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    METHOD OF FORMING HIGH-QUALITY GRAPHENE USING CONTINUOUS HEAT TREATMENT CHEMICAL VAPOR DEPOSITION
    1.
    发明申请
    METHOD OF FORMING HIGH-QUALITY GRAPHENE USING CONTINUOUS HEAT TREATMENT CHEMICAL VAPOR DEPOSITION 审中-公开
    使用连续热处理形成高质量石墨化学蒸气沉积的方法

    公开(公告)号：US20140079623A1

    公开(公告)日：2014-03-20

    申请号：US14114689

    申请日：2012-03-15

    Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

    Inventor： Seok-Woo Jeon ,  Jin-Sup Lee ,  Se-Ran Oh

    IPC: C01B31/04

    CPC classification number: C01B32/186 ,  B82Y30/00 ,  B82Y40/00 ,  C23C16/26 ,  C23C16/46

    Abstract: Provided is a method of forming graphene having an increased grain size. In the method, a substrate including a catalyst layer formed of a transition metal is loaded into a chamber and a gaseous carbon source is supplied into the chamber. A continuous heat treatment in which the catalyst layer is locally heated while moving a heated area of the catalyst layer is performed to dissolve a carbon component in the catalyst layer and extract graphene on a surface of the catalyst layer from the dissolved carbon component.

    Abstract translation: 提供了一种形成具有增加的晶粒尺寸的石墨烯的方法。 在该方法中，将由过渡金属形成的催化剂层的基板装载到室内，将气态碳源供给到室内。 进行催化剂层在催化剂层的加热区域移动时局部加热的连续热处理，以使碳成分溶解在催化剂层中，并从溶解的碳成分在催化剂层的表面上提取石墨烯。

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