公开(公告)号：US20240280459A1

公开(公告)日：2024-08-22

申请号：US18582450

申请日：2024-02-20

Applicant: Kioxia Corporation

Inventor： Yusuke OSHIMA ,  Toshiyuki MURANAKA ,  Kyo OTSUBO ,  Ryutaro OTAHARA ,  Motonari TAKAHASHI ,  Hiroshi TOMITA ,  Kazuki BABA

IPC: G01N15/0205 ,  G01N1/40

CPC classification number: G01N15/0211 ,  G01N1/4077 ,  G01N2001/4088

Abstract: An evaluation apparatus according to an embodiment includes an evaluator including a column being capable of storing a liquid containing defects, the column being transparent, the defects containing a bubble, a first particle containing metal, and a second particle being different from the bubble and the first particle, an irradiator irradiating the liquid in the column with an irradiation light, an imager imaging a scattered light emitted from the defects by the irradiation light, an analyzer obtaining a diffusion coefficient of the defects from the imaged scattered light, a calculator calculating a particle size and a refractive index of the defects, a determiner determining whether the defects contain the bubble or the second particle, or the first particle; a filter filtering the liquid, the filter including an inlet and an outlet; a first pipe connecting the outlet of the filter and the evaluator.