公开(公告)号：US20250076033A1

公开(公告)日：2025-03-06

申请号：US18780680

申请日：2024-07-23

Applicant: Keyence Corporation

Inventor： Akira FUYUNO ,  Tatsuro HOMMA ,  Izumi MORI ,  Atsushi SUBE

IPC: G01B11/25

Abstract: Provided is an optical displacement meter capable of solving problems such as dustproof and safety at the time of an operation and acquiring profiles of a plurality of positions of a workpiece with high accuracy without providing a conveyor or a linear motion mechanism. An optical displacement meter includes a light projecting and receiving module that integrally holds a light projecting unit, a light collecting unit, and a capturing unit to have a Scheimpflug relationship, a motor that integrally rotates the light projecting and receiving module, a housing that stores the light projecting and receiving module, and a control unit that controls the motor, and rotates the light projecting and receiving module in a state where the Scheimpflug relationship is maintained inside the housing to scan the slit light in a direction orthogonal to an X direction.