公开(公告)号：US20230260780A1

公开(公告)日：2023-08-17

申请号：US18296816

申请日：2023-04-06

Applicant: Kioxia Corporation

Inventor： Minako INUKAI ,  Hideaki SAKURAI ,  Kyo OTSUBO ,  Tetsuo TAKEMOTO

IPC: H01L21/02 ,  B08B3/04 ,  B08B3/08 ,  B08B3/12 ,  B08B7/00 ,  H01L21/67 ,  H01L21/66

CPC classification number: H01L21/02101 ,  B08B3/08 ,  B08B3/041 ,  B08B3/123 ,  B08B7/0014 ,  H01L21/67051 ,  H01L21/67248 ,  H01L22/12 ,  H01L21/02082

Abstract: According to one embodiment, a method including supplying a liquid onto a substrate, solidifying the liquid on the substrate to form a solidified body, and melting the solidified body of the liquid on the substrate is provided. When solidifying the liquid, an internal pressure of the liquid on the substrate is varied.

公开(公告)号：US20250144677A1

公开(公告)日：2025-05-08

申请号：US19017085

申请日：2025-01-10

Applicant: Kioxia Corporation

Inventor： Minako INUKAI ,  Hideaki SAKURAI ,  Kyo OTSUBO ,  Tetsuo TAKEMOTO

IPC: B08B7/00 ,  H01L21/02 ,  H01L21/67

Abstract: According to one embodiment, a method including supplying a liquid onto a substrate, solidifying the liquid on the substrate to form a solidified body, and melting the solidified body of the liquid on the substrate is provided. When solidifying the liquid, an internal pressure of the liquid on the substrate is varied.

公开(公告)号：US20240280459A1

公开(公告)日：2024-08-22

申请号：US18582450

申请日：2024-02-20

Applicant: Kioxia Corporation

Inventor： Yusuke OSHIMA ,  Toshiyuki MURANAKA ,  Kyo OTSUBO ,  Ryutaro OTAHARA ,  Motonari TAKAHASHI ,  Hiroshi TOMITA ,  Kazuki BABA

IPC: G01N15/0205 ,  G01N1/40

CPC classification number: G01N15/0211 ,  G01N1/4077 ,  G01N2001/4088

Abstract: An evaluation apparatus according to an embodiment includes an evaluator including a column being capable of storing a liquid containing defects, the column being transparent, the defects containing a bubble, a first particle containing metal, and a second particle being different from the bubble and the first particle, an irradiator irradiating the liquid in the column with an irradiation light, an imager imaging a scattered light emitted from the defects by the irradiation light, an analyzer obtaining a diffusion coefficient of the defects from the imaged scattered light, a calculator calculating a particle size and a refractive index of the defects, a determiner determining whether the defects contain the bubble or the second particle, or the first particle; a filter filtering the liquid, the filter including an inlet and an outlet; a first pipe connecting the outlet of the filter and the evaluator.