公开(公告)号：US20150279621A1

公开(公告)日：2015-10-01

申请号：US14730771

申请日：2015-06-04

Applicant: LAM RESEARCH CORPORATION

Inventor： Daniel Arthur Brown ,  Jeff A. Bogart ,  Ian J. Kenworthy

IPC: H01J37/32

CPC classification number: H01J37/3244 ,  C23C16/45563 ,  C23C16/45578 ,  H01J37/321 ,  H01J37/32119 ,  H01J37/32449 ,  H01J37/32458 ,  H01J37/32477 ,  H01J37/32495 ,  H01J37/32513 ,  H01J37/32522

Abstract: An upper chamber section of a plasma reaction chamber includes a ceramic window with blind bores in an upper surface for receipt of a thermal couple and a resistance temperature detector, a top chamber interface which comprises an upper surface which vacuum seals against the bottom of the window and a gas injection system comprising 8 side injectors mounted in the sidewall of the top chamber interface and a gas delivery system comprising tubing which provides symmetric gas flow to the 8 injectors from a single gas feed connection.

Abstract translation: 等离子体反应室的上腔室包括在上表面中具有用于接收热偶的盲孔的陶瓷窗口和电阻温度检测器，顶室接口，其包括上表面，真空密封在窗口的底部 以及气体注入系统，其包括安装在顶部腔室界面的侧壁中的8个侧注射器，以及气体输送系统，其包括从单个气体进料连接向8个喷射器提供对称气体流的管道。