Electronic reader for reading a special characteristic of an object
    1.
    发明授权
    Electronic reader for reading a special characteristic of an object 有权
    用于读取物体的特殊特征的电子阅读器

    公开(公告)号:US06611198B1

    公开(公告)日:2003-08-26

    申请号:US09411141

    申请日:1999-10-01

    IPC分类号: H04Q522

    CPC分类号: G06K7/0008

    摘要: An object identification system and method detects the presence of a target object in a field of inspection and in one aspect of the invention, generates a first signal if the object is left in the field of inspection for more than a minimum threshold period of time. In a second aspect a second signal is generated if the object is introduced to the field of inspection more than a minimum threshold number of times (having been withdrawn from the field of inspection in the interim) within a minimum threshold period of time.

    摘要翻译: 对象识别系统和方法在检查领域中检测目标对象的存在,并且在本发明的一个方面中,如果对象在检查领域中留下超过最小阈值时间段,则产生第一信号。 在第二方面,如果在最小阈值时间段内将对象引入检查领域超过最小阈值次数(已经从中期的检查领域中撤出),则产生第二信号。

    Radio frequency identification system
    2.
    发明授权
    Radio frequency identification system 有权
    射频识别系统

    公开(公告)号:US06411199B1

    公开(公告)日:2002-06-25

    申请号:US09138589

    申请日:1998-08-21

    IPC分类号: H04Q522

    CPC分类号: G06K7/0008

    摘要: A radio frequency identification system includes a transponder and a transponder reader. The transponder, responsive to an interrogation signal continuously transmitted by the transponder reader, generates a transponder signal modulated by an identification signal readable by the transponder reader. The identification signal includes a synchronization portion, a data portion, an output format identification portion, and an error detection portion. The output format identification portion is used by the reader to configure itself for communication with an attached controller. In another aspect of the invention, the transponder reader may be configured to read FSK as well as PSK encoded signals from the transponder.

    摘要翻译: 射频识别系统包括应答器和应答器读取器。 应答器响应于由应答器读取器连续发送的询问信号,生成由应答器读取器可读取的识别信号调制的应答器信号。 识别信号包括同步部分,数据部分,输出格式识别部分和错误检测部分。 读取器使用输出格式识别部分来配置自身以与附接的控制器进行通信。 在本发明的另一方面,应答器读取器可以被配置为从应答器读取FSK以及PSK编码的信号。

    Wafer prealigner with phase sensitive detection
    3.
    发明授权
    Wafer prealigner with phase sensitive detection 失效
    晶圆预对准器具有相敏检测

    公开(公告)号:US06728596B1

    公开(公告)日:2004-04-27

    申请号:US10268376

    申请日:2002-10-09

    申请人: Dale Lindseth

    发明人: Dale Lindseth

    IPC分类号: B65G4700

    CPC分类号: H01L21/681 Y10S414/136

    摘要: The system and method herein provide a prealigner that has reduced sensitivity to distorting ambient light influences in the environment of a prealigner integrated in a metrology apparatus. A modulated signal is produced by a photo detector in response to modulated light that is partially shielded by wafer positioned in a gap between light source and detector. The pulsed signal is bandpass filtered and demodulated whereby only the difference between high- and low-levels of the pulsed signal are recognized. Flickering and DC components related to ambient light and other distorting operational influences are removed from the analysis unrecognized. Demodulation is synchronously accomplished together with a switching of the light source's power supply. For stable voltage levels of the power supply, a current source is buffered during off-intervals for a constant load on the current source. Also a power steering switch samples the buffers voltage level and takes it as switching condition for the next on-interval of the power supply. Preferably a switched capacitor building block is used as synchronizing element. A final analog output signal is prepared for sampling.

    摘要翻译: 本文的系统和方法提供了一种预定值器,其对集成在计量装置中的预对准器的环境中的环境光影响的变形具有降低的灵敏度。 响应于由位于光源和检测器之间的间隙中的晶片部分屏蔽的调制光,由光电检测器产生调制信号。 脉冲信号被带通滤波和解调,从而仅识别脉冲信号的高电平和低电平之间的差。 与环境光和其他扭曲的操作影响有关的闪烁和直流分量从未被识别的分析中去除。 解调与光源电源的切换同步完成。 对于电源的稳定电压电平,电流源在电流源的恒定负载的关断间隔期间进行缓冲。 另外,动力转向开关对缓冲器电压电平进行采样,并将其作为电源下一个间隔时间的开关条件。 优选地,开关电容器构建块用作同步元件。 准备最终的模拟输出信号进行采样。

    Digital detector data communication in an optical metrology tool
    4.
    发明授权
    Digital detector data communication in an optical metrology tool 失效
    光学测量工具中的数字检测器数据通信

    公开(公告)号:US06867870B1

    公开(公告)日:2005-03-15

    申请号:US10262722

    申请日:2002-10-02

    IPC分类号: G01B11/24

    CPC分类号: G01B11/24

    摘要: A detector network for an optical metrology system includes an analog to digital converter for each photodetector or detector array. Each analog to digital converter is connected to provide digitally encoded output from its associated detector. Each analog to digital converter is also connected to a hub. The hub receives commands from a processor and distributes them to the analog to digital converters. The converters sample the output of their associated detectors and return the digitized results to the hub. In turn, the hub passes the digitized results to the processor for analysis.

    摘要翻译: 用于光学测量系统的检测器网络包括用于每个光电检测器或检测器阵列的模数转换器。 每个模数转换器被连接以从其相关联的检测器提供数字编码的输出。 每个模数转换器也连接到集线器。 集线器从处理器接收命令并将其分配给模数转换器。 转换器对其相关检测器的输出进行采样,并将数字化结果返回到集线器。 反过来,集线器将数字化结果传递给处理器进行分析。

    Proximity detecting apparatus
    5.
    发明授权
    Proximity detecting apparatus 失效
    近似检测装置

    公开(公告)号:US5099227A

    公开(公告)日:1992-03-24

    申请号:US453271

    申请日:1989-12-18

    摘要: A proximity detection system which combines the advantages of an electrostatic (electric) field coupling mechanism with those of an electromagnetic coupling mechanism in order to overcome the disadvantages of the respective individual coupling mechanisms. The system includes a coded tag which is excited with an induction field, i.e., by using an electromagnetic coupling mechanism as has been done in the past in such proximity identification systems, but which transmits stored data back to the receiver using both an electric field coupling mechanism and an electromagnetic field coupling mechanism. The receiver, in turn, is provided with a novel preamplifier circuit arrangement, so that it can simultaneously receive signals via either or both of these coupling mechanisms.

    摘要翻译: 一种接近检测系统,其结合了静电(电)场耦合机构与电磁耦合机构的优点,以克服各个单独耦合机构的缺点。 该系统包括用感应场激励的编码标签,即通过使用如在过去这样的接近识别系统中已经完成的电磁耦合机制,但是使用电场耦合来将存储的数据发送回接收机 机制和电磁场耦合机制。 接收器又被提供有新颖的前置放大器电路装置,使得其可以通过这些耦合机构中的任一个或两者同时接收信号。