Optical microcantilever
    3.
    发明授权
    Optical microcantilever 失效
    光学微悬臂梁

    公开(公告)号:US07496250B2

    公开(公告)日:2009-02-24

    申请号:US11799974

    申请日:2007-05-03

    IPC分类号: G02B6/12

    CPC分类号: G01Q60/38 G01Q60/06 G01Q60/22

    摘要: An optical microcantilever for a scanning near field microscope comprises a support section, a cantilever-shaped optical waveguide, and a light blocking wall. The optical waveguide has a free end, a fixed end fixed to the support section and terminating in a light input/output end, and a tip formed at a side of the free end of the cantilever and having a microscopic aperture at an end thereof. The light blocking wall blocks the transmission of light scattered from a region of the light input/output end in the direction of the tip of the optical waveguide.

    摘要翻译: 用于扫描近场显微镜的光学微悬臂梁包括支撑部分,悬臂形光波导和遮光壁。 光波导具有自由端,固定到支撑部分并终止于光输入/输出端的固定端,以及形成在悬臂自由端一侧的尖端,并在其一端具有微小孔。 光阻挡壁阻挡从光输入/输出端的区域在光波导的尖端方向上散射的光的透射。

    Optical microcantilever
    4.
    发明授权
    Optical microcantilever 失效
    光学微悬臂梁

    公开(公告)号:US06834537B1

    公开(公告)日:2004-12-28

    申请号:US09700323

    申请日:2001-09-27

    IPC分类号: G01B528

    CPC分类号: G01Q60/38 G01Q60/06 G01Q60/22

    摘要: An optical microcantilever has an optical waveguide for propagating light. The optical waveguide has a first side, a second side opposite to the first side, and a tip portion formed on the first side and at a free end of the optical waveguide. The tip portion has a microscopic aperture. A light blocking film is disposed on the first side of the optical waveguide. A reflecting film is disposed on the second side of the optical waveguide. A reflecting member forms part of the reflecting film and is disposed at the free end of the optical waveguide. The reflecting member has a generally planar surface for reflecting light propagated by the optical waveguide and for guiding the reflected light towards the microscopic aperture to generate near-field light at the microscopic aperture.

    摘要翻译: 光学微悬臂梁具有用于传播光的光波导。 光波导具有第一侧,与第一侧相对的第二侧,以及形成在光波导的第一侧和自由端上的尖端部。 尖端部分具有微观孔径。 遮光膜设置在光波导的第一侧上。 反射膜设置在光波导的第二侧上。 反射构件形成反射膜的一部分并且设置在光波导的自由端。 反射构件具有用于反射由光波导传播的光的大体上平面的表面,并且用于将反射的光引导到微孔以在微小孔处产生近场光。

    Optical cantilever having light shielding film and method of fabricating the same
    5.
    发明授权
    Optical cantilever having light shielding film and method of fabricating the same 失效
    具有遮光膜的光学悬臂及其制造方法

    公开(公告)号:US06747265B1

    公开(公告)日:2004-06-08

    申请号:US09830381

    申请日:2001-07-12

    IPC分类号: H01J516

    CPC分类号: G01Q20/02 G01Q60/22

    摘要: An optical cantilever for an SNOM has a base portion, a cantilever portion extending from the base portion and having a hole formed proximate a distal end thereof, a dielectric member extending through the hole and having a sharpened tip at a first end projecting outward of a first surface of the cantilever portion, and a light shielding film covering the first surface of the cantilever portion and the first end of the dielectric member except for a portion of the sharpened tip so as to form a very small aperture at the sharpened tip which is not covered by the light shielding film.

    摘要翻译: 用于SNOM的光学悬臂具有基部,从基部延伸的悬臂部分,并且具有邻近其远端形成的孔;延伸穿过该孔的电介质构件,并且在第一端处向外突出的尖端 悬臂部分的第一表面和覆盖悬臂部分的第一表面的光屏蔽膜和除了锋利尖端的一部分之外的电介质构件的第一端,以便在锐化尖端处形成非常小的孔, 未被遮光膜覆盖。

    Near-field optical head having tapered hole for guiding light beam
    8.
    发明申请
    Near-field optical head having tapered hole for guiding light beam 有权
    具有用于引导光束的锥形孔的近场光学头

    公开(公告)号:US20100128578A1

    公开(公告)日:2010-05-27

    申请号:US12584049

    申请日:2009-08-28

    IPC分类号: G11B11/00

    摘要: A near-field optical head has a planar substrate having a first surface, a second surface disposed opposite to the first surface, and an inverted conical or pyramidal hole extending through the first and second surfaces. The inverted conical or pyramidal hole has at least one fine aperture formed at an apex thereof and disposed in the first surface and having at least one curved slant surface. An optical waveguide extends into the inverted conical or pyramidal hole of the planar substrate for propagating light along an optical path. A mirror is disposed in the optical waveguide for bending in the direction of the fine aperture the optical path of the light propagated through the optical waveguide.

    摘要翻译: 近场光学头具有平面基板,其具有第一表面,与第一表面相对设置的第二表面和延伸穿过第一表面和第二表面的倒锥形或金字塔形孔。 倒锥形或金字塔形孔具有形成在其顶点处的至少一个细孔,并且设置在第一表面中并且具有至少一个弯曲的倾斜表面。 光波导延伸到平面基板的倒锥形或金字塔形孔中,用于沿光路传播光。 反射镜设置在光波导中,用于在细孔的方向上弯曲通过光波导传播的光的光路。

    Optical microcantilever
    10.
    发明授权
    Optical microcantilever 失效
    光学微悬臂梁

    公开(公告)号:US07150185B2

    公开(公告)日:2006-12-19

    申请号:US10949952

    申请日:2004-09-24

    IPC分类号: G01N13/14

    CPC分类号: G01Q60/38 G01Q60/06 G01Q60/22

    摘要: An optical microcantilever for a scanning near field microscope has an optical waveguide for propagating light. The optical waveguide has a longitudinal axis, a light input/output end, a free end opposite to the light input/output end, and a tip formed at the free end of the cantilever and having a microscopic aperture at an end thereof. A support section has a first portion supporting the optical waveguide, a second portion and a third portion. The second portion has an optical element guide channel formed in the support section for supporting an optical element acting on light entering the optical waveguide or on light exiting from the optical waveguide and for determining a position of the optical element. The third portion is disposed between the first portion and the second portion and has a surface disposed at an angle of inclination relative to the longitudinal axis of the optical waveguide. The light input/output end of the optical waveguide projects above the third portion for reducing a coupling loss between the optical element and the optical waveguide.

    摘要翻译: 用于扫描近场显微镜的光学微悬臂梁具有用于传播光的光波导。 光波导具有纵向轴线,光输入/输出端,与光输入/输出端相对的自由端,以及形成在悬臂自由端处的尖端,并且在其端部具有微小孔。 支撑部分具有支撑光波导的第一部分,第二部分和第三部分。 第二部分具有形成在支撑部分中的光学元件引导通道,用于支撑作用在进入光波导的光的光学元件或者从光波导出射的光并用于确定光学元件的位置。 第三部分设置在第一部分和第二部分之间,并且具有相对于光波导的纵向轴线以倾斜角设置的表面。 光波导的光输入/输出端突出在第三部分之上,用于减少光学元件和光波导之间的耦合损耗。