公开(公告)号：US20230288351A1

公开(公告)日：2023-09-14

申请号：US17892313

申请日：2022-08-22

申请人： Kioxia Corporation

发明人： Takehiro Nakai ,  Yumiko Yamashita ,  Ippei Kamiyama

IPC分类号： G01N23/207

CPC分类号： G01N23/207 ,  G01N2223/056 ,  G01N2223/646

摘要： An evaluation device includes an X-ray diffraction measuring device configured to acquire a first X-ray locking curve having a first main peak and a first sub-peak partially overlapping the first main peak by measuring an X-ray locking curve of a first portion of a sample having a crystalline material. The evaluation device includes an analysis device configured to separate the first sub-peak from the first main peak, perform first evaluation of a crystal defects or distortion of the sample based on a peak position, peak intensity, or a half width of the separated first sub-peak, and output the first evaluation.