公开(公告)号：US09106807B2

公开(公告)日：2015-08-11

申请号：US13757957

申请日：2013-02-04

申请人： KoCoS Automation GmbH

发明人： Axel Gaglin ,  Thomas Becker ,  Frank Richter ,  Bernd Gey

IPC分类号： G01N21/00 ,  H04N7/18 ,  G01N21/95 ,  G01N21/956 ,  G01B11/25

CPC分类号： H04N7/18 ,  G01B11/25 ,  G01N21/9503 ,  G01N21/956

摘要： A device for noncontact determination of the edge profile at a thin disk-shaped object helps determining the edge profile at semiconductor wafers in which exact image recording is not impaired by specular reflections of the edge profile. A plurality of light sources in the form of laser radiation sources each emitting a line-shaped light bundle are arranged so as to be coplanar in a common plane representing a measurement plane oriented orthogonal to a base plane of the object and are directed from different directions to a common intersection of the laser radiation sources in the edge region of the object. A light sheet is formed in the measurement plane and at least one base camera is directed in the base plane lateral to the measurement plane to capture scattered light proceeding from a light line generated by the light sheet when impinging the object edge region.

摘要翻译： 用于非接触确定薄盘形物体处的边缘轮廓的装置有助于确定半导体晶片处的边缘轮廓，其中精确图像记录不会受到边缘轮廓的镜面反射的损害。 排列成线状的光束的激光放射源的形式的多个光源配置成共同的平面，表示与物体的基面垂直取向的测定面，从不同方向 到物体的边缘区域中的激光辐射源的公共交叉点。 在测量平面中形成光片，并且至少一个基本照相机被引导到测量平面的横向的基准面中，以便在撞击物体边缘区域时捕获从由光片产生的光线进行的散射光。