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1.发明授权Scanning electron microscope and method for processing an image obtained by the scanning electron microscope 有权扫描电子显微镜以及通过扫描电子显微镜获得的图像的处理方法公开(公告)号：US08106357B2
公开(公告)日：2012-01-31
申请号：US12016290
申请日：2008-01-18
IPC分类号： G01N23/00
CPC分类号： G01N23/225 , G01N2223/401
摘要： In the case where a specimen is imaged by a scanning electron microscope, it is intended to acquire an image of a high quality having a noise component reduced, thereby to improve the precision of an image processing. The intensity distribution of a beam is calculated on the basis of an imaging condition or specimen information, and an image restoration is performed by using a resolving power deterioration factor other than the beam intensity distribution as a target of a deterioration mode, so that a high resolving power image can be acquired under various conditions. In the scanning electron microscope for semiconductor inspections and semiconductor measurements, the restored image is used for pattern size measurement, defect detections, defect classifications and so on, so that the measurements can be improved in precision and so that the defect detections and classifications can be made high precise.
摘要翻译： 在通过扫描电子显微镜对样本进行成像的情况下，旨在获取具有降低噪声成分的高质量图像，从而提高图像处理的精度。 基于成像条件或样本信息计算光束的强度分布，并且通过使用除了光束强度分布之外的分辨力退化因子作为劣化模式的目标来执行图像恢复，使得高 可以在各种条件下获得分辨率的图像。 在用于半导体检查和半导体测量的扫描电子显微镜中，恢复的图像用于图案尺寸测量，缺陷检测，缺陷分类等，从而可以提高测量精度，从而可以使缺陷检测和分类 做出高精度。
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2.发明授权Scanning electron microscope and method for processing an image obtained by the scanning electron microscope 有权扫描电子显微镜以及通过扫描电子显微镜获得的图像的处理方法公开(公告)号：US08461527B2
公开(公告)日：2013-06-11
申请号：US13362536
申请日：2012-01-31
IPC分类号： G01N23/225
CPC分类号： G01N23/225 , G01N2223/401
摘要： In the case where a specimen is imaged by a scanning electron microscope, it is intended to acquire an image of a high quality having a noise component reduced, thereby to improve the precision of an image processing. The intensity distribution of a beam is calculated on the basis of an imaging condition or specimen information, and an image restoration is performed by using a resolving power deterioration factor other than the beam intensity distribution as a target of a deterioration mode, so that a high resolving power image can be acquired under various conditions. In the scanning electron microscope for semiconductor inspections and semiconductor measurements, the restored image is used for pattern size measurement, defect detections, defect classifications and so on, so that the measurements can be improved in precision and so that the defect detections and classifications can be made high precise.
摘要翻译： 在通过扫描电子显微镜对样本进行成像的情况下，旨在获取具有降低噪声成分的高质量图像，从而提高图像处理的精度。 基于成像条件或样本信息计算光束的强度分布，并且通过使用除了光束强度分布之外的分辨率劣化因子作为劣化模式的目标来执行图像恢复，使得高 可以在各种条件下获得分辨率的图像。 在用于半导体检查和半导体测量的扫描电子显微镜中，恢复的图像用于图案尺寸测量，缺陷检测，缺陷分类等，从而可以提高测量精度，从而可以使缺陷检测和分类 做出高精度。
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3.发明申请SCANNING ELECTRON MICROSCOPE AND METHOD FOR PROCESSING AN IMAGE OBTAINED BY THE SCANNING ELECTRON MICROSCOPE 有权扫描电子显微镜和扫描电子显微镜获得的图像的处理方法公开(公告)号：US20080251719A1
公开(公告)日：2008-10-16
申请号：US12016290
申请日：2008-01-18
IPC分类号： G01N23/00
CPC分类号： G01N23/225 , G01N2223/401
摘要： In the case where a specimen is imaged by a scanning electron microscope, it is intended to acquire an image of a high quality having a noise component reduced, thereby to improve the precision of an image processing. The intensity distribution of a beam is calculated on the basis of an imaging condition or specimen information, and an image restoration is performed by using a resolving power deterioration factor other than the beam intensity distribution as a target of a deterioration mode, so that a high resolving power image can be acquired under various conditions. In the scanning electron microscope for semiconductor inspections and semiconductor measurements, the restored image is used for pattern size measurement, defect detections, defect classifications and so on, so that the measurements can be improved in precision and so that the defect detections and classifications can be made high precise.
摘要翻译： 在通过扫描电子显微镜对样本进行成像的情况下，旨在获取具有降低噪声成分的高质量图像，从而提高图像处理的精度。 基于成像条件或样本信息计算光束的强度分布，并且通过使用除了光束强度分布之外的分辨率劣化因子作为劣化模式的目标来执行图像恢复，使得高 可以在各种条件下获得分辨率的图像。 在用于半导体检查和半导体测量的扫描电子显微镜中，恢复的图像用于图案尺寸测量，缺陷检测，缺陷分类等，从而可以提高测量精度，从而可以使缺陷检测和分类 做出高精度。
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公开(公告)号：US07903867B2
公开(公告)日：2011-03-08
申请号：US11677669
申请日：2007-02-22
申请人： Kenji Nakahira , Toshifumi Honda
发明人： Kenji Nakahira , Toshifumi Honda
IPC分类号： G06K9/00
CPC分类号： H01J37/28 , H01J2237/24592 , H01J2237/2807 , H01J2237/2817
摘要： Defect image display screens are capable of accurately presenting features of defects. On a thumbnail display screen of a defect, images likely to most clearly indicating features of the defect are determined in units of the defect from, for example, inspection information and a defect type, and then are displayed. On a detail display screen of a defect, for example, images for being displayed so as to clearly indicate features of the defect, and the display sequence thereof are determined in accordance with, for example, inspection information and a defect type, and then are displayed. Further, steps for acquiring a display image during or after defect image acquisition by using, for example, a different defect image acquisition apparatus and a different imaging condition in accordance with preliminarily specified rules are added to an imaging sequence (procedure).
摘要翻译： 缺陷图像显示屏幕能够准确地呈现缺陷的特征。 在缺陷的缩略图显示屏幕上，可能以最清楚地指示缺陷特征的图像以例如检查信息和缺陷类型的缺陷为单位来确定，然后被显示。 在缺陷的详细显示屏幕上，例如，根据例如检查信息和缺陷类型来确定用于显示以清楚地指示缺陷的特征的图像及其显示顺序，然后是 显示。 另外，通过使用例如不同的缺陷图像获取装置和根据预先规定的规则的不同的成像条件，在缺陷图像获取期间或之后获取显示图像的步骤被添加到成像序列（程序）中。
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公开(公告)号：US09267898B2
公开(公告)日：2016-02-23
申请号：US13983077
申请日：2011-12-20
IPC分类号： G01N21/88 , G01N21/956 , G01N21/95
CPC分类号： G01N21/88 , G01N21/9501 , G01N21/956 , G01N2021/8835
摘要： An optical inspection apparatus is provided which suppresses the influence of quantum noise including: light irradiator which irradiates a sample with light; reference light emitter which emits reference light; light interference unit which generates interfering light through interference between transmitted light, scattered light, or reflected light from the sample irradiated with light by the light irradiator, and the reference light emitted by the reference light emitter; light detector which detects the interfering light generated by the light interference unit; defect identifier which identifies the presence or absence of a defect based on a detection signal obtained by the light detector detecting the interfering light; and light convertor which converts at least the state of the transmitted, scattered, or reflected light from the sample, the state of the reference light emitted by the reference light emitter, or the state of the interfering light generated by the light interference unit.
摘要翻译： 提供抑制量子噪声影响的光学检查装置，包括：用光照射样品的光照射器; 发射参考光的参考光发射器; 光干涉单元，其通过光照射器照射的样品的透射光，散射光或反射光之间的干涉产生干涉光，以及由参考光发射器发射的参考光; 光检测器，其检测由光干涉单元产生的干涉光; 缺陷识别器，其基于由所述光检测器检测到所述干扰光获得的检测信号来识别缺陷的存在或不存在; 以及光转换器，其至少转换来自样品的透射，散射或反射光的状态，由参考光发射器发射的参考光的状态或由光干涉单元产生的干涉光的状态。
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公开(公告)号：US20130329227A1
公开(公告)日：2013-12-12
申请号：US13983077
申请日：2011-12-20
IPC分类号： G01N21/88
CPC分类号： G01N21/88 , G01N21/9501 , G01N21/956 , G01N2021/8835
摘要： An optical inspection apparatus is provided which suppresses the influence of quantum noise including: light irradiator which irradiates a sample with light; reference light emitter which emits reference light; light interference unit which generates interfering light through interference between transmitted light, scattered light, or reflected light from the sample irradiated with light by the light irradiator, and the reference light emitted by the reference light emitter; light detector which detects the interfering light generated by the light interference unit; defect identifier which identifies the presence or absence of a defect based on a detection signal obtained by the light detector detecting the interfering light; and light convertor which converts at least the state of the transmitted, scattered, or reflected light from the sample, the state of the reference light emitted by the reference light emitter, or the state of the interfering light generated by the light interference unit.
摘要翻译： 提供抑制量子噪声影响的光学检查装置，包括：用光照射样品的光照射器; 发射参考光的参考光发射器; 光干涉单元，其通过光照射器照射的样品的透射光，散射光或反射光之间的干涉产生干涉光，以及由参考光发射器发射的参考光; 光检测器，其检测由光干涉单元产生的干涉光; 缺陷识别器，其基于由所述光检测器检测到所述干扰光获得的检测信号来识别缺陷的存在或不存在; 以及光转换器，其至少转换来自样品的透射，散射或反射光的状态，由参考光发射器发射的参考光的状态或由光干涉单元产生的干涉光的状态。
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公开(公告)号：US20070194231A1
公开(公告)日：2007-08-23
申请号：US11677669
申请日：2007-02-22
申请人： Kenji Nakahira , Toshifumi Honda
发明人： Kenji Nakahira , Toshifumi Honda
IPC分类号： G21K7/00
CPC分类号： H01J37/28 , H01J2237/24592 , H01J2237/2807 , H01J2237/2817
摘要： Defect image display screens are capable of accurately presenting features of defects. On a thumbnail display screen of a defect, images likely to most clearly indicating features of the defect are determined in units of the defect from, for example, inspection information and a defect type, and then are displayed. On a detail display screen of a defect, for example, images for being displayed so as to clearly indicate features of the defect, and the display sequence thereof are determined in accordance with, for example, inspection information and a defect type, and then are displayed. Further, steps for acquiring a display image during or after defect image acquisition by using, for example, a different defect image acquisition apparatus and a different imaging condition in accordance with preliminarily specified rules are added to an imaging sequence (procedure).
摘要翻译： 缺陷图像显示屏幕能够准确地呈现缺陷的特征。 在缺陷的缩略图显示屏幕上，可能以最清楚地指示缺陷特征的图像以例如检查信息和缺陷类型的缺陷为单位来确定，然后被显示。 在缺陷的详细显示屏幕上，例如，根据例如检查信息和缺陷类型来确定用于显示以清楚地指示缺陷的特征的图像及其显示顺序，然后是 显示。 另外，通过使用例如不同的缺陷图像获取装置和根据预先规定的规则的不同的成像条件，在缺陷图像获取期间或之后获取显示图像的步骤被添加到成像序列（程序）中。
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8.发明申请Scanning Type Charged Particle Beam Microscope and an Image Processing Method Using the Same 有权扫描式带电粒子束显微镜及其图像处理方法公开(公告)号：US20090266985A1
公开(公告)日：2009-10-29
申请号：US12414759
申请日：2009-03-31
申请人： Kenji Nakahira , Atsushi Miyamoto
发明人： Kenji Nakahira , Atsushi Miyamoto
IPC分类号： G01N23/00
CPC分类号： H01J37/28 , G06T5/002 , G06T5/008 , G06T7/11 , G06T2207/10061 , H01J37/222 , H01J37/244 , H01J2237/221 , H01J2237/24495
摘要： Design data and sample characteristic information corresponding to individual areas on the design data are used to perform an image quality improvement operation to make appropriate improvements on image quality according to sample characteristic corresponding to the individual areas on the image, allowing a high speed area division on the image. Further, the use of a database that stores image information associated with the design data allows for an image quality improvement operation that automatically emphasizes portions of the image that greatly differ from past images of the similar design data.
摘要翻译： 使用与设计数据上的各个区域相对应的设计数据和样本特征信息来执行图像质量改进操作，以根据对应于图像上的各个区域的样本特征对图像质量进行适当的改进，从而允许高速区域划分 图片。 此外，使用存储与设计数据相关联的图像信息的数据库允许自动强调与相似设计数据的过去图像大不相同的图像部分的图像质量改进操作。
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公开(公告)号：US08730318B2
公开(公告)日：2014-05-20
申请号：US13160108
申请日：2011-06-14
申请人： Kenji Nakahira , Atsushi Miyamoto , Naoki Hosoya , Minoru Yoshida
发明人： Kenji Nakahira , Atsushi Miyamoto , Naoki Hosoya , Minoru Yoshida
CPC分类号： H04N5/265 , H04N5/217 , H04N5/2628 , H04N7/183
摘要： In order to obtain a quality image without deterioration owing to radiation noise in inspection using the optical video camera in high radiation environment, an inspection apparatus is formed of an image pick-up unit, an image obtaining unit which fetches a video image that contains a signal (noise) that is substantially independent of each frame obtained by the image pick-up unit, a local alignment unit which locally aligns frames with different time phases for forming the image fetched by the image obtaining unit, a frame synthesizing unit which synthesizes the plurality of frames aligned by the local alignment unit for generating a synthesis frame with an SN ratio higher than the SN ratio of the frame before frame synthesis, and an image output unit for displaying or recording the image formed of the synthesis frame generated by the frame synthesizing unit.
摘要翻译： 为了在高辐射环境下使用光学摄像机的检查中的辐射噪声获得质量图像而不劣化，检查装置由图像拾取单元，图像获取单元，其获取包含 信号（噪声），其基本上独立于由图像拾取单元获得的每个帧;局部对准单元，其对具有不同时间相位的帧进行局部对准，以形成由图像获取单元获取的图像;帧合成单元， 由本地对准单元对准的多个帧，用于产生SN比高于帧合成之前的帧的SN比的合成帧;以及图像输出单元，用于显示或记录由帧生成的合成帧形成的图像 合成单位。
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10.发明申请Method for Improving Image Quality of Ultrasonic Image, Ultrasonic Diagnosis Device, and Program for Improving Image Quality 审中-公开提高超声波图像图像质量的方法，超声波诊断装置和改善图像质量的程序公开(公告)号：US20120041312A1
公开(公告)日：2012-02-16
申请号：US13145129
申请日：2010-04-26
申请人： Kenji Nakahira , Atsushi Miyamoto
发明人： Kenji Nakahira , Atsushi Miyamoto
CPC分类号： G06T5/50 , G01S7/52077 , G06T5/002 , G06T2207/10132 , G06T2207/20212
摘要： In an ultrasonic diagnosis device, while a signal component is preserved, a factor of degrading image quality such as a flicker of a noise is suppressed. An input image is separated into a signal component image and a noise component image. After frame synthesis processing is performed on the noise component image, the signal component image is synthesized with the noise component image having undergone the frame synthesis. Thus, the noise is suppressed. Otherwise, after the input image is separated into the signal component image and noise component image, the frame synthesis processing is performed on the signal component image. The noise component image is then synthesized with the signal component image having undergone the frame synthesis. Thus, discernment of a signal can be improved.
摘要翻译： 在超声波诊断装置中，在保持信号分量的同时，抑制噪声的闪烁等图像质量下降的因素。 输入图像被分成信号分量图像和噪声分量图像。 在对噪声分量图像执行帧合成处理之后，信号分量图像与已经进行帧合成的噪声分量图像合成。 因此，噪声被抑制。 否则，在将输入图像分离成信号分量图像和噪声分量图像之后，对信号分量图像执行帧合成处理。 然后，噪声分量图像与经过帧合成的信号分量图像合成。 因此，可以提高对信号的识别。
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