公开(公告)号：US20220247492A1

公开(公告)日：2022-08-04

申请号：US17617517

申请日：2020-06-08

Applicant: LAM RESEARCH CORPORATION

Inventor： Changyou JING ,  Fred EGLEY

IPC: H04B10/25 ,  H01J37/32 ,  H04B10/80 ,  H04B10/564

Abstract: A substrate support assembly comprises a first optical receiver, a power converter, a first circuit, and a first optical transmitter, all embedded in the substrate support assembly. The first optical receiver is configured to receive a first optical signal and a first optical data through a fiber optic cable. The power converter is configured to generate DC power based on the first optical signal and the first optical data received by the first optical receiver. The first circuit is configured to receive the DC power from the power converter and to receive a second data from a sensor disposed in the substrate support assembly in response to the first optical data. The first optical transmitter is configured to transmit the second data as a second optical data through the fiber optic cable.