公开(公告)号：US6129100A

公开(公告)日：2000-10-10

申请号：US177939

申请日：1998-10-23

申请人： Kenichi Kitagawa ,  Kiyoshi Shimada ,  Ei'ichi Ando ,  Tatsuo Kataoka ,  Takashi Yoneda ,  Yoshihito Tatehaba

发明人： Kenichi Kitagawa ,  Kiyoshi Shimada ,  Ei'ichi Ando ,  Tatsuo Kataoka ,  Takashi Yoneda ,  Yoshihito Tatehaba

IPC分类号： H01L21/68 ,  B08B3/02 ,  H01L21/00 ,  H01L21/304 ,  B08B3/00

CPC分类号： H01L21/67051 ,  B08B3/02 ,  B08B2203/005 ,  Y10S134/902

摘要： A transfer robot 2 for holding the peripheral edge of a wafer 1 and transferring the wafer 1, a turning-over alignment section 7 for turning over the wafer 1 and centering the wafer 1, and a transfer robot cleaning section 6 for cleaning holding portions 2a of the transfer robot 2 are provided. Besides, a wafer cleaning section 5 for cleaning the wafer 1 is provided and in this wafer cleaning section 5, a spinner 22 for chucking the wafer 1 and a nozzle 20 through which a cleaning liquid is jetted to this wafer 1. To this nozzle 20, a tank 11 for pure water for supplying pure water, a tank 12 for functional water for supplying a functional water, a tank 13 for chemical liquid for supplying a chemical liquid, and a cleaning liquid mixing portion 14 for storing these various kinds of cleaning liquids and mixing them are connected through supply lines.

摘要翻译： 用于保持晶片1的周缘并传送晶片1的传送机器人2，用于翻转晶片1并使晶片1居中的翻转对准部7和用于清洁保持部2a的传送机器人清洁部6 提供传送机器人2。 此外，设置用于清洁晶片1的晶片清洁部分5，并且在该晶片清洁部分5中，用于夹持晶片1的旋转器22和喷射清洁液体的喷嘴20。向该喷嘴20 用于供应纯净水的纯水槽11，用于供应功能水的功能水的罐12，用于供给化学液体的药液用罐13以及用于储存这些各种清洗的清洗液混合部14 液体和混合物通过电源线连接。