公开(公告)号：US20030032293A1

公开(公告)日：2003-02-13

申请号：US10209866

申请日：2002-08-02

申请人： Korean Institute of Science And Technology

发明人： Tae-Song Kim ,  Hyung-Joon Kim ,  Yong-Bum Kim

IPC分类号： H01L021/311

CPC分类号： G01N29/036 ,  B81B3/0021 ,  B81B2201/0214 ,  B81B2201/032 ,  B81B2203/0118 ,  B81C1/0015 ,  G01N2291/0256

摘要： A high-sensitive micro cantilever sensor and a method for fabricating the same which is able to reduce size of a system greatly using a functional thin film has a structure in which an upper substrate comprising one or two piezoelectric cells including a cantilever, a piezoelectric layer formed on lower or upper surface of the cantilever, and electrodes formed on upper and lower surfaces of the piezoelectric layer is attached to a lower substrate including a cavity of an even depth by contacting the lower surface of the piezoelectric cell on the upper substrate with the cavity surface of the lower substrate.

摘要翻译： 使用功能性薄膜能够大大减小系统尺寸的高灵敏度微悬臂式传感器及其制造方法具有如下结构：其中，包括一个或两个压电单元的上基板包括悬臂，压电层 形成在悬臂的下表面或上表面上，并且形成在压电层的上表面和下表面上的电极通过使上基板上的压电单元的下表面与 下基板的腔表面。