像位置之间的关系的转换表。 液面计算器根据转换表计算液面水平。