公开(公告)号：US20250076033A1

公开(公告)日：2025-03-06

申请号：US18780680

申请日：2024-07-23

Applicant: Keyence Corporation

Inventor： Akira FUYUNO ,  Tatsuro HOMMA ,  Izumi MORI ,  Atsushi SUBE

IPC: G01B11/25

Abstract: Provided is an optical displacement meter capable of solving problems such as dustproof and safety at the time of an operation and acquiring profiles of a plurality of positions of a workpiece with high accuracy without providing a conveyor or a linear motion mechanism. An optical displacement meter includes a light projecting and receiving module that integrally holds a light projecting unit, a light collecting unit, and a capturing unit to have a Scheimpflug relationship, a motor that integrally rotates the light projecting and receiving module, a housing that stores the light projecting and receiving module, and a control unit that controls the motor, and rotates the light projecting and receiving module in a state where the Scheimpflug relationship is maintained inside the housing to scan the slit light in a direction orthogonal to an X direction.

公开(公告)号：US20210140757A1

公开(公告)日：2021-05-13

申请号：US16823366

申请日：2020-03-19

Applicant: Keyence Corporation

Inventor： Akira FUYUNO

IPC: G01B11/06 ,  G01B11/04

Abstract: An imaging head 100 includes a laser projector 110, an LED projector 120, a light receiving lens 132, a light receiver 131, and a processor 200. The laser projector 110 emits measurement light to a workpiece W. The LED projector 120 emits uniform observation light to the workpiece W. The light receiving lens 132 converges reflected light of the measurement light and reflected light of the observation light that are reflected back from the workpiece W. The light receiver 131 has a light receiving surface composed of multiple light receiving elements that are two-dimensionally arranged. The laser projector 110, the light receiver 131, and the light receiving lens 132 are arranged so that a plane containing the light receiving surface and a plane containing the principal plane of the light receiving lens 132 will satisfy the Scheimpflug condition relative to a light projection axis of the laser projector 110.

公开(公告)号：US20250076032A1

公开(公告)日：2025-03-06

申请号：US18780601

申请日：2024-07-23

Applicant: Keyence Corporation

Inventor： Akira FUYUNO ,  Tatsuro HOMMA ,  Kaoru KANAYAMA

IPC: G01B11/25

Abstract: An optical displacement meter that measures a cross-sectional profile of a workpiece, and includes: a light projecting/receiving module including a light projecting unit that emits slit light extending in an X direction, a light receiving lens that collects reflected light of the slit light reflected by the workpiece, and an imaging unit that receives light collected by the light receiving lens; a motor that integrally rotates the light projecting/receiving module; and a control unit that controls the motor to scan the slit light in a direction orthogonal to the X direction. A rotation angle is limited to prevent specularly reflected light reflected from a specular reflection surface from being captured by the imaging unit when the light projecting unit irradiates the workpiece having the specular reflection surface parallel to an X-Y plane extending in the X direction and a Y direction with the slit light.

公开(公告)号：US20250076506A1

公开(公告)日：2025-03-06

申请号：US18780568

申请日：2024-07-23

Applicant: Keyence Corporation

Inventor： Akira FUYUNO ,  Yoshitaka TSUCHIDA

IPC: G01S17/89 ,  G01B11/24 ,  G01S7/481 ,  G06T7/00

Abstract: An optical displacement meter includes a light projecting unit that emits slit light extending in an X direction, an image sensor that receives light collected by a light receiving lens, a light projecting and receiving module that integrally holds the light projecting unit, the light receiving lens, and the image sensor, a motor that rotates the light projecting and receiving module, a control unit that controls the motor and rotates the light projecting and receiving module to scan the slit light in a direction orthogonal to the X direction, and a calculation unit that generates a sectional profile at each of different positions in a scanning direction. The calculation unit is configured to be able to change a partial region of the image sensor from which the pixel signal is to be read out in accordance with the rotation angle.

公开(公告)号：US20200340799A1

公开(公告)日：2020-10-29

申请号：US16823363

申请日：2020-03-19

Applicant: Keyence Corporation

Inventor： Akira FUYUNO ,  Yoshitaka TSUCHIDA

IPC: G01B11/06

Abstract: A light source irradiates the measuring object with slit light having a width in an X direction. An image sensor receives reflected light from the measuring object, has a plurality of pixels two-dimensionally arranged in a U direction corresponding to the X direction and a V direction corresponding to a Z direction, and outputs a light receiving amount of the reflected light. A detecting unit detects a position of a pixel in the V direction. A generating unit generates a profile of the X-Z cross section from each position of the plurality of pixel rows in the U direction and the peak position in the V direction. A resolution in the V direction of the image sensor is lower than a resolution in the U direction of the image sensor.