公开(公告)号：US20190311894A1

公开(公告)日：2019-10-10

申请号：US16449070

申请日：2019-06-21

申请人： L'Air Liquide, Société Anonyme pour I'Etude et I'Exploitation des Procédés Georges Claude

发明人： Jean-Marc GIRARD ,  Peng Zhang ,  Antonio Sanchez ,  Manish Khandelwal ,  Gennadiy Itov ,  Reno Pesaresi ,  Grigory Nikiforov ,  David Orban

IPC分类号： H01L21/02 ,  C01B21/088 ,  C23C16/455 ,  C23C16/515 ,  C07F7/02 ,  C23C16/40 ,  C23C16/34 ,  C23C16/30 ,  C01B21/087

摘要： Methods for halogenation of a hydrosilazane include contacting the hydrosilazane with a halogenating agent in a liquid phase to produce the halosilazane having a formula (SiHa(NR2)bXc)(n+2)Nn(SiH(2−d)Xd)(n−1), wherein each a, b, c is independently 0 to 3; a+b+c=3; d is 0 to 2 and n≥1; wherein X is selected from a halogen atom selected from F, Cl, Br or I; each R is selected from H, a C1-C6 linear or branched, saturated or unsaturated hydrocarbyl group, or a silyl group [SiR′3]; further wherein each R′ of the [SiR′3] is independently selected from H, a halogen atom selected from F, Cl, Br or I, a C1-C4 saturated or unsaturated hydrocarbyl group, a C1-C4 saturated or unsaturated alkoxy group, or an amino group [—NR1R2] with each R1 and R2 being further selected from H or a C1-C6 linear or branched, saturated or unsaturated hydrocarbyl group.