公开(公告)号：US20120292820A1

公开(公告)日：2012-11-22

申请号：US13501150

申请日：2010-11-02

申请人： Kristian Smistrup ,  Tobias Hedegaard ,  Ole Hansen

发明人： Kristian Smistrup ,  Tobias Hedegaard ,  Ole Hansen

IPC分类号： B29C59/02 ,  B82Y30/00

CPC分类号： G03F9/7053 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F9/7042

摘要： The invention relates to an imprinting device for imprinting nano/micro structures. The imprinting device comprises a second expandable cavity constituted in part by a membrane of the stamp. The membrane is flexible and formed in such a way so that when fluid is pumped into the expandable cavity then the membrane expands towards the imprintable substrate and imprints the substrate. The imprinting device is further provided with a force provider, alternatively a first expandable cavity, for forcing a contact part of the substrate to make contact with a matching contact part of the stamp.

摘要翻译： 本发明涉及用于压印纳米/微结构的压印装置。 压印装置包括由印模的膜部分构成的第二可膨胀腔。 膜是柔性的并且以这样的方式形成，使得当流体被泵送到可膨胀腔中时，膜朝向可压印基底膨胀并且压印基底。 压印装置还设置有力提供者，或者第一可扩张腔，用于迫使衬底的接触部分与印模的匹配接触部分接触。