POLYMER-BASED MICROFABRICATED THERMAL GROUND PLANE

    公开(公告)号:US20190390919A1

    公开(公告)日:2019-12-26

    申请号:US16539848

    申请日:2019-08-13

    摘要: Embodiments described herein relate to the concept and designs of a polymer-based thermal ground plane. In accordance with one embodiment, a polymer is utilized as the material to fabricate the thermal ground plane. Other embodiments include am optimized wicking structure design utilizing two arrays of micropillars, use of lithography-based microfabrication of the TGP using copper/polymer processing, micro-posts, throttled releasing holes embedded in the micro-posts, atomic layer deposition (ALD) hydrophilic coating, throttled fluid charging structure and sealing method, defect-free ALD hermetic coating, and compliant structural design.

    MICROPILLAR-ENABLED THERMAL GROUND PLANE
    3.
    发明公开

    公开(公告)号:US20230332841A1

    公开(公告)日:2023-10-19

    申请号:US18180122

    申请日:2023-03-07

    IPC分类号: F28D15/04

    CPC分类号: F28D15/046

    摘要: A thermal ground plane (TGP) is disclosed. A TGP may include a first planar substrate member comprising copper and a second planar substrate member comprising a metal, wherein the first planar substrate member and the second planar substrate member enclose a working fluid. The TGP may include a first plurality of pillars disposed on an interior surface of the first planar substrate and a mesh layer disposed on the top of the first plurality of pillars, wherein the mesh layer comprises at least one of copper, polymer encapsulated with copper, or stainless steel encapsulated with copper. The TGP may also include a second plurality of pillars disposed on an interior surface of the second planar substrate member within an area defined by the perimeter of the second planar substrate member and the second plurality of pillars extend from the second planar substrate member to the mesh layer.

    POLYMER-BASED MICROFABRICATED THERMAL GROUND PLANE
    4.
    发明申请
    POLYMER-BASED MICROFABRICATED THERMAL GROUND PLANE 有权
    基于聚合物的微波热处理平面

    公开(公告)号:US20160161193A1

    公开(公告)日:2016-06-09

    申请号:US14925787

    申请日:2015-10-28

    IPC分类号: F28D15/04 C23F4/00 B23P15/26

    摘要: Embodiments described herein relate to the concept and designs of a polymer-based thermal ground plane. In accordance with one embodiment, a polymer is utilized as the material to fabricate the thermal ground plane. Other embodiments include am optimized wicking structure design utilizing two arrays of micropillars, use of lithography-based microfabrication of the TGP using copper/polymer processing, micro-posts, throttled releasing holes embedded in the micro-posts, atomic layer deposition (ALD) hydrophilic coating, throttled fluid charging structure and sealing method, defect-free ALD hermetic coating, and compliant structural design.

    摘要翻译: 本文描述的实施例涉及基于聚合物的热接地平面的概念和设计。 根据一个实施例,使用聚合物作为制造热接地平面的材料。 其他实施方案包括使用两个微柱阵列的优化芯吸结构设计,使用铜/聚合物处理的TGP的基于光刻的微加工,微柱,嵌入微柱中的节流释放孔,原子层沉积(ALD)亲水 涂层,节流流体充填结构和密封方法,无缺陷ALD气密涂层,符合结构设计。

    POLYMER-BASED MICROFABRICATED THERMAL GROUND PLANE

    公开(公告)号:US20220155025A1

    公开(公告)日:2022-05-19

    申请号:US17592490

    申请日:2022-02-03

    摘要: Embodiments described herein relate to the concept and designs of a polymer-based thermal ground plane. In accordance with one embodiment, a polymer is utilized as the material to fabricate the thermal ground plane. Other embodiments include am optimized wicking structure design utilizing two arrays of micropillars, use of lithography-based microfabrication of the TGP using copper/polymer processing, micro-posts, throttled releasing holes embedded in the micro-posts, atomic layer deposition (ALD) hydrophilic coating, throttled fluid charging structure and sealing method, defect-free ALD hermetic coating, and compliant structural design.

    VAPOR CHAMBER
    6.
    发明申请
    VAPOR CHAMBER 审中-公开

    公开(公告)号:US20200182557A1

    公开(公告)日:2020-06-11

    申请号:US16710180

    申请日:2019-12-11

    IPC分类号: F28D15/04 B23P15/26

    摘要: To provide a vapor chamber having excellent function of circulating a working liquid from an end portion to a center portion of a wick and enabling the prevention of the occurrence of dry-out. A vapor chamber includes a casing formed of a first sheet and a second sheet which face each other and whose outer peripheries are bonded to each other; a working liquid sealed in the casing; and a wick disposed on an inner wall surface of the first sheet or the second sheet. A wall portion is disposed around the wick as viewed in a top plan view of an inside of the casing.

    MICROPILLAR-ENABLED THERMAL GROUND PLANE
    7.
    发明申请

    公开(公告)号:US20200300563A1

    公开(公告)日:2020-09-24

    申请号:US15930016

    申请日:2020-05-12

    IPC分类号: F28F21/08 F28D15/02 F28D15/04

    摘要: A thermal ground plane (TGP) is disclosed. A TGP may include a first planar substrate member comprising copper and a second planar substrate member comprising a metal, wherein the first planar substrate member and the second planar substrate member enclose a working fluid. The TGP may include a first plurality of pillars disposed on an interior surface of the first planar substrate and a mesh layer disposed on the top of the first plurality of pillars, wherein the mesh layer comprises at least one of copper, polymer encapsulated with copper, or stainless steel encapsulated with copper. The TGP may also include a second plurality of pillars disposed on an interior surface of the second planar substrate member within an area defined by the perimeter of the second planar substrate member and the second plurality of pillars extend from the second planar substrate member to the mesh layer.

    Micropillar-enabled thermal ground plane

    公开(公告)号:US11598594B2

    公开(公告)日:2023-03-07

    申请号:US15930016

    申请日:2020-05-12

    IPC分类号: F28F21/08 F28D15/02 F28D15/04

    摘要: A thermal ground plane (TGP) is disclosed. A TGP may include a first planar substrate member comprising copper and a second planar substrate member comprising a metal, wherein the first planar substrate member and the second planar substrate member enclose a working fluid. The TGP may include a first plurality of pillars disposed on an interior surface of the first planar substrate and a mesh layer disposed on the top of the first plurality of pillars, wherein the mesh layer comprises at least one of copper, polymer encapsulated with copper, or stainless steel encapsulated with copper. The TGP may also include a second plurality of pillars disposed on an interior surface of the second planar substrate member within an area defined by the perimeter of the second planar substrate member and the second plurality of pillars extend from the second planar substrate member to the mesh layer.