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1.发明申请公开(公告)号：US20130034660A1
公开(公告)日：2013-02-07
申请号：US13197725
申请日：2011-08-03
CPC分类号： B25J11/005 , B05B13/0292 , B05B13/0452
摘要： This painting system includes a body transport device transporting a body, a painting robot fixedly set at a first height, painting at least an inner portion of a door of the body while changing a posture to follow transport of the body by the body transport device, and a door opening/closing robot fixedly set at a second height different from the first height.
摘要翻译： 这种涂装系统包括运送身体的身体输送装置，固定地设置在第一高度的绘画机器人，同时改变身体的至少一个门的内部部分，同时改变身体运动装置跟随身体的运送， 以及固定地设定在与第一高度不同的第二高度的门打开/关闭机器人。
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公开(公告)号：US20120323357A1
公开(公告)日：2012-12-20
申请号：US13338169
申请日：2011-12-27
IPC分类号： G06F7/00
CPC分类号： G05B19/4182 , B25J9/1697 , Y02P90/083
摘要： A picking system includes a conveyer, a robot, and a control device. The conveyer conveys workpieces. The robot includes a plurality of holding parts and a supporting part. The holding parts hold the workpieces. The supporting part is rotatably provided against an arm to support the plurality of holding parts. Then, the control device instructs the robot to rotate the supporting part by a predetermined amount in such a manner that the direction of the workpiece becomes a predetermined direction for each the workpiece held by the holding parts and then to place the workpiece on a predetermined place.
摘要翻译： 拾取系统包括输送机，机器人和控制装置。 输送机输送工件。 机器人包括多个保持部和支撑部。 夹持件夹持工件。 支撑部分可旋转地设置成抵靠臂以支撑多个保持部。 然后，控制装置指示机器人使支撑部旋转预定量，使得对于由保持部保持的每个工件，工件的方向成为预定方向，然后将工件放置在预定位置 。
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公开(公告)号：US20120323358A1
公开(公告)日：2012-12-20
申请号：US13337818
申请日：2011-12-27
IPC分类号： G06F7/00
CPC分类号： G06K9/34
摘要： A picking system includes a conveyer, a robot, a main camera, and a control device. The conveyer conveys workpieces. The robot performs a holding operation and a moving operation on the workpieces. The main camera captures the transport path of the conveyer. The control device detects the workpiece on the basis of the image captured by the main camera and instructs the robot to perform the holding operation on the detected workpiece. Moreover, the control device instructs the robot to perform the holding operation on the overlapped workpieces when the overlapping of the workpieces is detected.
摘要翻译： 拾取系统包括输送机，机器人，主摄像机和控制装置。 输送机输送工件。 机器人对工件执行保持操作和移动操作。 主相机捕获输送机的输送路径。 控制装置基于由主摄像机拍摄的图像来检测工件，并指示机器人对检测到的工件执行保持操作。 此外，当检测到工件的重叠时，控制装置指示机器人对重叠的工件进行保持操作。
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公开(公告)号：US20080050884A1
公开(公告)日：2008-02-28
申请号：US11842762
申请日：2007-08-21
申请人： Kenichi KOYANAGI , Takashi ARAO
发明人： Kenichi KOYANAGI , Takashi ARAO
CPC分类号： H01L21/31616 , C23C16/45527 , C23C16/45546 , C23C16/54 , H01L21/02178 , H01L21/02181 , H01L21/0228 , H01L21/3141 , H01L21/3142 , H01L21/31645 , H01L27/10814 , H01L27/10852 , H01L28/82
摘要： An objective of this invention is to solve the problem that in ALD film deposition using a vertical batch processing machine advantageous for improving a throughput, reliability in a dielectric body formed on the bottom of a hole such as a capacitor formed on a semiconductor substrate is reduced as the hole is finer and deeper.A dielectric body is formed by an ALD film deposition process comprising a gas flow sequence where a purging step after supplying a source and a reactant gases is a two-stage purging of vacuum purging and gas purging and the step of supplying a reactant gas is further divided. The process allows a highly reliable dielectric body to be formed in the bottom of a deep hole, contributing to improvement in reliability of a capacitor and a semiconductor device.
摘要翻译： 本发明的一个目的是解决在有利于提高生产量的垂直批量处理机的ALD膜沉积中，形成在诸如形成在半导体衬底上的电容器的孔的底部上的电介质的可靠性降低 因为洞更细更深。 通过包括气流序列的ALD膜沉积法形成电介质体，其中供给源和反应气体之后的清洗步骤是真空清除和气体净化的两级清洗，并且进一步提供反应气体的步骤 分为。 该方法允许在深孔的底部形成高度可靠的绝缘体，有助于提高电容器和半导体器件的可靠性。
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