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    Ink-jet printhead and method of manufacturing the same
    2.
    发明授权
    Ink-jet printhead and method of manufacturing the same 失效
    喷墨打印头及其制造方法

    公开(公告)号：US06880919B2

    公开(公告)日：2005-04-19

    申请号：US10404423

    申请日：2003-04-02

    申请人： Jae-sik Min ,  Seo-hyun Cho ,  Byung-ha Park ,  Myung-jong Kwon ,  Kyong-il Kim ,  Yong-shik Park

    发明人： Jae-sik Min ,  Seo-hyun Cho ,  Byung-ha Park ,  Myung-jong Kwon ,  Kyong-il Kim ,  Yong-shik Park

    IPC分类号： B41J2/05 ,  B41J2/135 ,  B41J2/14 ,  B41J2/16 ,  B41J2/315

    CPC分类号： B41J2/1645 ,  B41J2/14137 ,  B41J2/1601 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1646 ,  B41J2002/1437

    摘要： An ink-jet printhead includes a substrate on which an ink chamber is formed, and a nozzle plate to cover the ink chamber, having a nozzle through which ink droplets are ejected from the ink chamber, and formed of a stack of a multi-layer insulating layer. The ink-jet printhead also includes a heater buried in the nozzle plate to surround the nozzle, an interconnection layer buried in the nozzle plate to electrically connect to the heater, and a coating layer formed of photoresist on the nozzle plate and having a through hole-type droplet guide connected to the nozzle of the nozzle plate. The droplet guide is formed through the coating layer, which has a sufficient thickness, and enables a meniscus of ink to be rapidly restored and stabilized, and ink droplets to be ejected at a high speed and high frequency. Also, the ink-jet printhead has improved resistance to abrasion and chemicals.

    摘要翻译： 喷墨打印头包括其上形成有墨水室的基板和用于覆盖墨水室的喷嘴板，具有喷嘴，墨滴通过喷嘴从墨水室喷出，并且由多层 绝缘层。 喷墨打印头还包括埋在喷嘴板中以围绕喷嘴的加热器，埋在喷嘴板中以电连接到加热器的互连层，以及在喷嘴板上由光致抗蚀剂形成的涂层，并且具有通孔 型液滴引导件连接到喷嘴板的喷嘴。 液滴引导件通过具有足够厚度的涂层形成，并且能够快速恢复和稳定墨水的弯液面，并且以高速和高频喷射墨滴。 此外，喷墨打印头具有改善的耐磨性和耐化学性。

    Ink-jet printhead and method for manufacturing the same
    3.
    发明授权
    Ink-jet printhead and method for manufacturing the same 失效
    喷墨打印头及其制造方法

    公开(公告)号：US07153633B2

    公开(公告)日：2006-12-26

    申请号：US11088985

    申请日：2005-03-24

    申请人： Jae-sik Min ,  Seo-hyun Cho ,  Byung-ha Park ,  Myung-jong Kwon ,  Kyong-il Kim ,  Yong-shik Park

    发明人： Jae-sik Min ,  Seo-hyun Cho ,  Byung-ha Park ,  Myung-jong Kwon ,  Kyong-il Kim ,  Yong-shik Park

    IPC分类号： B41J2/16

    CPC分类号： B41J2/1645 ,  B41J2/14137 ,  B41J2/1601 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1646 ,  B41J2002/1437

    摘要： An ink-jet printhead includes a substrate on which an ink chamber is formed, and a nozzle plate to cover the ink chamber, having a nozzle through which ink droplets are ejected from the ink chamber, and formed of a stack of a multi-layer insulating layer. The ink-jet printhead also includes a heater buried in the nozzle plate to surround the nozzle, an interconnection layer buried in the nozzle plate to electrically connect to the heater, and a coating layer formed of photoresist on the nozzle plate and having a through hole-type droplet guide connected to the nozzle of the nozzle plate. The droplet guide is formed through the coating layer, which has a sufficient thickness, and enables a meniscus of ink to be rapidly restored and stabilized, and ink droplets to be ejected at a high speed and high frequency. Also, the ink-jet printhead has improved resistance to abrasion and chemicals.

    摘要翻译： 喷墨打印头包括其上形成有墨水室的基板和用于覆盖墨水室的喷嘴板，具有喷嘴，墨滴通过喷嘴从墨水室喷出，并且由多层 绝缘层。 喷墨打印头还包括埋在喷嘴板中以围绕喷嘴的加热器，埋在喷嘴板中以电连接到加热器的互连层，以及在喷嘴板上由光致抗蚀剂形成的涂层，并且具有通孔 型液滴引导件连接到喷嘴板的喷嘴。 液滴引导件通过具有足够厚度的涂层形成，并且能够快速恢复和稳定墨水的弯液面，并且以高速和高频喷射墨滴。 此外，喷墨打印头具有改善的耐磨性和耐化学性。

    Ink-jet printhead with droplet ejecting portion provided in a hydrophobic layer
    5.
    发明授权
    Ink-jet printhead with droplet ejecting portion provided in a hydrophobic layer 失效
    具有设置在疏水层中的液滴喷射部的喷墨打印头

    公开(公告)号：US07175257B2

    公开(公告)日：2007-02-13

    申请号：US11280225

    申请日：2005-11-17

    申请人： Byung-ha Park ,  Seo-hyun Cho ,  Myung-jong Kwon ,  Yong-shik Park ,  Kyong-il Kim ,  Jae-sik Min

    发明人： Byung-ha Park ,  Seo-hyun Cho ,  Myung-jong Kwon ,  Yong-shik Park ,  Kyong-il Kim ,  Jae-sik Min

    IPC分类号： B41J2/135

    CPC分类号： B41J2/14137 ,  B41J2/1601 ,  B41J2/1606 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/1437

    摘要： An ink-jet printhead and a manufacturing method thereof include a substrate on which an ink chamber having a predetermined volume is formed, a passage for supplying ink to the ink chamber which is formed on a bottom of the ink chamber, a nozzle plate which includes a nozzle corresponding to a center of the ink chamber and at least two insulating layers formed on the substrate, a bubble guide formed inside the nozzle plate and extending from the nozzle into the ink chamber, and a heater which surrounds the nozzle and is disposed between the two insulating layers. A hydrophobic coating layer is formed on a surface of a uppermost layer of the nozzle plate, and a droplet ejecting portion that has a diameter smaller than that of the nozzle of the nozzle plate and is disposed on the same axis as the nozzle, is formed in the hydrophobic coating layer. The nozzle plate is prevented from becoming wet due to ink, stability of an ink spray and a consecutive spray performance are improved, and thus a printing quality and a printing performance of the ink-jet printhead are generally improved.

    摘要翻译： 喷墨打印头及其制造方法包括其上形成有预定体积的墨室的基板，用于向形成在墨室底部的墨室供墨的通道，喷嘴板包括 对应于墨水腔的中心的喷嘴和形成在基板上的至少两个绝缘层，形成在喷嘴板内部并从喷嘴延伸到墨室中的气泡引导件，以及围绕喷嘴并设置在喷墨头之间的加热器 两个绝缘层。 在喷嘴板的最上层的表面上形成疏水性涂层，并且形成直径小于喷嘴板的喷嘴直径且与喷嘴相同的轴线的液滴喷射部 在疏水涂层中。 由于墨水防止喷嘴板变湿，墨喷射的稳定性和连续喷射性能得到改善，因此喷墨打印头的打印质量和打印性能通常得到改善。

    Ink-jet print head and method thereof
    6.
    发明授权
    Ink-jet print head and method thereof 失效
    喷墨打印头及其方法

    公开(公告)号：US06561626B1

    公开(公告)日：2003-05-13

    申请号：US10121723

    申请日：2002-04-15

    申请人： Jae-sik Min ,  Seo-hyun Cho ,  Sang-wook Lee ,  Jun-hyub Park ,  Yong-shik Park ,  Kyong-il Kim

    发明人： Jae-sik Min ,  Seo-hyun Cho ,  Sang-wook Lee ,  Jun-hyub Park ,  Yong-shik Park ,  Kyong-il Kim

    IPC分类号： B41J214

    CPC分类号： B41J2/14137 ,  B41J2/14129 ,  B41J2002/1437 ,  Y10T29/49083 ,  Y10T29/49401

    摘要： An ink-jet print head preventing thermal accumulation on a nozzle plate includes a substrate, a channel formed in the substrate to supply ink, a nozzle plate connected to the substrate and including a nozzle corresponding to the channel, a heat element formed in the nozzle plate to surround the nozzle, a thermal conduction layer formed on an upper side of the heat element formed between the thermal conduction layer and the heat element, and a thermal shunt spaced-apart from the heat element by a predetermined distance not to overlap the heat element in a direction parallel to the nozzle plate and connecting the thermal conduction layer to the substrate. Redundant heat generated from the heat element is not accumulated on a membrane of the nozzle plate but is rapidly absorbed into an inorganic thermal conduction layer formed in the membrane and is transferred to the bulk silicon substrate through a metallic thermal bridge, such as the thermal shunt.

    摘要翻译： 防止喷嘴板上的热积聚的喷墨打印头包括基板，形成在基板中以供应墨水的通道，连接到基板并包括与通道对应的喷嘴的喷嘴板，形成在喷嘴中的热元件 围绕所述喷嘴的板，形成在所述热传导层和所述加热元件之间的所述加热元件的上侧上的导热层，以及与所述加热元件间隔开预定距离而不与所述热量重叠的热分流器 元件在平行于喷嘴板的方向上并将导热层连接到基板。 从加热元件产生的冗余热量不会积聚在喷嘴板的膜上，而是迅速地被吸收到形成在膜中的无机导热层中，并通过金属热桥转移到体硅衬底，例如热分流 。

    Ink-jet print head and method thereof
    7.
    发明授权
    Ink-jet print head and method thereof 失效

    公开(公告)号：US06663226B2

    公开(公告)日：2003-12-16

    申请号：US10309122

    申请日：2002-12-04

    申请人： Jae-sik Min ,  Seo-hyun Cho ,  Sang-wook Lee ,  Jun-hyub Park ,  Yong-shik Park ,  Kyong-il Kim

    发明人： Jae-sik Min ,  Seo-hyun Cho ,  Sang-wook Lee ,  Jun-hyub Park ,  Yong-shik Park ,  Kyong-il Kim

    IPC分类号： B41J205

    CPC分类号： B41J2/14137 ,  B41J2/14129 ,  B41J2002/1437 ,  Y10T29/49083 ,  Y10T29/49401

    摘要： An ink-jet print head preventing thermal accumulation on a nozzle plate includes a substrate, a channel formed in the substrate to supply ink, a nozzle plate connected to the substrate and including a nozzle corresponding to the channel, a heat element formed in the nozzle plate to surround the nozzle, a thermal conduction layer formed on an upper side of the heat element formed between the thermal conduction layer and the heat element, and a thermal shunt spaced-apart from the heat element by a predetermined distance not to overlap the heat element in a direction parallel to the nozzle plate and connecting the thermal conduction layer to the substrate. Redundant heat generated from the heat element is not accumulated on a membrane of the nozzle plate but is rapidly absorbed into an inorganic thermal conduction layer formed in the membrane and is transferred to the bulk silicon substrate through a metallic thermal bridge, such as the thermal shunt.

    Ink-jet printhead
    8.
    发明授权
    Ink-jet printhead 失效
    喷墨打印头

    公开(公告)号：US06702428B2

    公开(公告)日：2004-03-09

    申请号：US10268083

    申请日：2002-10-10

    申请人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-cheol Ko ,  Jae-sik Min ,  Kyong-il Kim ,  Byung-ha Park ,  Tae-kyun Kim ,  Myung-song Jung

    发明人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-cheol Ko ,  Jae-sik Min ,  Kyong-il Kim ,  Byung-ha Park ,  Tae-kyun Kim ,  Myung-song Jung

    IPC分类号： B41J205

    CPC分类号： B41J2/1603 ,  B41J2/14129 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645

    摘要： A bubble-jet type ink-jet printhead has a structure in which a base plate, a barrier wall, and a nozzle plate are stacked. The base plate includes a substrate on which a recess is formed to a predetermined depth, an adiabatic layer formed on the substrate, a heater which is formed on the adiabatic layer and generates a thermal energy, and a passivation layer which is formed on the heater and passivates the heater. The barrier wall is stacked on the base plate, defines an ink chamber, which is disposed on the recess and has a recessed bottom surface, and defines an ink passage which communicates with the ink chamber. The nozzle plate is stacked on the barrier wall, has nozzles through which ink is ejected, and is formed at a location corresponding to a center of the ink chamber. Since a height of the barrier wall surrounding the ink chamber is reduced by the recess, delamination caused by ink soaked into the barrier wall can be prevented, and print performances such as a traveling property in a straight direction of ink droplets and ejection velocity of ink droplets, are improved.

    摘要翻译： 气泡喷墨式喷墨打印头具有堆叠基板，阻挡壁和喷嘴板的结构。 基板包括基板，其上形成有预定深度的凹部，在基板上形成的绝热层，形成在绝热层上并产生热能的加热器，以及形成在加热器上的钝化层 并加热加热器。 阻挡壁堆叠在基板上，限定了一个墨水室，它设置在凹槽上并具有凹入的底面，并且限定了与墨水室连通的墨水通道。 喷嘴板堆叠在阻挡壁上，具有喷嘴，墨通过喷嘴喷射，并且形成在与墨水室的中心对应的位置。 由于凹部围绕墨水室的阻挡壁的高度被凹部减小，因此能够防止由墨水浸透到阻挡壁中的墨分层，并且墨滴直线方向的行进特性和墨滴的喷射速度等打印性能 液滴，改进。

    Method of manufacturing monolithic ink-jet printhead
    9.
    发明授权
    Method of manufacturing monolithic ink-jet printhead 失效
    单片喷墨打印头的制造方法

    公开(公告)号：US06806108B2

    公开(公告)日：2004-10-19

    申请号：US10246622

    申请日：2002-09-19

    申请人： Yong-shik Park ,  Sang-wook Lee ,  Jae-sik Min ,  Seo-hyun Cho ,  Keon Kuk

    发明人： Yong-shik Park ,  Sang-wook Lee ,  Jae-sik Min ,  Seo-hyun Cho ,  Keon Kuk

    IPC分类号： H01L2100

    CPC分类号： B41J2/1642 ,  B41J2/14137 ,  B41J2/1601 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2002/1437

    摘要： A method of manufacturing a monolithic ink-jet printhead includes preparing a silicon substrate, forming an ink passage comprising a manifold supplying ink, an ink chamber filled with ink supplied from the manifold, an ink channel connecting the ink chamber to the manifold, and a nozzle through which the ink is ejected from the ink chamber, on the silicon substrate, and reprocessing a wall of the ink passage by passing XeF2 gas through the ink passage and dry etching the wall of the ink passage. In the reprocessing of the wall of the ink passage using XeF2 gas, the wall of the ink passage is smoothed, and a size of the ink passage can be more precisely adjusted to a design dimension, thereby improving a printing performance of the ink-jet printhead.

    摘要翻译： 一种制造单片式喷墨打印头的方法包括：制备硅基片，形成一个墨水通道，该墨水通道包括一个供应墨水的歧管，一个填充有从该歧管供应的墨水的墨水室，一个将该墨水室连接到歧管的墨水通道，以及一个 喷嘴，油墨从油墨室喷射到硅基板上，并且通过使XeF2气体通过油墨通道并对油墨通道的壁进行干蚀刻来再处理油墨通道的壁。 在使用XeF2气体对油墨通道的壁进行后处理时，油墨通道的壁被平滑化，并且可以将油墨通道的尺寸更精确地调节到设计尺寸，从而提高喷墨打印性能 打印头。

    Method of manufacturing monolithic ink-jet printhead
    10.
    发明授权
    Method of manufacturing monolithic ink-jet printhead 失效
    单片喷墨打印头的制造方法

    公开(公告)号：US06762012B2

    公开(公告)日：2004-07-13

    申请号：US10287488

    申请日：2002-11-05

    申请人： Tae-kyun Kim ,  Seo-hyun Cho ,  Myung-song Jung ,  Kyong-il Kim ,  Sung-joon Park

    发明人： Tae-kyun Kim ,  Seo-hyun Cho ,  Myung-song Jung ,  Kyong-il Kim ,  Sung-joon Park

    IPC分类号： B41J216

    CPC分类号： B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  G03F7/038 ,  G03F7/2022

    摘要： A method of manufacturing a monolithic ink-jet printhead includes a heating element which generates bubbles by heating ink is formed on a surface of the substrate, and a negative photoresist which is coated to a predetermined thickness on the substrate on which the heating element is formed. Next, a portion, which forms a sidewall of an ink passage forming wall surrounding an ink chamber and a restrictor, of the negative photoresist is flush exposed to light and cured using a first photomask in which patterns of the ink chamber and the restrictor of the ink passage are formed. Subsequently, a second portion which forms an upper wall of the ink passage forming wall of the negative photoresist is exposed to the light using a second photomask in which the pattern of a nozzle is formed, and the second portion is exposed to the light by only a predetermined thickness. Last, an uncured portion of the negative photoresist is dissolved and removed using solvent. An ink-jet printhead whose elements are monolithically formed by a simplified process using a single negative photoresist can be manufactured.

    摘要翻译： 制造单片式喷墨打印头的方法包括：在基板的表面上形成通过加热油墨产生气泡的加热元件，以及在其上形成有加热元件的基板上涂覆预定厚度的负性光致抗蚀剂 。 接下来，将形成负光致抗蚀剂的墨水通道形成壁的侧壁和限制器的部分齐平地暴露于光并且使用第一光掩模进行固化，其中，在第一光掩模中，墨水腔和图像的限制器 形成油墨通道。 随后，使用其中形成喷嘴图案的第二光掩模将形成负光致抗蚀剂的墨通道形成壁的上壁的第二部分暴露于光，并且仅将第二部分暴露于光 预定厚度。 最后，使用溶剂溶解并除去负光致抗蚀剂的未固化部分。 可以制造通过使用单一负性光致抗蚀剂的简化工艺来单元地形成元件的喷墨打印头。