Optical waveguide probe and manufacturing method of the same, and scanning near-field optical microscope
    4.
    发明授权
    Optical waveguide probe and manufacturing method of the same, and scanning near-field optical microscope 失效
    光波导探头及其制造方法相同,并扫描近场光学显微镜

    公开(公告)号:US06744030B2

    公开(公告)日:2004-06-01

    申请号:US09837836

    申请日:2001-04-18

    IPC分类号: H01J314

    摘要: An optical waveguide probe is disclosed which is used for a scanning near-field optical microscope, has a low light propagation loss, and is capable of performing an AFM operation, and a manufacturing method thereof is disclosed. The vicinity of the tip of an optical waveguide 2 is bent toward a side of a probe portion 9 through a plurality of surfaces symmetrical with respect to a plane including an optical axis of the optical waveguide 2. By this, a loss of a propagated light 7 at a bent portion 10 is reduced, and the propagated light 7 can be condensed to a minute aperture 5, so that near-field light can be efficiently emitted from the minute aperture 5.

    摘要翻译: 公开了一种用于扫描近场光学显微镜的光波导探针,具有低的光传播损耗,并且能够执行AFM操作,并且公开了其制造方法。 光波导2的尖端附近通过相对于包括光波导2的光轴的平面对称的多个表面朝向探针部分9的一侧弯曲。由此,传播光的损失 在弯曲部分10处的光线减少,并且传播的光7可以被冷凝到微小的光圈5,使得近场光可以从微小孔5有效地发射。

    Optical microcantilever
    8.
    发明授权
    Optical microcantilever 失效
    光学微悬臂梁

    公开(公告)号:US07496250B2

    公开(公告)日:2009-02-24

    申请号:US11799974

    申请日:2007-05-03

    IPC分类号: G02B6/12

    CPC分类号: G01Q60/38 G01Q60/06 G01Q60/22

    摘要: An optical microcantilever for a scanning near field microscope comprises a support section, a cantilever-shaped optical waveguide, and a light blocking wall. The optical waveguide has a free end, a fixed end fixed to the support section and terminating in a light input/output end, and a tip formed at a side of the free end of the cantilever and having a microscopic aperture at an end thereof. The light blocking wall blocks the transmission of light scattered from a region of the light input/output end in the direction of the tip of the optical waveguide.

    摘要翻译: 用于扫描近场显微镜的光学微悬臂梁包括支撑部分,悬臂形光波导和遮光壁。 光波导具有自由端,固定到支撑部分并终止于光输入/输出端的固定端,以及形成在悬臂自由端一侧的尖端,并在其一端具有微小孔。 光阻挡壁阻挡从光输入/输出端的区域在光波导的尖端方向上散射的光的透射。

    Optical microcantilever
    10.
    发明授权
    Optical microcantilever 失效
    光学微悬臂梁

    公开(公告)号:US06834537B1

    公开(公告)日:2004-12-28

    申请号:US09700323

    申请日:2001-09-27

    IPC分类号: G01B528

    CPC分类号: G01Q60/38 G01Q60/06 G01Q60/22

    摘要: An optical microcantilever has an optical waveguide for propagating light. The optical waveguide has a first side, a second side opposite to the first side, and a tip portion formed on the first side and at a free end of the optical waveguide. The tip portion has a microscopic aperture. A light blocking film is disposed on the first side of the optical waveguide. A reflecting film is disposed on the second side of the optical waveguide. A reflecting member forms part of the reflecting film and is disposed at the free end of the optical waveguide. The reflecting member has a generally planar surface for reflecting light propagated by the optical waveguide and for guiding the reflected light towards the microscopic aperture to generate near-field light at the microscopic aperture.

    摘要翻译: 光学微悬臂梁具有用于传播光的光波导。 光波导具有第一侧,与第一侧相对的第二侧,以及形成在光波导的第一侧和自由端上的尖端部。 尖端部分具有微观孔径。 遮光膜设置在光波导的第一侧上。 反射膜设置在光波导的第二侧上。 反射构件形成反射膜的一部分并且设置在光波导的自由端。 反射构件具有用于反射由光波导传播的光的大体上平面的表面,并且用于将反射的光引导到微孔以在微小孔处产生近场光。