公开(公告)号：US11642706B2

公开(公告)日：2023-05-09

申请号：US17168572

申请日：2021-02-05

Applicant: KunShan Go-Visionox Opto-Electronics Co., Ltd

Inventor： Qiangqiang Li ,  Baoyou Wang ,  Ce Chen ,  Gang Fang ,  Bolin Gan

IPC: B08B5/02 ,  B08B13/00

CPC classification number: B08B5/02 ,  B08B13/00

Abstract: A cleaning device. The cleaning device includes: a base body, a spray head, and a main worktable and a first auxiliary worktable that are provided on the base body; a nozzle of the spray head is provided facing a mounting surface of the main worktable, and the spray head is configured to move in a preset direction vertical to the mounting surface to clean a to-be-cleaned panel on the mounting surface; the first auxiliary worktable is located at one end of the main worktable along the preset direction, and a first surface of the first auxiliary worktable facing the spray head is parallel to the mounting surface, and the first surface is higher than or flush with the mounting surface.

公开(公告)号：US12071683B2

公开(公告)日：2024-08-27

申请号：US17537716

申请日：2021-11-30

Applicant: Kunshan Go-Visionox Opto-Electronics Co., Ltd.

Inventor： Haitao Chen ,  Qiangqiang Li ,  Bin Xue ,  Xiaogang Xin ,  Fei Sun ,  Zaifeng Qiu

IPC: H01L21/683 ,  C23C14/50

CPC classification number: C23C14/50 ,  H01L21/683 ,  Y10T29/5397

Abstract: The present disclosure relates to a clamping device configured to clamp a substrate. The clamping device includes a clamping plate and a flattening mechanism. The flattening mechanism includes at least one adjusting member configured to operably act on the clamping plate to apply a force to the clamping plate to flatten the clamping plate.