公开(公告)号：US20220238360A1

公开(公告)日：2022-07-28

申请号：US17614930

申请日：2020-05-29

Applicant: LAM RESEARCH CORPORATION

Inventor： Siyuan TIAN ,  Yuma OHKURA ,  Changyou JING ,  Matthew CLAUSSEN

IPC: H01L21/67 ,  H01L21/683 ,  H01J37/32 ,  G01K1/08 ,  G01K1/143

Abstract: A sensor probe includes an elongated body defining an inner cavity having an inner diameter. A printed circuit board is configured to be fitted within the inner cavity. A first temperature-sensing integrated circuit mounted at a first end of the printed circuit board. A cap is mounted to a first end of the elongated body adjacent to the first temperature-sensing integrated circuit. A housing is configured to receive a second end of the elongated body, wherein the housing is configured to be mounted to a baseplate of a substrate support.

公开(公告)号：US20250069866A1

公开(公告)日：2025-02-27

申请号：US18940259

申请日：2024-11-07

Applicant: LAM RESEARCH CORPORATION

Inventor： Changyou JING ,  Benny WU ,  Oleksandr MIKHNENKO ,  Slobodan MITROVIC

IPC: H01J37/32 ,  C23C16/458 ,  C23C16/48 ,  H01L21/67 ,  H01L21/683

Abstract: Systems and methods of the disclosure perform in situ sensing and real time compensation of various non-uniformities in substrate processing systems. A plasma non-uniformity is sensed by determining a temperature distribution across a matrix of a plurality of micro-heaters disposed in the substrate support. Alternatively, the plasma non-uniformity is sensed by determining heat flux through the substrate support using the matrix heaters and one or more heaters used to heat one or more zones of the substrate support. The plasma non-uniformity is compensated by adjusting one or more parameters such as power supplied to the matrix heaters, RF power supplied to generate plasma, chemistry and/or flow rate of gas or gases used to generate plasma, settings of thermal control units or chillers, and so on. Additionally, non-uniformities inherent in the substrate support are sensed using the zone and matrix heaters and are compensated by adjusting the one or more parameters.

公开(公告)号：US20220277928A1

公开(公告)日：2022-09-01

申请号：US17628282

申请日：2020-07-21

Applicant: LAM RESEARCH CORPORATION

Inventor： Changyou JING ,  Benny WU ,  Oleksandr MIKHNENKO ,  Slobodan MITROVIC

IPC: H01J37/32

Abstract: Systems and methods of the disclosure perform in situ sensing and real time compensation of various non-uniformities in substrate processing systems. A plasma non-uniformity is sensed by determining a temperature distribution across a matrix of a plurality of micro-heaters disposed in the substrate support. Alternatively, the plasma non-uniformity is sensed by determining heat flux through the substrate support using the matrix heaters and one or more heaters used to heat one or more zones of the substrate support. The plasma non-uniformity is compensated by adjusting one or more parameters such as power supplied to the matrix heaters, RF power supplied to generate plasma, chemistry and/or flow rate of gas or gases used to generate plasma, settings of thermal control units or chillers, and so on. Additionally, non-uniformities inherent in the substrate support are sensed using the zone and matrix heaters and are compensated by adjusting the one or more parameters.

公开(公告)号：US20220247492A1

公开(公告)日：2022-08-04

申请号：US17617517

申请日：2020-06-08

Applicant: LAM RESEARCH CORPORATION

Inventor： Changyou JING ,  Fred EGLEY

IPC: H04B10/25 ,  H01J37/32 ,  H04B10/80 ,  H04B10/564

Abstract: A substrate support assembly comprises a first optical receiver, a power converter, a first circuit, and a first optical transmitter, all embedded in the substrate support assembly. The first optical receiver is configured to receive a first optical signal and a first optical data through a fiber optic cable. The power converter is configured to generate DC power based on the first optical signal and the first optical data received by the first optical receiver. The first circuit is configured to receive the DC power from the power converter and to receive a second data from a sensor disposed in the substrate support assembly in response to the first optical data. The first optical transmitter is configured to transmit the second data as a second optical data through the fiber optic cable.