公开(公告)号：US06650522B2

公开(公告)日：2003-11-18

申请号：US09987691

申请日：2001-11-15

申请人： Kenji Horibata ,  Teruyuki Nakayama ,  Toshiyuki Nakamura ,  Takaaki Yamada ,  Yuji Hashimoto ,  Kazuhiro Harada

发明人： Kenji Horibata ,  Teruyuki Nakayama ,  Toshiyuki Nakamura ,  Takaaki Yamada ,  Yuji Hashimoto ,  Kazuhiro Harada

IPC分类号： H02H308

CPC分类号： H03K17/18 ,  H03K17/0824

摘要： Because a semiconductor relay system of this invention comprises an across-element voltage detecting circuit 116 which delivers an across-element voltage detection signal depending on the presence/absence of an across-element voltage exceeding a predetermined threshold; an element driving circuit 112 for delivering an element driving signal in response to a control input signal; a logic-based judgement circuit 119 for delivering a logic-based judgement signal depending on the presence/absence of an across-element voltage detection signal; and a filtration circuit for removing a logic-based judgement signal of external disturbing elements to produce an element safety check signal, it is possible to reliably detect the disorder of a triac 114.

公开(公告)号：US5801313A

公开(公告)日：1998-09-01

申请号：US653301

申请日：1996-05-24

申请人： Kenji Horibata ,  Toshihiko Omi ,  Fumihiko Sato

发明人： Kenji Horibata ,  Toshihiko Omi ,  Fumihiko Sato

IPC分类号： G01L9/00 ,  G01L9/12 ,  G01P15/08 ,  G01P15/125 ,  H01L29/84

CPC分类号： G01P15/0802 ,  G01L9/0073 ,  G01P15/125 ,  G01P2015/084

摘要： To provide a capacitive sensor which produces a sensor output excellent in linearity. The capacitive sensor comprises a first semiconductor substrate and a second substrate. The first semiconductor substrate is formed with a frame portion and a diaphragm portion serving as a movable electrode, and bonded with the second substrate at the upper surface of the frame portion by anodic bonding. The second substrate is provided with a fixed electrode on a surface facing the diaphragm portion. A fixing projection is provided on a center of the diaphragm portion and is fixed to the second substrate through a hole of the fixed electrode. When external force is applied to the sensor, the diaphragm portion displaces upward and/or downward. The external force is detected based on change of electrostatic capacitance. Since the center of the diaphragm portion is fixed by the fixing projection, the maximum displacement region of the diaphragm portion forms a ring, resulting in enhancement of linearity of the sensor output.

摘要翻译： 提供一种产生线性优良的传感器输出的电容传感器。 电容传感器包括第一半导体衬底和第二衬底。 第一半导体衬底形成有框架部分和用作可动电极的隔膜部分，并且通过阳极接合在框架部分的上表面处与第二衬底结合。 第二基板在面向隔膜部分的表面上设置有固定电极。 固定突起设置在隔膜部分的中心，并通过固定电极的孔固定到第二基板。 当外力对传感器施加时，隔膜部分向上和/或向下移动。 根据静电电容的变化检测外力。 由于隔膜部分的中心通过固定突起固定，所以隔膜部分的最大位移区域形成环，从而提高传感器输出的线性。