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公开(公告)号：US20210278437A1
公开(公告)日：2021-09-09
申请号：US17008803
申请日：2020-09-01
Applicant: Kioxia Corporation
Inventor： See Kei LEE , Mitsuo KOIKE , Masumi SAITOH
Abstract: A manufacturing method of a probe according to the present embodiment is used to manufacture a probe for a scanning probe microscope. An insulating film is formed on the surface of a probe provided on a base. Metal ions are implanted into the insulating film. An electric field is applied to the insulating film to concentrate the metal ions in the insulating film at a tip of the probe and form a metallic filament in the insulating film.
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