公开(公告)号：US08877538B2

公开(公告)日：2014-11-04

申请号：US13686375

申请日：2012-11-27

Applicant: Korea Institute of Science and Technology

Inventor： Jin Seok Kim ,  Jun-Kyo Francis Suh ,  Sung Chul Kang ,  Jeong Hoon Lee

IPC: H01L21/00 ,  A61B5/03 ,  H01L29/66 ,  H01L29/84 ,  B82Y15/00 ,  G01L7/08 ,  B82Y99/00

CPC classification number: H01L29/84 ,  A61B5/031 ,  A61B2562/0247 ,  A61B2562/046 ,  B81B3/0078 ,  B81B2201/0264 ,  B81C1/00206 ,  B82Y15/00 ,  B82Y99/00 ,  G01L1/16 ,  G01L1/165 ,  G01L7/08 ,  G01L9/0047 ,  G01L9/0098 ,  H01L29/66007 ,  Y10S977/90 ,  Y10S977/936 ,  Y10S977/956

Abstract: The present disclosure relates to a pressure sensor having a nanostructure and a method for manufacturing the same. More particularly, it relates to a pressure sensor having a nanostructure attached on the surface of the pressure sensor and thus having improved sensor response time and sensitivity and a method for manufacturing the same. The pressure sensor according to the present disclosure having a nanostructure includes: a substrate; a source electrode and a drain electrode arranged on the substrate with a predetermined spacing; a flexible sensor layer disposed on the source electrode and the drain electrode; and a nanostructure attached on the surface of the flexible sensor layer and having nanosized wrinkles.

Abstract translation: 本发明涉及具有纳米结构的压力传感器及其制造方法。 更具体地说，本发明涉及一种压力传感器，其具有附着在压力传感器表面上的纳米结构，因此具有改进的传感器响应时间和灵敏度及其制造方法。 具有纳米结构的根据本公开的压力传感器包括：基底; 以预定间隔布置在基板上的源电极和漏电极; 设置在所述源电极和所述漏电极上的柔性传感器层; 以及附着在柔性传感器层的表面上并具有纳米级皱纹的纳米结构。