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公开(公告)号：US08000178B2
公开(公告)日：2011-08-16
申请号：US12260639
申请日：2008-10-29
申请人： Koji Shimazawa , Eiji Komura , Yasuhiro Ito , Seiichi Takayama , Satoshi Tomikawa , Daisuke Miyauchi , Kosuke Tanaka
发明人： Koji Shimazawa , Eiji Komura , Yasuhiro Ito , Seiichi Takayama , Satoshi Tomikawa , Daisuke Miyauchi , Kosuke Tanaka
IPC分类号： G11B11/00
CPC分类号： G11B5/314 , B82Y20/00 , G02B6/1226 , G11B5/4866 , G11B2005/001 , G11B2005/0021
摘要： Provided is a surface plasmon antenna that can be set so that the emitting position on the end surface of the plasmon antenna where near-field light is emitted is located sufficiently close to the end of a magnetic pole. The surface plasmon antenna comprises an edge having a portion for coupling with a light in a surface plasmon mode. The edge is provided for propagating surface plasmon excited by the light and extends from the portion to a near-field light generating end surface that emits near-field light. The edge for propagating surface plasmon is a very narrow propagation region. Therefore, the near-field light generating end surface, which appears as a polished surface processed through polishing in the manufacturing of the plasmon antenna, can be made a shape with a very small size, and further can be set so that surface plasmon propagates to reach the end surface reliably.
摘要翻译： 提供了一种表面等离子体激元天线，其可以被设置为使得发射近场光的等离子体激元天线的端面上的发射位置足够靠近磁极的端部。 表面等离子体激元天线包括具有用于与表面等离子体激元模式的光耦合的部分的边缘。 该边缘用于传播由光激发的表面等离子体激元，并从该部分延伸到发射近场光的近场光产生端面。 传播表面等离子体激元的边缘是非常窄的传播区域。 因此，通过在等离子体激元天线的制造中通过研磨处理的抛光面的近场光产生端面可以形成为非常小的形状，并且还可以将表面等离子体激元传播到 可靠地到达端面。
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2.发明授权Near-field light generating element and heat-assisted magnetic recording head utilizing surface plasmon mode 有权近场光产生元件和利用表面等离激元模式的热辅助磁记录头公开(公告)号：US07855937B2
公开(公告)日：2010-12-21
申请号：US12205484
申请日：2008-09-05
申请人： Koji Shimazawa , Eiji Komura , Yasuhiro Ito , Seiichi Takayama , Satoshi Tomikawa , Daisuke Miyauchi , Kosuke Tanaka
发明人： Koji Shimazawa , Eiji Komura , Yasuhiro Ito , Seiichi Takayama , Satoshi Tomikawa , Daisuke Miyauchi , Kosuke Tanaka
IPC分类号： G11B11/00
CPC分类号： G11B5/314 , G11B5/4866 , G11B11/10536 , G11B11/1058 , G11B2005/0005 , G11B2005/0021
摘要： Provided is a near-field light generating element capable of avoiding excessive temperature rise, which comprises a waveguide and a near-field light generating layer. The layer comprises: a propagation surface on which surface plasmon excited by the light propagates; and a near-field light generating end at which near-field light is generated. The end is one end of the propagation surface. And a portion of the side surface of the waveguide is opposed to a portion of the propagation surface of the near-field light generating layer with a predetermined spacing so that the light propagating through the waveguide is coupled with the near-field light generating layer in a surface plasmon mode. The near-field light generating layer is preferably tapered toward the near-field light generating end.
摘要翻译： 本发明提供能够避免温度过高的近场光发生元件，其包括波导管和近场光产生层。 该层包括：由光激发的表面等离子体激发的传播表面; 以及产生近场光的近场光产生端。 最后是传播表面的一端。 并且波导的侧面的一部分与近场光产生层的传播表面的一部分以预定的间隔相对，使得通过波导传播的光与近场光产生层耦合 表面等离子体激元模式。 近场光产生层优选地朝向近场光产生端逐渐变细。
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3.发明申请SURFACE PLASMON ANTENNA WITH PROPAGATION EDGE AND NEAR-FIELD LIGHT GENERATING ELEMENT 有权具有传播边缘和近场光生成元件的表面等离子体天线公开(公告)号：US20100103553A1
公开(公告)日：2010-04-29
申请号：US12260639
申请日：2008-10-29
申请人： Koji Shimazawa , Eiji Komura , Yasuhiro Ito , Seiichi Takayama , Satoshi Tomikawa , Daisuke Miyauchi , Kosuke Tanaka
发明人： Koji Shimazawa , Eiji Komura , Yasuhiro Ito , Seiichi Takayama , Satoshi Tomikawa , Daisuke Miyauchi , Kosuke Tanaka
CPC分类号： G11B5/314 , B82Y20/00 , G02B6/1226 , G11B5/4866 , G11B2005/001 , G11B2005/0021
摘要： Provided is a surface plasmon antenna that can be set so that the emitting position on the end surface of the plasmon antenna where near-field light is emitted is located sufficiently close to the end of a magnetic pole. The surface plasmon antenna comprises an edge having a portion for coupling with a light in a surface plasmon mode. The edge is provided for propagating surface plasmon excited by the light and extends from the portion to a near-field light generating end surface that emits near-field light. The edge for propagating surface plasmon is a very narrow propagation region. Therefore, the near-field light generating end surface, which appears as a polished surface processed through polishing in the manufacturing of the plasmon antenna, can be made a shape with a very small size, and further can be set so that surface plasmon propagates to reach the end surface reliably.
摘要翻译： 提供了一种表面等离子体激元天线，其可以被设置为使得发射近场光的等离子体激元天线的端面上的发射位置足够靠近磁极的端部。 表面等离子体激元天线包括具有用于与表面等离子体激元模式的光耦合的部分的边缘。 该边缘用于传播由光激发的表面等离子体激元，并从该部分延伸到发射近场光的近场光产生端面。 传播表面等离子体激元的边缘是非常窄的传播区域。 因此，通过在等离子体激元天线的制造中通过研磨处理的抛光面的近场光产生端面可以形成为非常小的形状，并且还可以将表面等离子体激元传播到 可靠地到达端面。
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公开(公告)号：US07821732B2
公开(公告)日：2010-10-26
申请号：US12237810
申请日：2008-09-25
IPC分类号： G11B5/02
CPC分类号： G11B5/314 , G11B5/4866 , G11B2005/001 , G11B2005/0021
摘要： A thermally assisted magnetic head according to the present invention includes: a medium-facing surface, a main magnetic pole provided on the medium-facing surface, and a plasmon antenna provided on the medium-facing surface in the vicinity of the main magnetic pole, wherein the plasmon antenna is shaped as a triangular flat plate having first, second and third corners, such that the distance from the first corner to the main magnetic pole is shorter than the distance from the second corner to the main magnetic pole and the distance from the third corner to the main magnetic pole, and the interior angle α of the first corner, the interior angle β of the second corner and the interior angle γ of the third corner satisfy relationships α
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5.发明授权Near-field light generating device including surface plasmon generating element 有权近场光产生装置包括表面等离子体激元产生元件公开(公告)号：US08116172B2
公开(公告)日：2012-02-14
申请号：US12320930
申请日：2009-02-09
申请人： Yasuhiro Ito , Seiichi Takayama , Eiji Komura , Koji Shimazawa , Satoshi Tomikawa , Shuichi Okawa
发明人： Yasuhiro Ito , Seiichi Takayama , Eiji Komura , Koji Shimazawa , Satoshi Tomikawa , Shuichi Okawa
IPC分类号： G11B11/00
CPC分类号： G11B5/314 , G11B5/6088 , G11B7/122 , G11B7/1387 , G11B11/10534 , G11B11/1058 , G11B2005/0005 , G11B2005/0021
摘要： A near-field light generating device includes: a base having a top surface; a waveguide that allows laser light to propagate therethrough and is disposed above the top surface of the base; and a surface plasmon generating element that is disposed above the top surface of the base so as to adjoin the waveguide in a direction parallel to the top surface of the base. The waveguide has a side surface that faces the surface plasmon generating element. The surface plasmon generating element includes: a coupling part that is opposed to a part of the side surface of the waveguide with spacing therebetween and causes excitation of a surface plasmon by coupling with evanescent light occurring from the part of the side surface; and a near-field light generating part that generates near-field light based on the surface plasmon excited at the coupling part.
摘要翻译： 近场光产生装置包括：具有顶表面的底座; 波导，其允许激光通过其传播并设置在基座的顶表面上方; 以及表面等离子体激元产生元件，其设置在所述基座的顶表面之上，以便在与所述基座的顶表面平行的方向上邻接所述波导。 波导具有面向表面等离子体激元产生元件的侧表面。 表面等离子体发生元件包括：耦合部分，其与波导的侧表面的一部分相对，并且通过与从侧表面的部分发生的渐逝光耦合而引起表面等离子体激发; 以及基于在耦合部激发的表面等离子体激元产生近场光的近场光产生部。
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6.发明申请Near-field light generating device including surface plasmon generating element 有权近场光产生装置包括表面等离子体激元产生元件公开(公告)号：US20100202256A1
公开(公告)日：2010-08-12
申请号：US12320930
申请日：2009-02-09
申请人： Yasuhiro Ito , Seiichi Takayama , Eiji Komura , Koji Shimazawa , Satoshi Tomikawa , Shuichi Okawa
发明人： Yasuhiro Ito , Seiichi Takayama , Eiji Komura , Koji Shimazawa , Satoshi Tomikawa , Shuichi Okawa
CPC分类号： G11B5/314 , G11B5/6088 , G11B7/122 , G11B7/1387 , G11B11/10534 , G11B11/1058 , G11B2005/0005 , G11B2005/0021
摘要： A near-field light generating device includes: a base having a top surface; a waveguide that allows laser light to propagate therethrough and is disposed above the top surface of the base; and a surface plasmon generating element that is disposed above the top surface of the base so as to adjoin the waveguide in a direction parallel to the top surface of the base. The waveguide has a side surface that faces the surface plasmon generating element. The surface plasmon generating element includes: a coupling part that is opposed to a part of the side surface of the waveguide with spacing therebetween and causes excitation of a surface plasmon by coupling with evanescent light occurring from the part of the side surface; and a near-field light generating part that generates near-field light based on the surface plasmon excited at the coupling part.
摘要翻译： 近场光产生装置包括：具有顶表面的底座; 波导，其允许激光通过其传播并设置在基座的顶表面上方; 以及表面等离子体激元产生元件，其设置在所述基座的顶表面之上，以便在与所述基座的顶表面平行的方向上邻接所述波导。 波导具有面向表面等离子体激元产生元件的侧表面。 表面等离子体发生元件包括：耦合部分，其与波导的侧表面的一部分相对，并且通过与从侧表面的部分发生的渐逝光耦合而引起表面等离子体激发; 以及基于在耦合部激发的表面等离子体激元产生近场光的近场光产生部。
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公开(公告)号：US08213272B2
公开(公告)日：2012-07-03
申请号：US12482851
申请日：2009-06-11
IPC分类号： G11B11/00
CPC分类号： G02B6/1228 , G02B2006/12078 , G11B5/3133 , G11B5/6088 , G11B2005/0005 , G11B2005/0021
摘要： A waveguide is provided, in which the optical coupling efficiency to a light source is sufficiently high, and the light-emitting spot center is stably provided at the intended position. The waveguide comprises a multilayered structure in which refractive indexes of layers having a surface contact with each other are different from each other. The multilayered structure is divided into a plurality of groups, and the length from the light-receiving end surface to the light-emitting end surface of one group is different from that of the neighboring group, and the protruded light-emitting end surface of the first group defined as a group that has the largest length includes a center of the light-emitting spot. In this waveguide, the state in which the light-emitting spot center is positioned within the light-emitting end surface does not easily be changed, even when the light-receiving spot center within the light-receiving end surface is rather displaced.
摘要翻译： 提供了一种波导，其中对光源的光耦合效率足够高，并且发光光点中心稳定地设置在预期位置。 波导包括彼此具有表面接触的层的折射率彼此不同的多层结构。 多层结构被分成多个组，从一个组的受光端面到发光端面的长度不同于相邻组的发光端面的突出的发光端面 被定义为具有最大长度的组的第一组包括发光点的中心。 在该波导中，发光光点中心位于发光端面内的状态也不容易改变，即使光接收端面内的光接收点中心相当偏离。
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公开(公告)号：US20100315736A1
公开(公告)日：2010-12-16
申请号：US12482851
申请日：2009-06-11
CPC分类号： G02B6/1228 , G02B2006/12078 , G11B5/3133 , G11B5/6088 , G11B2005/0005 , G11B2005/0021
摘要： A waveguide is provided, in which the optical coupling efficiency to a light source is sufficiently high, and the light-emitting spot center is stably provided at the intended position. The waveguide comprises a multilayered structure in which refractive indexes of layers having a surface contact with each other are different from each other. The multilayered structure is divided into a plurality of groups, and the length from the light-receiving end surface to the light-emitting end surface of one group is different from that of the neighboring group, and the protruded light-emitting end surface of the first group defined as a group that has the largest length includes a center of the light-emitting spot. In this waveguide, the state in which the light-emitting spot center is positioned within the light-emitting end surface does not easily be changed, even when the light-receiving spot center within the light-receiving end surface is rather displaced.
摘要翻译： 提供了一种波导，其中对光源的光耦合效率足够高，并且发光光点中心稳定地设置在预期位置。 波导包括彼此具有表面接触的层的折射率彼此不同的多层结构。 多层结构被分成多个组，从一个组的受光端面到发光端面的长度不同于相邻组的发光端面的突出的发光端面 被定义为具有最大长度的组的第一组包括发光点的中心。 在该波导中，发光光点中心位于发光端面内的状态也不容易改变，即使光接收端面内的光接收点中心相当偏离。
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9.发明授权Thermally assisted magnetic head having an asymmetric plasmon antenna and manufacturing method thereof 有权具有不对称等离子体激元天线的热辅助磁头及其制造方法公开(公告)号：US07936531B2
公开(公告)日：2011-05-03
申请号：US12267126
申请日：2008-11-07
CPC分类号： G11B5/314 , G11B5/3163 , G11B5/6088 , G11B2005/0005 , G11B2005/0021
摘要： The thermally assisted magnetic head according to the present invention comprises a medium-facing surface, a main magnetic pole provided on the medium-facing surface, and a plasmon antenna provided on the medium-facing surface, in the vicinity of the main magnetic pole. The shape of the plasmon antenna, as viewed from a direction perpendicular to the medium-facing surface, is a triangle having first, second and third corners, the plasmon antenna being shaped as a flat plate the thickness direction of which is perpendicular to the medium-facing surface. The distance from the first corner to the main magnetic pole is shorter than the distance from the second corner to the main magnetic pole and the distance from the third corner to the main magnetic pole. The second corner and the third corner are rounded.
摘要翻译： 根据本发明的热辅助磁头包括介于中间的表面，设置在介质中的表面上的主磁极和设置在主磁极附近的面向中的表面上的等离子体激元。 等离子体激元天线的形状，从垂直于介质相对表面的方向观察，是具有第一，第二和第三角的三角形，等离子体激元天线成形为平板，其厚度方向垂直于介质 表面。 从第一角到主磁极的距离比从第二角到主磁极的距离以及从第三角到主磁极的距离短。 第二个角落和第三个角落是圆形的。
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公开(公告)号：US08223611B2
公开(公告)日：2012-07-17
申请号：US12328232
申请日：2008-12-04
CPC分类号： G11B5/3163 , G11B5/314 , G11B5/6088 , G11B2005/0005 , G11B2005/0021
摘要： Provided is a method for forming a near-field light generating element, which is capable of sufficiently suppressing the unevenness of a waveguide surface and the distortion within the waveguide. The forming method comprises the steps of: forming a first etching stopper layer on a lower waveguide layer; forming a second etching stopper layer; forming, on the second etching stopper layer, a plasmon antenna material layer; performing etching with the second etching stopper layer used as a stopper, to form a first side surface of plasmon antenna; forming a side-surface protecting mask so as to cover the first side surface; and performing etching with the first and second etching stopper layers used as stoppers, to form the second side surface. By providing the first and second etching stopper layer, over-etching can be prevented even when each etching process takes enough etch time, which allows easy management of etching endpoints.
摘要翻译： 本发明提供一种形成近场光产生元件的方法，其能够充分地抑制波导表面的不均匀性和波导内的变形。 成形方法包括以下步骤：在下波导层上形成第一蚀刻阻挡层; 形成第二蚀刻停止层; 在第二蚀刻停止层上形成等离子体激元天线材料层; 用作为阻挡件的第二蚀刻阻挡层进行蚀刻，以形成等离子体激元的第一侧表面; 形成侧面保护罩以覆盖第一侧面; 并且利用用作塞子的第一和第二蚀刻阻挡层进行蚀刻，以形成第二侧表面。 通过设置第一和第二蚀刻停止层，即使每个蚀刻工艺都需要足够的蚀刻时间，也可以防止过蚀刻，这允许蚀刻端点的容易管理。
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