公开(公告)号：US09322795B2

公开(公告)日：2016-04-26

申请号：US13867961

申请日：2013-04-22

Applicant: Lam Research Corporation

Inventor： Jaehyun Kim ,  Arthur H. Sato ,  Keith Comendant ,  Qing Liu ,  Feiyang Wu

IPC: G01N27/04 ,  G01R27/26

CPC classification number: G01N27/04 ,  G01R27/2623 ,  Y10T29/49117

Abstract: A plate of substantially uniform thickness is formed from an electrically conductive material. The plate has a top surface defined to support a part to be measured. The plate has a bottom surface defined to be connected to a radiofrequency (RF) transmission rod such that RF power can be transmitted through the RF transmission rod to the plate. The plate is defined to have a number of holes cut vertically through the plate at a corresponding number of locations that underlie embedded conductive material items in the part to be measured when the part is positioned on the top surface of the plate.

公开(公告)号：US20130241581A1

公开(公告)日：2013-09-19

申请号：US13867961

申请日：2013-04-22

Applicant: LAM RESEARCH CORPORATION

Inventor： Jaehyun Kim ,  Arthur H. Sato ,  Keith Comendant ,  Qing Liu ,  Feiyang Wu

IPC: G01N27/04

CPC classification number: G01N27/04 ,  G01R27/2623 ,  Y10T29/49117

Abstract: A plate of substantially uniform thickness is formed from an electrically conductive material. The plate has a top surface defined to support a part to be measured. The plate has a bottom surface defined to be connected to a radiofrequency (RF) transmission rod such that RF power can be transmitted through the RF transmission rod to the plate. The plate is defined to have a number of holes cut vertically through the plate at a corresponding number of locations that underlie embedded conductive material items in the part to be measured when the part is positioned on the top surface of the plate.