Method of fabricating ink jet head and ink jet head fabricated thereby
    1.
    发明授权
    Method of fabricating ink jet head and ink jet head fabricated thereby 有权
    制造由此制造的喷墨头和喷墨头的方法

    公开(公告)号:US07517051B2

    公开(公告)日:2009-04-14

    申请号:US11035894

    申请日:2005-01-18

    IPC分类号: B41J2/16

    摘要: A method of fabricating an ink jet head and an ink jet head fabricated thereby. The method includes preparing a substrate having a flow path region, a flow path structure region to define the flow path region, and a pad region disposed at edge portions of the substrate. At least one pressure-generating element to eject ink is formed on the substrate of the flow path region. An inserting material layer is formed on an entire surface of the substrate having the at least one pressure-generating element. The inserting material layer is patterned to form an inserting layer on the flow path structure region. A mold layer is formed on the substrate having the inserting layer to cover the flow path region. Next, a nozzle material layer is formed on the entire surface of the substrate having the inserting layer and the mold layer. The nozzle material layer is patterned to form a nozzle layer covering the inserting layer and the mold layer and having at least one nozzle passing through the nozzle material layer on the mold layer to correspond to the at least one pressure-generating element.

    摘要翻译: 一种制造喷墨头的方法和由此制造的喷墨头。 该方法包括制备具有流路区域的基板,限定流路区域的流路结构区域和设置在基板的边缘部分处的焊盘区域。 在流路区域的基板上形成至少一个用于喷射墨的压力产生元件。 在具有至少一个压力产生元件的基板的整个表面上形成插入材料层。 将插入材料层图案化以在流路结构区域上形成插入层。 在具有插入层的基板上形成覆盖流路区域的模层。 接下来,在具有插入层和模制层的基板的整个表面上形成喷嘴材料层。 图案化喷嘴材料层以形成覆盖插入层和模具层的喷嘴层,并且具有通过模层上的喷嘴材料层的至少一个喷嘴以对应于至少一个产生压力的元件。

    Method of fabricating ink jet head and ink jet head fabricated thereby
    2.
    发明申请
    Method of fabricating ink jet head and ink jet head fabricated thereby 有权
    制造由此制造的喷墨头和喷墨头的方法

    公开(公告)号:US20050253900A1

    公开(公告)日:2005-11-17

    申请号:US11035894

    申请日:2005-01-18

    IPC分类号: B41J2/045 B41J2/05 B41J2/16

    摘要: A method of fabricating an ink jet head and an ink jet head fabricated thereby. The method includes preparing a substrate having a flow path region, a flow path structure region to define the flow path region, and a pad region disposed at edge portions of the substrate. At least one pressure-generating element to eject ink is formed on the substrate of the flow path region. An inserting material layer is formed on an entire surface of the substrate having the at least one pressure-generating element. The inserting material layer is patterned to form an inserting layer on the flow path structure region. A mold layer is formed on the substrate having the inserting layer to cover the flow path region. Next, a nozzle material layer is formed on the entire surface of the substrate having the inserting layer and the mold layer. The nozzle material layer is patterned to form a nozzle layer covering the inserting layer and the mold layer and having at least one nozzle passing through the nozzle material layer on the mold layer to correspond to the at least one pressure-generating element.

    摘要翻译: 一种制造喷墨头的方法和由此制造的喷墨头。 该方法包括制备具有流路区域的基板,限定流路区域的流路结构区域和设置在基板的边缘部分处的焊盘区域。 在流路区域的基板上形成至少一个用于喷射墨的压力产生元件。 在具有至少一个压力产生元件的基板的整个表面上形成插入材料层。 将插入材料层图案化以在流路结构区域上形成插入层。 在具有插入层的基板上形成覆盖流路区域的模层。 接下来,在具有插入层和模制层的基板的整个表面上形成喷嘴材料层。 图案化喷嘴材料层以形成覆盖插入层和模具层的喷嘴层,并且具有通过模层上的喷嘴材料层的至少一个喷嘴以对应于至少一个产生压力的元件。

    Inkjet printhead and method of manufacturing the same
    3.
    发明授权
    Inkjet printhead and method of manufacturing the same 失效
    喷墨打印头及其制造方法

    公开(公告)号:US07607759B2

    公开(公告)日:2009-10-27

    申请号:US11379291

    申请日:2006-04-19

    IPC分类号: B41J2/05

    摘要: An inkjet printhead and a method of manufacturing the same. In the inkjet printhead, a substrate includes an ink chamber formed in a top surface to contain ink to be ejected, an ink feedhole formed in a bottom surface to supply the ink to the ink chamber, and a restrictor formed between the ink chamber and the ink feedhole to connect the ink chamber and the ink feedhole. A plurality of passivation layers are formed on the substrate. A heater and a conductor to apply a current to the heater are formed between the passivation layers. A heat transfer layer is formed on the passivation layers in a predetermined shape. An epoxy nozzle layer is formed to cover the passivation layers and the heat transfer layer. The epoxy nozzle layer is formed with a nozzle that is connected to the ink chamber.

    摘要翻译: 喷墨打印头及其制造方法。 在喷墨打印头中,基板包括形成在顶表面中以容纳要喷射的墨的墨室,形成在底表面中以将油墨供应到墨室的墨供给孔以及形成在墨室和墨室之间的限流器 墨水供墨孔连接墨水室和墨水供墨孔。 在基板上形成多个钝化层。 在钝化层之间形成加热器和向加热器施加电流的导体。 在钝化层上形成预定形状的传热层。 形成环氧喷嘴层以覆盖钝化层和传热层。 环氧喷嘴层形成有连接到墨室的喷嘴。

    Thermal inkjet printhead apparatus to regulate pressure exerted by bubbles in an ink chamber and method thereof
    6.
    发明授权
    Thermal inkjet printhead apparatus to regulate pressure exerted by bubbles in an ink chamber and method thereof 失效
    用于调节墨水室中由气泡施加的压力的热喷墨打印头装置及其方法

    公开(公告)号:US07470001B2

    公开(公告)日:2008-12-30

    申请号:US11311652

    申请日:2005-12-20

    IPC分类号: B41J2/05

    摘要: A thermal inkjet printhead. The inkjet printhead includes a heater that heats an ink in an ink chamber to generate a bubble, conductors to supply an electric current to the heater, and a bubble separation wall protuberantly formed on the heater to protect the heater by inducing an extermination position of a bubble when the bubble generated by the heater shrinks and dissipates.

    摘要翻译: 热喷墨打印头。 喷墨打印头包括加热墨室中的墨以产生气泡的加热器,向加热器提供电流的导体和突出地形成在加热器上的气泡隔离壁,以通过诱导加热器的灭绝位置来保护加热器 当加热器产生的气泡收缩并消散时,气泡。

    Method of manufacturing inkjet printhead using crosslinked polymer
    7.
    发明申请
    Method of manufacturing inkjet printhead using crosslinked polymer 审中-公开
    使用交联聚合物制造喷墨打印头的方法

    公开(公告)号:US20060262157A1

    公开(公告)日:2006-11-23

    申请号:US11415198

    申请日:2006-05-02

    IPC分类号: B41J2/015 G01D15/00

    摘要: A method of manufacturing an inkjet printhead includes preparing a substrate having a heater to hear ink and an electrode to supply current to the heater, applying a crosslinked polymer resist composition to the substrate having the heater and the electrode and patterning the same, and forming a passage forming layer that surrounds an ink passage, patterning the substrate having the passage forming layer by photolithography at least twice, and forming a sacrificial layer having a planarized top surface in a space surrounded by the passage forming layer, applying the crosslinked polymer resist composition to the passage forming layer and the sacrificial layer and patterning the same, and forming a nozzle layer having a nozzle, etching the substrate from the bottom surface thereof to be perforated, and forming an ink supply hole, and removing the sacrificial layer, wherein the crosslinked polymer resist composition comprises a precursor polymer that is a phenolic novolak resin having glycidyl ether functional groups on repeating monomer units.

    摘要翻译: 一种制造喷墨打印头的方法包括:制备具有加热器以吸收油墨的基板和向加热器供应电流的电极,将交联聚合物抗蚀剂组合物施加到具有加热器和电极的基板上,并对其进行图案化, 包围油墨通道的通道形成层,通过光刻法将具有通道形成层的基板图案化至少两次,并且在由通道形成层包围的空间中形成具有平坦化顶表面的牺牲层,将交联聚合物抗蚀剂组合物施加到 通道形成层和牺牲层并对其进行图案化,并形成具有喷嘴的喷嘴层,从其底面蚀刻基板以进行穿孔,形成供墨孔,并除去牺牲层,其中交联 聚合物抗蚀剂组合物包含具有gly的酚醛清漆树脂的前体聚合物 重复单体单元上的椰子醚官能团。

    Ink-jet printhead and method of manufacturing the same
    8.
    发明授权
    Ink-jet printhead and method of manufacturing the same 失效
    喷墨打印头及其制造方法

    公开(公告)号:US06880919B2

    公开(公告)日:2005-04-19

    申请号:US10404423

    申请日:2003-04-02

    摘要: An ink-jet printhead includes a substrate on which an ink chamber is formed, and a nozzle plate to cover the ink chamber, having a nozzle through which ink droplets are ejected from the ink chamber, and formed of a stack of a multi-layer insulating layer. The ink-jet printhead also includes a heater buried in the nozzle plate to surround the nozzle, an interconnection layer buried in the nozzle plate to electrically connect to the heater, and a coating layer formed of photoresist on the nozzle plate and having a through hole-type droplet guide connected to the nozzle of the nozzle plate. The droplet guide is formed through the coating layer, which has a sufficient thickness, and enables a meniscus of ink to be rapidly restored and stabilized, and ink droplets to be ejected at a high speed and high frequency. Also, the ink-jet printhead has improved resistance to abrasion and chemicals.

    摘要翻译: 喷墨打印头包括其上形成有墨水室的基板和用于覆盖墨水室的喷嘴板,具有喷嘴,墨滴通过喷嘴从墨水室喷出,并且由多层 绝缘层。 喷墨打印头还包括埋在喷嘴板中以围绕喷嘴的加热器,埋在喷嘴板中以电连接到加热器的互连层,以及在喷嘴板上由光致抗蚀剂形成的涂层,并且具有通孔 型液滴引导件连接到喷嘴板的喷嘴。 液滴引导件通过具有足够厚度的涂层形成,并且能够快速恢复和稳定墨水的弯液面,并且以高速和高频喷射墨滴。 此外,喷墨打印头具有改善的耐磨性和耐化学性。

    Ink-jet print head and method thereof
    9.
    发明授权
    Ink-jet print head and method thereof 失效
    喷墨打印头及其方法

    公开(公告)号:US06561626B1

    公开(公告)日:2003-05-13

    申请号:US10121723

    申请日:2002-04-15

    IPC分类号: B41J214

    摘要: An ink-jet print head preventing thermal accumulation on a nozzle plate includes a substrate, a channel formed in the substrate to supply ink, a nozzle plate connected to the substrate and including a nozzle corresponding to the channel, a heat element formed in the nozzle plate to surround the nozzle, a thermal conduction layer formed on an upper side of the heat element formed between the thermal conduction layer and the heat element, and a thermal shunt spaced-apart from the heat element by a predetermined distance not to overlap the heat element in a direction parallel to the nozzle plate and connecting the thermal conduction layer to the substrate. Redundant heat generated from the heat element is not accumulated on a membrane of the nozzle plate but is rapidly absorbed into an inorganic thermal conduction layer formed in the membrane and is transferred to the bulk silicon substrate through a metallic thermal bridge, such as the thermal shunt.

    摘要翻译: 防止喷嘴板上的热积聚的喷墨打印头包括基板,形成在基板中以供应墨水的通道,连接到基板并包括与通道对应的喷嘴的喷嘴板,形成在喷嘴中的热元件 围绕所述喷嘴的板,形成在所述热传导层和所述加热元件之间的所述加热元件的上侧上的导热层,以及与所述加热元件间隔开预定距离而不与所述热量重叠的热分流器 元件在平行于喷嘴板的方向上并将导热层连接到基板。 从加热元件产生的冗余热量不会积聚在喷嘴板的膜上,而是迅速地被吸收到形成在膜中的无机导热层中,并通过金属热桥转移到体硅衬底,例如热分流 。