公开(公告)号：US09342879B2

公开(公告)日：2016-05-17

申请号：US14347127

申请日：2012-07-06

申请人： Yohei Minekawa ,  Kenji Nakahira ,  Minoru Harada ,  Takehiro Hirai ,  Ryo Nakagaki

发明人： Yohei Minekawa ,  Kenji Nakahira ,  Minoru Harada ,  Takehiro Hirai ,  Ryo Nakagaki

IPC分类号： G06K9/00 ,  G06T7/00

CPC分类号： G06T7/0004 ,  G06T7/001 ,  G06T2207/10061 ,  G06T2207/20016 ,  G06T2207/30148

摘要： A method for reviewing defect, comprising the steps of: as an image acquisition step, imaging a surface of a sample using arbitrary image acquisition condition selected from a plurality of image acquisition conditions and obtaining a defect image; as a defect position calculation step, proceeding the defect image obtained by the image acquisition step and calculating a defect position on the surface of the sample; as a defect detection accuracy calculation step, obtaining a defect detection accuracy of the defect position calculated by the defect position calculation step; and as a conclusion determination step, determinating whether the defect detection accuracy obtained by the defect detection accuracy calculation step meets a predetermined requirement or not; wherein until it is determined that the defect detection accuracy obtained by the defect detection accuracy calculation step meets a predetermined in the conclusion determination step, the image acquisition condition is selected from the plurality of image acquisition conditions once again and the image acquisition step, the defect position calculation step, the defect detection accuracy calculation step and the conclusion determination step are repeated.

摘要翻译： 一种检查缺陷的方法，包括以下步骤：作为图像获取步骤，使用从多个图像获取条件中选择的任意图像获取条件对样本的表面进行成像并获得缺陷图像; 作为缺陷位置计算步骤，进行通过图像获取步骤获得的缺陷图像，并计算样本表面上的缺陷位置; 作为缺陷检测精度计算步骤，获得由缺陷位置计算步骤计算的缺陷位置的缺陷检测精度; 以及作为结论确定步骤，确定由缺陷检测精度计算步骤获得的缺陷检测精度是否满足预定要求; 其中直到确定由缺陷检测精度计算步骤获得的缺陷检测精度在结论确定步骤中达到预定值时，再次从多个图像获取条件中选择图像获取条件，并且图像获取步骤，缺陷 位置计算步骤，重复缺陷检测精度计算步骤和结论确定步骤。

公开(公告)号：US08824773B2

公开(公告)日：2014-09-02

申请号：US13515643

申请日：2010-11-19

申请人： Yohei Minekawa ,  Ryo Nakagaki ,  Kenji Nakahira ,  Takehiro Hirai ,  Katsuhiro Kitahashi

发明人： Yohei Minekawa ,  Ryo Nakagaki ,  Kenji Nakahira ,  Takehiro Hirai ,  Katsuhiro Kitahashi

IPC分类号： G06K9/00 ,  G06K9/46 ,  G01N23/22 ,  H01J37/26 ,  G06T7/00

CPC分类号： H01J37/26 ,  G01N23/22 ,  G01N2223/421 ,  G01N2223/6116 ,  G01N2223/6466 ,  G06T7/0004 ,  G06T2200/24 ,  G06T2207/10061 ,  G06T2207/20081 ,  G06T2207/30148

摘要： A defect observation device including an input-output unit supplied with information of a taught defect, and information of an ideal output of the taught defect, and configured to display a processing result based upon a determined image processing parameter set; and an automatic determination unit configured to: select image processing parameter sets which are less in number than the total number of all image processing parameter sets, out of all image processing parameter sets, calculate image processing results on an input defect image, by using the selected image processing parameter sets, calculate a coincidence degree for each of the selected image processing parameter sets, estimate distribution of an index value in all image processing parameter sets from distribution of the coincidence degree for the selected image processing parameter sets, and determine an image processing parameter set to have a high coincidence degree out of all image processing parameter sets.

摘要翻译： 一种缺陷观察装置，包括：提供教导缺陷的信息的输入输出单元和教导缺陷的理想输出的信息，并且被配置为基于确定的图像处理参数集显示处理结果; 以及自动确定单元，被配置为：在所有图像处理参数组中，选择数量少于所有图像处理参数组的总数的图像处理参数组，通过使用所述图像处理参数组来计算输入缺陷图像上的图像处理结果 选择的图像处理参数组，对所选择的图像处理参数组中的每一个计算一致度，根据所选择的图像处理参数组的重合程度的分布来估计所有图像处理参数组中的索引值的分布，并且确定图像 处理参数设置为在所有图像处理参数集中具有高重合度。

公开(公告)号：US20130140457A1

公开(公告)日：2013-06-06

申请号：US13515643

申请日：2010-11-19

申请人： Yohei Minekawa ,  Ryo Nakagaki ,  Kenji Nakahira ,  Takehiro Hirai ,  Katsuhiro Kitahashi

发明人： Yohei Minekawa ,  Ryo Nakagaki ,  Kenji Nakahira ,  Takehiro Hirai ,  Katsuhiro Kitahashi

IPC分类号： H01J37/26

CPC分类号： H01J37/26 ,  G01N23/22 ,  G01N2223/421 ,  G01N2223/6116 ,  G01N2223/6466 ,  G06T7/0004 ,  G06T2200/24 ,  G06T2207/10061 ,  G06T2207/20081 ,  G06T2207/30148

摘要： A defect observation device supplied with a taught defect and an ideal output obtained by conducting image processing on the taught defect as its input and capable of conducting work of setting image processing parameters required to classify defect kinds easily and fast is provided.The defect observation device includes an input-output unit 123 which is supplied with information of a taught defect and information of an ideal output of the taught defect and which displays a processing result based upon a determined image processing parameter set, and an automatic determination unit 124 for selecting image processing parameter sets which are less in number than the total number of all image processing parameter sets, out of all image processing parameter sets, calculating image processing results on an input defect image, by using the selected image processing parameter sets, calculating a coincidence degree for each of the selected image processing parameter sets, estimating distribution of an index value in all image processing parameter sets from distribution of the coincidence degree for the selected image processing parameter sets, and determining an image processing parameter set having a high coincidence degree out of all image processing parameter sets.

摘要翻译： 提供了一种缺陷观察装置，其提供了教导缺陷和通过对教导缺陷进行图像处理而获得的理想输出作为其输入并且能够进行设置容易且快速地分类缺陷种类所需的图像处理参数的工作。 缺陷观察装置包括输入输出单元123，该输入输出单元123被提供有教导缺陷的信息和教导缺陷的理想输出的信息，并且基于确定的图像处理参数集显示处理结果;以及自动确定单元 124，用于选择数量少于所有图像处理参数组的总数的图像处理参数组，在所有图像处理参数组中，通过使用所选择的图像处理参数集计算输入缺陷图像上的图像处理结果， 计算所选择的图像处理参数组中的每一个的一致度，根据所选择的图像处理参数组的一致度分布来估计所有图像处理参数组中的索引值的分布，并且确定具有高的图像处理参数组 所有图像处理参数集合的重合度。

公开(公告)号：US20090266985A1

公开(公告)日：2009-10-29

申请号：US12414759

申请日：2009-03-31

申请人： Kenji Nakahira ,  Atsushi Miyamoto

发明人： Kenji Nakahira ,  Atsushi Miyamoto

IPC分类号： G01N23/00

CPC分类号： H01J37/28 ,  G06T5/002 ,  G06T5/008 ,  G06T7/11 ,  G06T2207/10061 ,  H01J37/222 ,  H01J37/244 ,  H01J2237/221 ,  H01J2237/24495

摘要： Design data and sample characteristic information corresponding to individual areas on the design data are used to perform an image quality improvement operation to make appropriate improvements on image quality according to sample characteristic corresponding to the individual areas on the image, allowing a high speed area division on the image. Further, the use of a database that stores image information associated with the design data allows for an image quality improvement operation that automatically emphasizes portions of the image that greatly differ from past images of the similar design data.

摘要翻译： 使用与设计数据上的各个区域相对应的设计数据和样本特征信息来执行图像质量改进操作，以根据对应于图像上的各个区域的样本特征对图像质量进行适当的改进，从而允许高速区域划分 图片。 此外，使用存储与设计数据相关联的图像信息的数据库允许自动强调与相似设计数据的过去图像大不相同的图像部分的图像质量改进操作。

公开(公告)号：US20140092231A1

公开(公告)日：2014-04-03

申请号：US14110758

申请日：2012-04-11

申请人： Kenji Nakahira ,  Atsushi Miyamoto

发明人： Kenji Nakahira ,  Atsushi Miyamoto

IPC分类号： H01J37/26

CPC分类号： H01J37/26 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24495 ,  H01J2237/2809

摘要： A specimen image capture method using a charged particle microscope device includes: a first image acquisition step in which the gain of a detector in a charged particle microscope is set to a first gain value, charged particle beam scanning is carried out on a specimen, and a first image is obtained; a second image acquisition step in which the gain of the detector is set to a second gain value, which is different to the first gain value, charged particle beam scanning is carried out on the specimen, and a second image is obtained; and an image combination step in which the first gain value and the second gain value are used and the first image and the second image are combined.

摘要翻译： 使用带电粒子显微镜装置的标本图像捕获方法包括：第一图像获取步骤，其中将带电粒子显微镜中的检测器的增益设置为第一增益值，对样本进行带电粒子束扫描， 获得第一个图像; 第二图像获取步骤，其中检测器的增益被设置为与第一增益值不同的第二增益值，对样本进行带电粒子束扫描，并获得第二图像; 以及其中使用第一增益值和第二增益值并且组合第一图像和第二图像的图像组合步骤。

公开(公告)号：US20130329227A1

公开(公告)日：2013-12-12

申请号：US13983077

申请日：2011-12-20

申请人： Kenji Nakahira ,  Toshifumi Honda ,  Toshihiko Nakata

发明人： Kenji Nakahira ,  Toshifumi Honda ,  Toshihiko Nakata

IPC分类号： G01N21/88

CPC分类号： G01N21/88 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/8835

摘要： An optical inspection apparatus is provided which suppresses the influence of quantum noise including: light irradiator which irradiates a sample with light; reference light emitter which emits reference light; light interference unit which generates interfering light through interference between transmitted light, scattered light, or reflected light from the sample irradiated with light by the light irradiator, and the reference light emitted by the reference light emitter; light detector which detects the interfering light generated by the light interference unit; defect identifier which identifies the presence or absence of a defect based on a detection signal obtained by the light detector detecting the interfering light; and light convertor which converts at least the state of the transmitted, scattered, or reflected light from the sample, the state of the reference light emitted by the reference light emitter, or the state of the interfering light generated by the light interference unit.

摘要翻译： 提供抑制量子噪声影响的光学检查装置，包括：用光照射样品的光照射器; 发射参考光的参考光发射器; 光干涉单元，其通过光照射器照射的样品的透射光，散射光或反射光之间的干涉产生干涉光，以及由参考光发射器发射的参考光; 光检测器，其检测由光干涉单元产生的干涉光; 缺陷识别器，其基于由所述光检测器检测到所述干扰光获得的检测信号来识别缺陷的存在或不存在; 以及光转换器，其至少转换来自样品的透射，散射或反射光的状态，由参考光发射器发射的参考光的状态或由光干涉单元产生的干涉光的状态。

公开(公告)号：US08585599B2

公开(公告)日：2013-11-19

申请号：US12599056

申请日：2008-05-09

申请人： Kenji Nakahira ,  Atsushi Miyamoto

发明人： Kenji Nakahira ,  Atsushi Miyamoto

IPC分类号： A61B8/00

CPC分类号： G01S7/52046 ,  A61B8/00 ,  G01S7/52026 ,  G06T5/002 ,  G06T5/10 ,  G06T2207/10132 ,  G06T2207/20016 ,  G06T2207/20064 ,  G06T2207/30048

摘要： It is possible to improve an image quality of an ultrasonographic device and improve visibility of a tissue structure and a lesion. According to a noise amount estimated for each of at least two resolution levels and reliability of the noise amount estimation, a corrected noise amount is calculated. An intensity conversion is performed on a decomposition coefficient obtained by a multi-resolution decomposition process using the corrected noise amount. Moreover, by performing intensity conversion of the respective decomposition coefficients according to a plurality of decomposition coefficients, it is possible to generate a high-quality image. Furthermore, by switching processing parameters in accordance with the imaging condition, the image type, and the imaging object, it is possible to simultaneously realize the processing time and the image quality appropriate for the purpose.

摘要翻译： 可以提高超声波装置的图像质量，并提高组织结构和病变的可见性。 根据针对至少两个分辨率级别和噪声量估计的可靠性估计的噪声量，计算校正噪声量。 对通过使用校正噪声量的多分辨率分解处理获得的分解系数执行强度转换。 此外，通过根据多个分解系数执行各个分解系数的强度转换，可以生成高质量的图像。 此外，通过根据成像条件，图像类型和成像对象切换处理参数，可以同时实现适合于该目的的处理时间和图像质量。

公开(公告)号：US20120274757A1

公开(公告)日：2012-11-01

申请号：US13513280

申请日：2010-11-08

申请人： Jie Bai ,  Kenji Nakahira ,  Atsushi Miyamoto ,  Chie Shishido ,  Hideyuki Kazumi

发明人： Jie Bai ,  Kenji Nakahira ,  Atsushi Miyamoto ,  Chie Shishido ,  Hideyuki Kazumi

IPC分类号： H04N7/18

CPC分类号： H01J37/28 ,  H01J37/244 ,  H01J2237/24495 ,  H01J2237/2809 ,  H01J2237/2817 ,  H01L22/12

摘要： The invention relates to a technique of improving a contrast of a lower-layer pattern in a multi layer by synthesizing detected signals from a plurality of detectors by using an appropriate allocation ratio in accordance with pattern arrangement. In a charged particle beam device capable of improving image quality by using detected images obtained from a plurality of detectors and in a method of improving the image quality, a method of generating one or more output images from detected images corresponding to respective outputs of the detectors that are arranged at different locations is controlled by using information of a pattern direction, an edge strength, or others calculated from a design data or the detected image. In this manner, a detection area of the detected signals can be expanded by using the plurality of detectors, and the image quality such as the contrast can be improved by synthesizing the detected signals by using the pattern direction or the edge strength calculated from the design data or the detected images.

摘要翻译： 本发明涉及一种通过根据图案布置使用合适的分配比例来合成来自多个检测器的检测信号来提高多层下层图案的对比度的技术。 在能够通过使用从多个检测器获得的检测图像来提高图像质量的带电粒子束装置中，以及提高图像质量的方法中，提供一种从与检测器的各个输出对应的检测图像生成一个或多个输出图像的方法 通过使用从设计数据或检测到的图像计算的图案方向，边缘强度或其他的信息来控制布置在不同位置处的位置。 以这种方式，可以通过使用多个检测器来扩展检测信号的检测区域，并且可以通过使用从设计计算出的图案方向或边缘强度合成检测信号来提高诸如对比度的图像质量 数据或检测到的图像。

公开(公告)号：US08237119B2

公开(公告)日：2012-08-07

申请号：US12414759

申请日：2009-03-31

申请人： Kenji Nakahira ,  Atsushi Miyamoto

发明人： Kenji Nakahira ,  Atsushi Miyamoto

IPC分类号： G21N23/00 ,  G21K7/00

CPC分类号： H01J37/28 ,  G06T5/002 ,  G06T5/008 ,  G06T7/11 ,  G06T2207/10061 ,  H01J37/222 ,  H01J37/244 ,  H01J2237/221 ,  H01J2237/24495

摘要： Design data and sample characteristic information corresponding to individual areas on the design data are used to perform an image quality improvement operation to make appropriate improvements on image quality according to sample characteristic corresponding to the individual areas on the image, allowing a high speed area division on the image. Further, the use of a database that stores image information associated with the design data allows for an image quality improvement operation that automatically emphasizes portions of the image that greatly differ from past images of the similar design data.

摘要翻译： 使用与设计数据上的各个区域相对应的设计数据和样本特征信息来执行图像质量改进操作，以根据对应于图像上的各个区域的样本特征对图像质量进行适当的改进，从而允许高速区域划分 图片。 此外，使用存储与设计数据相关联的图像信息的数据库允许自动强调与相似设计数据的过去图像大不相同的图像部分的图像质量改进操作。

公开(公告)号：US20070194231A1

公开(公告)日：2007-08-23

申请号：US11677669

申请日：2007-02-22

申请人： Kenji Nakahira ,  Toshifumi Honda

发明人： Kenji Nakahira ,  Toshifumi Honda

IPC分类号： G21K7/00

CPC分类号： H01J37/28 ,  H01J2237/24592 ,  H01J2237/2807 ,  H01J2237/2817

摘要： Defect image display screens are capable of accurately presenting features of defects. On a thumbnail display screen of a defect, images likely to most clearly indicating features of the defect are determined in units of the defect from, for example, inspection information and a defect type, and then are displayed. On a detail display screen of a defect, for example, images for being displayed so as to clearly indicate features of the defect, and the display sequence thereof are determined in accordance with, for example, inspection information and a defect type, and then are displayed. Further, steps for acquiring a display image during or after defect image acquisition by using, for example, a different defect image acquisition apparatus and a different imaging condition in accordance with preliminarily specified rules are added to an imaging sequence (procedure).

摘要翻译： 缺陷图像显示屏幕能够准确地呈现缺陷的特征。 在缺陷的缩略图显示屏幕上，可能以最清楚地指示缺陷特征的图像以例如检查信息和缺陷类型的缺陷为单位来确定，然后被显示。 在缺陷的详细显示屏幕上，例如，根据例如检查信息和缺陷类型来确定用于显示以清楚地指示缺陷的特征的图像及其显示顺序，然后是 显示。 另外，通过使用例如不同的缺陷图像获取装置和根据预先规定的规则的不同的成像条件，在缺陷图像获取期间或之后获取显示图像的步骤被添加到成像序列（程序）中。