摘要:
In the present invention, an etching hole 21 is formed in a polysilicon film 14 as a cavity-wall member. Through the etching hole 21, hydrofluoric acid is injected, so as to dissolve a silicon oxide film 13, thereby forming a cavity 22. In the cavity 22, a detecting unit 12 of a sensor is in an exposed condition. Next, by sputtering, an Al film 16 is deposited in the etching hole 21 and on an upper face of a substrate. Thereafter, a portion of the Al film 16 positioned on the polysilicon film 14 is removed by etching back, thereby leaving only a metal closure 16a of Al which closes the etching hole. The sputtering step is performed under a pressure of 5 Pa or less, so that the pressure in the cavity can be held to be low.
摘要:
The solid-state image sensor of the present invention includes: multiple different types of pixel groups, which exhibit mutually different sensitivity properties that vary from one group to another according to wavelengths of incoming light, wherein each pixel has a photoelectric converter for outputting a pixel signal that changes with the intensity of the light received, and a reading circuit, which reads the pixel signal from each of the multiple types of pixel groups and which outputs an image signal representing an image that is associated with the type of a pixel group. The reading circuit outputs the image signal with the frame frequency changed according to the type of the pixel group.
摘要:
In a learning process, first, images having different resolutions are obtained from a target region of the subject (S101). Further, the subject characteristic of the target region is obtained (S102). Then, the resolution conversion rules are learned from the images having different resolutions, and those are recorded to a storage device along with the subject characteristics (S103). When converting the resolutions, the resolution conversion rules learned for the corresponding subject characteristics are applied to each region of the original image so as to convert the resolutions of the original image.