公开(公告)号：US20250066196A1

公开(公告)日：2025-02-27

申请号：US18794139

申请日：2024-08-05

Applicant: Kioxia Corporation

Inventor： Motonari TAKAHASHI

IPC: C01B17/90 ,  B01D19/00

Abstract: A sulfuric acid recovery device includes a first recovery tank configured to recover sulfuric acid; a concentration meter configured to measure a concentration of hydrogen peroxide in the sulfuric acid; a discharge pipe configured to discharge the sulfuric acid from the first recovery tank to a second recovery tank; a circulation pipe with a maximum installation height position equal to or lower than a maximum installation height position of the discharge pipe and with a flow path formed, causing the sulfuric acid to return to the first recovery tank; a first valve configured to open and close a flow path of the discharge pipe; a pump configured to feed the sulfuric acid discharged to at least the circulation pipe of the circulation pipe and the discharge pipe; and a control circuit configured to control opening and closing of the first valve in accordance with the concentration of the hydrogen peroxide.

公开(公告)号：US20240280459A1

公开(公告)日：2024-08-22

申请号：US18582450

申请日：2024-02-20

Applicant: Kioxia Corporation

Inventor： Yusuke OSHIMA ,  Toshiyuki MURANAKA ,  Kyo OTSUBO ,  Ryutaro OTAHARA ,  Motonari TAKAHASHI ,  Hiroshi TOMITA ,  Kazuki BABA

IPC: G01N15/0205 ,  G01N1/40

CPC classification number: G01N15/0211 ,  G01N1/4077 ,  G01N2001/4088

Abstract: An evaluation apparatus according to an embodiment includes an evaluator including a column being capable of storing a liquid containing defects, the column being transparent, the defects containing a bubble, a first particle containing metal, and a second particle being different from the bubble and the first particle, an irradiator irradiating the liquid in the column with an irradiation light, an imager imaging a scattered light emitted from the defects by the irradiation light, an analyzer obtaining a diffusion coefficient of the defects from the imaged scattered light, a calculator calculating a particle size and a refractive index of the defects, a determiner determining whether the defects contain the bubble or the second particle, or the first particle; a filter filtering the liquid, the filter including an inlet and an outlet; a first pipe connecting the outlet of the filter and the evaluator.