公开(公告)号：US20250076033A1

公开(公告)日：2025-03-06

申请号：US18780680

申请日：2024-07-23

Applicant: Keyence Corporation

Inventor： Akira FUYUNO ,  Tatsuro HOMMA ,  Izumi MORI ,  Atsushi SUBE

IPC: G01B11/25

Abstract: Provided is an optical displacement meter capable of solving problems such as dustproof and safety at the time of an operation and acquiring profiles of a plurality of positions of a workpiece with high accuracy without providing a conveyor or a linear motion mechanism. An optical displacement meter includes a light projecting and receiving module that integrally holds a light projecting unit, a light collecting unit, and a capturing unit to have a Scheimpflug relationship, a motor that integrally rotates the light projecting and receiving module, a housing that stores the light projecting and receiving module, and a control unit that controls the motor, and rotates the light projecting and receiving module in a state where the Scheimpflug relationship is maintained inside the housing to scan the slit light in a direction orthogonal to an X direction.

公开(公告)号：US20250076035A1

公开(公告)日：2025-03-06

申请号：US18780584

申请日：2024-07-23

Applicant: Keyence Corporation

Inventor： Tatsuro HOMMA

IPC: G01B11/25 ,  G01B11/02

Abstract: An optical displacement meter includes a light projecting unit that irradiates a workpiece with slit light, an image sensor that outputs a light receiving amount distribution of reflected light from the workpiece, a motor, a control unit that controls the motor, causes the slit light to scan, and exposes the image sensor while rotating the image sensor, and a rotation angle acquisition unit that acquires a reference angle corresponding to an exposure period of the image sensor. The control unit acquires a peak position in a V direction of the light receiving amount distribution during the exposure period, and estimates a representative angle at which the peak position is acquired based on the reference angle corresponding to the exposure period and a control condition of the image sensor or the motor, and calculates a height of the workpiece at the representative angle from the peak position.

公开(公告)号：US20250076032A1

公开(公告)日：2025-03-06

申请号：US18780601

申请日：2024-07-23

Applicant: Keyence Corporation

Inventor： Akira FUYUNO ,  Tatsuro HOMMA ,  Kaoru KANAYAMA

IPC: G01B11/25

Abstract: An optical displacement meter that measures a cross-sectional profile of a workpiece, and includes: a light projecting/receiving module including a light projecting unit that emits slit light extending in an X direction, a light receiving lens that collects reflected light of the slit light reflected by the workpiece, and an imaging unit that receives light collected by the light receiving lens; a motor that integrally rotates the light projecting/receiving module; and a control unit that controls the motor to scan the slit light in a direction orthogonal to the X direction. A rotation angle is limited to prevent specularly reflected light reflected from a specular reflection surface from being captured by the imaging unit when the light projecting unit irradiates the workpiece having the specular reflection surface parallel to an X-Y plane extending in the X direction and a Y direction with the slit light.

公开(公告)号：US20200340800A1

公开(公告)日：2020-10-29

申请号：US16823365

申请日：2020-03-19

Applicant: Keyence Corporation

Inventor： Tatsuro HOMMA

IPC: G01B11/06 ,  G01B11/04

Abstract: The optical displacement meter generates, from each position of a plurality of pixel rows in a U direction and a peak position in a V direction, a plurality of profiles of the X-Z cross section, and measures a three-dimensional shape of the measuring object based on the plurality of profiles acquired at different positions in the Y direction. The optical displacement meter determines, based on whether a profile exists in a blind spot region in which it is impossible to measure a height which occurs in a Y-Z cross section corresponding to an angle formed between a light projecting axis of a light projecting section and a light receiving axis of an image sensor based on a principle of triangulation, a part of the three-dimensional shape generated by a measuring unit as an erroneous detection value.