公开(公告)号：US09400307B2

公开(公告)日：2016-07-26

申请号：US13801694

申请日：2013-03-13

申请人： Keysight Technologies, Inc.

发明人： Hiroshi Tamura ,  Takuro Nishimura ,  Tomonobu Hiramatsu

IPC分类号： G01R31/26 ,  G01R31/28

CPC分类号： G01R31/2834

摘要： A semiconductor test system includes test head pins; per-pin resources which are connectable to the test head pins on a one-to-one basis; shared resources, each of which is connectable to one of the test head pins; a tester controller for controlling the per-pin resources and the shared resources; and a tabular-form test plan including: a first column for specifying a measurement function that uses at least one of the per-pin resources and the shared resources; and at least one second column for specifying input and output parameters of the measurement function, the tabular-form test plan further including program rows, the tabular-form test plan being executed by the tester controller, the tabular-form test plan further including a third column for specifying how rows that are executed by asynchronous parallel execution are to be grouped.

摘要翻译： 半导体测试系统包括测试头引脚; 每个引脚资源可以一对一连接到测试头引脚; 共享资源，每个资源可连接到一个测试头引脚; 用于控制每针资源和共享资源的测试器控制器; 以及表格形式测试计划，包括：用于指定使用每个引脚资源和共享资源中的至少一个的测量功能的第一列; 以及用于指定所述测量功能的输入和输出参数的至少一个第二列，所述表格形式测试计划还包括程序行，所述测试者控制器执行的表格形式测试计划，所述表格形式测试计划还包括 用于指定如何对通过异步并行执行执行的行进行分组的第三列。