公开(公告)号：US06456690B2

公开(公告)日：2002-09-24

申请号：US09739834

申请日：2000-12-20

申请人： Koichi Yamada ,  Takeshige Tanigaki

发明人： Koichi Yamada ,  Takeshige Tanigaki

IPC分类号： G21G400

CPC分类号： H01J35/14 ,  H01J2235/087

摘要： An X-ray generator, an X-ray inspector and an X-ray generation method capable of automatically focusing an energy beam, such as an electron beam for generating an X-ray, on a target are provided. The generation, inspector and the method have been developed by turning an attention on the fact that convergence conditions of an electron beam has a close relationship with a temperature on a surface of an X-ray tube target. The method comprises the steps of measuring the temperature changes at real time by a temperature sensor 14 and automatically controlling a current value of a focusing coil 6.

摘要翻译： 提供了能够将能量束（例如用于产生X射线的电子束）自动聚焦在目标上的X射线发生器，X射线检查器和X射线产生方法。 通过关注电子束的收敛条件与X射线管靶的表面上的温度有密切关系的事实，开发出了生成，检查和方法。 该方法包括通过温度传感器14实时测量温度变化并自动控制聚焦线圈6的电流值的步骤。

公开(公告)号：US5350919A

公开(公告)日：1994-09-27

申请号：US84476

申请日：1993-07-01

申请人： Takashi Hirano ,  Takeshige Tanigaki ,  Hideki Kimura

发明人： Takashi Hirano ,  Takeshige Tanigaki ,  Hideki Kimura

IPC分类号： G01N23/225 ,  H01J49/14 ,  H01J49/26

CPC分类号： H01J49/142 ,  G01N23/2258

摘要： A quantitative analyzing method by a secondary ion mass spectrometric method comprises the steps of: quantitatively analyzing the target element by the secondary ion mass spectrometric method with respect to a plurality of ion-implanted standard samples, while changing an implantation energy; and correcting a secondary ion intensity which is obtained with respect to the target element in the surface layer of the sample to be analyzed by the secondary ion mass spectrometric method on the basis of the results of the quantitative analyses with respect to the plurality of standard samples. A secondary ion mass spectrometer having such a function is also disclosed.

摘要翻译： 通过二次离子质谱法的定量分析方法包括以下步骤：在改变植入能量的同时，通过二次离子质谱法相对于多个离子注入的标准样品定量分析目标元素; 并且根据关于多个标准样品的定量分析的结果，通过二次离子质谱法来校正相对于待分析样品的表层中的目标元素获得的二次离子强度 。 还公开了具有这种功能的二次离子质谱仪。

公开(公告)号：US5637870A

公开(公告)日：1997-06-10

申请号：US575592

申请日：1995-12-20

申请人： Takeshige Tanigaki

发明人： Takeshige Tanigaki

IPC分类号： G01N23/225 ,  G01Q30/20 ,  H01J49/14 ,  H01J37/28 ,  B01D59/44 ,  H01J49/00

CPC分类号： H01J49/142 ,  G01N23/2258

摘要： A method of analysis of the distribution of concentration of a substrate including: a step of preparing a plurality of types of sample substrates whose distribution of concentration is to be analyzed; a step of forming on the surfaces of those substrates dummy films of a material different from the substrates or etching the surfaces of the plurality of sample substrates to different depths; in the case of the dummy films; a step of introducing into the sample substrates specific impurities from the direction of the dummy films under substantially identical conditions and then a step of removing the dummy films; a step of performing mass analysis from the sides of the sample substrates; and a step of sequentially calculating the difference in the results of the mass analysis among the sample substrates.

摘要翻译： 一种分析基板浓度分布的方法，包括：准备要分析浓度分布的多种样品基板的步骤; 在这些基板的表面上形成与基板不同的材料的虚拟膜或者将多个样品基板的表面蚀刻到不同深度的步骤; 在虚拟膜的情况下; 在基本相同的条件下，从虚拟膜的方向向样品基板引入特定杂质，然后除去虚拟膜的步骤; 从样品基板的侧面进行质量分析的步骤; 以及顺序地计算样本基板之间的质量分析结果的差异的步骤。